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2001 Fiscal Year Final Research Report Summary

MEMS Active Probe for Wafer-level Switching Contacter

Research Project

Project/Area Number 12650049
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionThe University of Tokyo

Principal Investigator

ITOH Toshihiro  Research Center for Advanced Science and Technology, The University of Tokyo Associate Professor, 先端科学技術研究センター, 助教授 (80262111)

Co-Investigator(Kenkyū-buntansha) HOSODA Naoe  Faculty of Engineering, The University of Tokyo Associate Professor, 大学院・工学系研究科, 助教授 (50280954)
Project Period (FY) 2000 – 2001
KeywordsMEMS Probe Card / Fritting Contact / Contact Resistance / Microcantilever / Ni Electroplating / Wafer-level Contacter / Switching Contact / Atomic Force Microscope
Research Abstract

The purpose of this stude is to propose the new IC probe card which consists of actuator-integrated MEMS probes and enables the direct switching of contacts. Also, we have attempted to develop basic fabrication processes to realize it. Specifically, we have studied the fritting contact process which is a kind of electrical breakdown and is indispensable to make contact to Al pads with low forces using the MEMS probe. The important results are described below.
1. Characterization of fritting contact using newly developed measurement systems
We have realized the systems which can measure the fritting-contact characteristics with the force resolution of 10 μN and measured the characteristics of the contacts between several kinds of probes and pad metallurgy films of Al and Cu.
(1) Contact resistance decreases with increasing the maximum fritting current determined by the fritting voltage and circuit resistance.
(2) Ni probe can have lowest contact resistance among the conventional probes. When the limit current is larger than 100 mA, the resistance can be smaller than 1 Ω, even if the contact force is around 10μN.
2. Development of electroplated Ni microcantilever probes
We have proposed the micromachined Ni curl-up cantilever utilizing the difference of internal stress in electroplated Ni double layers and developed its fabrication process. The internal stress difference of about 400 MPa has successfully been obtained utilizing a salfamic acid bath for the lower low-stress layer and a Watts bath for the upper high-stress layer.
We have demonstrated that the Ni microcantilever probes can be applied to the test of IC with the pad pitch of less than 20 μm, by measuring the spring constant of the fabricated microprobes as 70 % of calculated value and showing their fritting characteristics are comparable to those of the conventional needle probes.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] 伊藤寿浩: "マイクロマシンプローブカードへのフリッティングコンタクトプロセスの適用可能性"精密工学会誌. 67・8. 1239-1243 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshihiro Itoh: "Characteristics of Low Force Contact Process for MEMS Probe Cards"Digest of Technical Papers -The 11th International Conference on Solid-State Sensors and Actuators (Transducers'01), Munich (June). 1422-1425 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshihiro Itoh: "DEVELOPMENT OF MEMS IC PROBE CARD UTILIZING FRITTING CONTACT"Initiatives of Precision Engineering at the beginning of a milleniwn -10th International Conference on Precision Engineering (ICPE), Yokohama (July). 314-318 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kenichi Kataoka: "LOW CONTACT-FORCE AND COMPLIANT MEMS PROBE CARD UTILIZING FRITTING CONTACT"Proc. 15th Int. Workshop on Micro Electro Mechanical Systems (MEMS'02), Las Vegas (Jan.). 364-367 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 伊藤寿浩: "MEMSプローブカードのためのフリッティングコンタクトプロセス"第16回エレクトロニクス実装学術講演大会講演論文集. 315-316 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshihiro Itoh: "Characteristics of Low Force Contact Process for MEMS Probe Cards"Sensors & Actuators A. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshihiro ITOH, et al: "Applicability of Fritting Contacts to Micromachined Probe Card"Journal of the Japan Society for Precision Engineering. 67-5 (in Japanese). 1239-1243 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toshihiro ITOH, et al: "Characterisiics of Low Force Contact Process for MEMS Probe Cards"Digest of Technical Papers - The 11th International Conference on Solid-State Sensors and Actuators (Transducers'01), Munich (June). 1422-1425 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toshihiro ITOH, et al: "DEVELOPMENT OF MEMS IC PROBE CARD UTILIZING FRITTING CONTACT"Intiatives of Precision Engineering at the beginning of a milenium - 10th International Conference on Precision Engineering (ICPE), Yokohama (July). 314-318 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kenichi KATAOKA, et al: "LOW CONTACT-FORCE AND COMPLIANT MEMS PROBE CARD UTILIZING FRITTING CONTACT"Proc. 15th Int. Workshop on Micro Electro Mechanical Systems (MEMS'02), Las Vegas (Jan). 364-367 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toshihiro ITOH, et al: "Fritting Contact Process for MEMS Probe Cards"Proceedings of the 16th JIEP Annual Meeting, Yokohama (Mar.). (in Japanese). 315-316 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toshihiro ITOH, et al: "Characteristics of Low Force Contact Process for MEMS Probe Cards"Sensors & Actuators A. (in press,). (2002)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2003-09-17  

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