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2001 Fiscal Year Final Research Report Summary

DEVELOPMENT OF COMPACT EXHUST GAS TREATMENT EQUIPMENT FOR DIESEL ENGINE USING DIELECTRIC BARRIER DISCHARGE

Research Project

Project/Area Number 12680470
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionIWATE UNIVERSITY

Principal Investigator

FUJIWARA Tamiya  IWATE UNIVERSITY, PROFESSOR, 工学部, 教授 (70042207)

Co-Investigator(Kenkyū-buntansha) TAKAKI Koichi  IWATE UNIVERSITY, ASSOCIATE PROFESSOR, 工学部, 助教授 (00216615)
YASIRO Hitoshi  IWATE UNIVERSITY, ASSOCIATE PROFESSOR, 工学部, 助教授 (60174497)
SATO Nobuyasu  IWATE UNIVERSITY, PROFESSOR, 教育学部, 教授 (20001290)
KOISHIKAWA Akihiko  IWATE STEEL Co., RESEARCHER, 鋳物事業部, 課長(研究職)
SASAKI Akihiko  MIYAGI NATIONAL COLLEGE, PROFESSOR, 電気工学科, 教授 (50026308)
Project Period (FY) 2000 – 2001
KeywordsPBII / PIIP / GLOW DISCHARGE / PULSED POWER / ION IMPLANTATION / SURFACE TREATMENT / PULSE DISCHARGE / FLUX
Research Abstract

The purpose of this project is to refine a three dimensional complex material, like the mold metal frame, by the surface treatment (cleaning, coating) and/or surface refining (ion implantation), making use of the combination of high repetitive pulse modulator for large capacity and high density glow plasma generation and pulse biasing for extraction of ions. The project was performed in the following three subjects to realize the purpose. (1) The first step is to grasp the heat flux from plasma into the material and plasma parameter of the pulsed glow discharge. (2) The second step is to develop a pulse modulator for plasma generation and bias voltage supply. (3) The third is the numerical simulation by the fluid modeling. The results are as follows.
1. It was clarified that the plasma parameter of the pulsed glow discharge by probe measurement, current-voltage characteristics, and the spectroscopic analysis. The plasma density 3 x 10^<11> cm^<-3> was sustained over a period of 8 μs app … More roximately. The plasma temperature has increased form 450 ℃ to 650 ℃ in this period. This temperature rise generate the heat flux. Estimating the ratio of the heat flux to the input power, it was found that the ratio came up to 40 % approximately.
2. Combining the SOS diode and inductive energy storage system, we produce the pulse generator for ion extraction from ultra thin theath, before the transition form ion matrix to Bohm theath. The specification of the pulse generator are output voltage -20 kV, repetition frequency hundreds Hz, and pulse width 60 ns. The pulse width is short enough compared with the Bohm theath formation time(1 μs).
3. The numerical analysis of the 2D fluid model was progressed. It was found that the special plasma distribution was remarkable modified by the earth sealed which guard the electrode material to the suputtering. The probe measurement result of the plasma distribution was consistent with the numerical calculation. We also analyzed the ion number density making use of the chemical reaction models. In nitrogen cases, it was found that N_2^+ and N_4^+ are dominated in this reaction. Less

  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] K.Takaki D.Koseki, T.Fujiwara: "Heat flux distribution on a substrate in capacitively coupled radio-frequency discharges"Applied Physics Letters. 80・9(in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高木浩一, 向川政治, 藤原民也: "パルスバイアス印加時のRFプラズマから基板への熱流束"プラズマ応用科学. 9. 105-112 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takaki, D.Taguchi, T.Fujiwara: "Voltage-current characteristics of high-current glow discharges"Applied Physics Letters. 78・18. 2646-2648 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takaki, D.Koseki, T.Fujiwara: "Determination of heat and ion fluxes in a rf plasma by in-situ measurement of temperature using laser interferometry"Surface and Coatings Technology. 136. 261-264 (2001)

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      「研究成果報告書概要(和文)」より
  • [Publications] K.Takaki, D.Koseki, T.Fujiwara: "Influence of a ground shield on heat flux in parallel plate plasma system"Journal of Physics D : Applied Physics. 33. 3060-3065 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takaki, D.Kitamura, T.Fujiwara: "Characteristics of high-current transient glow discharge in dry air"Journal of Physics D : Applied Physics. 33. 1369-1375 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 電気学会プラズマイオン注入調査専門委員会(高木浩一:分筆): "プラズマイオン注入法とその応用(電気学会技術報告 第860号)"電気学会 プラズマ技術委員会. 59 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Takaki, D. Koseki, T. Fujiwara: "Heat flux distribution on a substrate in capacitively coupled radio-frequency discharges"Applied Physics Letters. Vol.80, No.9 (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, Y. Fujimaki, Y. Takada, M. Itagaki, T. Fujiwara, S. Ohshima, K. Oyama, I. Takahashi, T. Kuwashima: "A capacitor discharge technique with optimized energy for joining ceramics"Vacuum. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, S. Mukaigawa, T. Fujiwara: "Heat Flux from RF Plasma into Substrate Biased with Negative Pulse Voltage"Applied Plasma Science. Vol.19. 105-112 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, D. Taguchi, T. Fujiwara: "Voltage-current characteristics of high-current glow discharges"Applied Physics Letters. Vol.78, No.18. 2646-2648 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, D. Koseki, T. Fujiwara: "Determination of heat and ion fluxes in plasma immersion ion implantation by in situ measurement of temperature using laser interferometry"Surface and Coatings Technology. Vol.136. 261-264 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, H. Akiyama: "The resistance of a high-current pulsed discharge in nitrogen"Jap. J. Appl. Phys.. Vol.40, Part I, No. 2B. 979-983 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, A. Takahashi, T. Fujiwara: "Influence of a ground shield on heat flux in parallel-plate plasma system"Journal of Physics D : Applied Physics. Vol.33. 3060-3065 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, D. Kitamura, T. Fujiwara: "Characteristics of a high-current transient glow discharge in dry air"Journal of Physics D : Applied Physics. Vol.33. 1369-1375 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takaki, T. Kobayashi, T. Fujiwara: "Simple and inexpensive interferometry of shock wave developments from pulsed high-current discharge"Review of Scientific Instruments. Vol.71, No.3. 1548-1551 (2000)

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      「研究成果報告書概要(欧文)」より
  • [Publications] D. Kitamura, D. Koseki, K. Nakaya, K. Takaki, T. Fujiwara: "Characteristics of high current pulsed glow discharge"Trans. IEE of Japan. Vol.120-A, No.2. 225-230 (2000)

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Published: 2003-09-17  

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