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2003 Fiscal Year Final Research Report Summary

Distributed Micro-Nanomachines which move with nanometer precision

Research Project

Project/Area Number 13305010
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionTohoku University

Principal Investigator

ESASHI Masahi  Tohoku University, New Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)

Co-Investigator(Kenkyū-buntansha) TANAKA Shuji  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (00312611)
ONO Takahito  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (90282095)
HANE Kazuhiro  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50164893)
HAGA Yoichi  Tohoku University, Graduate School of Engineering, Lector, 大学院・工学研究科, 講師 (00282096)
Project Period (FY) 2001 – 2003
KeywordsMicromachining / Micromachine / Nanomachine / MEMS / Sensor / Actuator / Data storage / Resonator
Research Abstract

Nanostructures have been studied to develop distributed micro-nanomachines which are integrated systems of sensors and actuators. Micromachining based on semiconductor technology has been applied for the fabrication. High density multi probe data storage systems in which recording and reading can be carried out in parallel utilizing arrayed probes. New recording principles have been developed. These are thermomechanical recording on a thin polymer film using diamond probes, electrical recording on a thin ferroelectric film using diamond probes and electrical recording on a thin conductive polymer film. In the latter recording on a conductive polymer film, increased resistance about 30 times by the phase change of the film was used for the reading. Arrayed electron field emitters with electrostatic lens was studied for the purpose of non-contact multi probe data storage systems and multi-column electron beam lithography systems for the purpose of high throughput patterning. Carbon nano tube and diamond are used as the emitter and it was proved that surface coverage of the carbon nano tube with hydrogen enhances the electron emission and reduces the noise of the emission current. Monolithic piezoelectric stage which has 6 degrees of freedom of motion was developed. This is needed not only for the multi probe data storage systems and the multi-column electron beam lithography systems but also scanning probe microscopes and so on.
Distributed electrostatic actuators which have sub-micro gap face to face parallel electrodes, multi probe system of which probes can move with electrostatic micro actuator, near-field optical prove which has bow tie antenna and highly sensitive resonant sensor which is made of nanometer level thin cantilever.

  • Research Products

    (166 results)

All Other

All Publications (166 results)

  • [Publications] J.Yang, T.Ono, M.Esashi: "Investigating Surface Stress : Surface Loss in Ultrathin Single-Crystal Silicon Cantilevers"J.Vac.Sci.Technol.. B,19,2. 551-556 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, M.Esashi: "Spatial Distribution and Polarization Dependence of the Optical Near-field in a Silicon Microfabricated Probe"J. of Microscopy. 202,Pt.1. 28-33 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, M.Esashi: "Near-field Optical Apertured Tip and Modified Structures for Local Field Enhancement"Applied Optics. 40,15. 2479-2484 (2001)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, H.Watanabe, S.S.Lee, Y.Haga, M.Esashi: "Hybrid Optical Fiber-apertured Cantilever Near-field Probe"Applied Physics Letters. 79,19. 3020-3022 (2001)

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      「研究成果報告書概要(和文)」より
  • [Publications] B.J.Pokines, J.Tani, M.Esashi, T.Hamano, K.Mizuno, D.J.Inman: "Active Material Micro-actuator Arrays Fabricated with SU-8 Resin"Microsystem Technologies. 7. 117-119 (2001)

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      「研究成果報告書概要(和文)」より
  • [Publications] 江刺正喜: "光密度記録を目指すマルチプローブ"レーザー研究. 29,8. 516-521 (2001)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, H.Watanabe, Y.Haga, M.Esashi: "Hybrid Optical Fiber Bundle and Apertured Catilever for Optical Near-field Applications"IEEE/LEOS International Conf. on Optical MEMS 2001. 121-122 (2001)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, K.Goto, M.Esashi: "Near-field Recording with High Optical Throughput aperture Array"Sensors and Actuators. A 95. 168-174 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] D.W.Lee, T.Ono, M.Esashi: "Fabrication of Thermal Microprobes with a Sub-100nm Metal-to-metal Junction"Nanotechnology. 13. 29-32 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, H.Miyashita, M.Esashi: "Electric-field-enhanced Growth of Carbon Nanotubes for Scanning Probe Microscopy"Nanotechnology. 13. 62-64 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] 鈴木学, 江刺正喜: "溝加工と電解メッキによる積層圧電アクチュエータの製作"電気学会論文誌E. 122-E,4. 217-222 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] D.W.Lee, T.Ono, E.Abe, M.Esashi: "Microprobe Array with Electrical Interconnection for Thermal Imaging and Data Storage"J. of Microelectromechanical Systems. 11,3. 215-219 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] D.W.Lee, T.Ono, M.Esashi: "Electrical and Thermal Recording Techniques Using a Heater Integrated Microprobe"J.Micromech.Microeng.. 12,6. 841-848 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] 小野崇人, 江刺正喜: "マイクロ・ナノマシニングによる高感度センシング"Molecular Electronics and Bioelectronics. 13,4. 159-164 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, L.T.T.Tuyen, T.Ono, H.Mimura, K.Yokoo, M.Esashi: "Carbon Nanotube on a Si Tip for Electron Field Emitter"Jpn.J.Appl.Phys.. 41 Part2,12A. L1409-L1411 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Abe, Y.Liu, M.Esashi: "Fabrication of High-Density Electrical Feed-Throughs by Deep-Reactive-Ion Etching of Pyrex Glass"J. of Microelectromechanical Systems. 11,6. 625-629 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yang, T.Ono, M.Esashi: "Energy Dissipation in Submicrometer Thick Single-Crystal Silicon Cantilevers"J. of Microelectromechanical Systems. 11,6. 775-783 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Ono, Y.Wang, M.Esashi: "Study on Ultra-Thin NEMS Cantilevers - High Yield Fabrication and Size-Effect on Young's Modulus of Silicon"Technical Digest MEMS'2002, Las Vegas. 427-430 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] D.W.Lee, T.Ono, M.Esashi: "Recording on PZT and AgInSbTe thin films for probe-based data storage"Technical Digest MEMS'2002, Las Vegas. 685-688 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, L.T.Tuyen, T.Ono, H.Mimura, K.Yokoo, M.Esashi: "Fabrication and Characterization of Carbon Nanotube on a Si Tip for Electron Field Emitter"15th International Vacuum Microelectronics Conference & 48th International Field Emission Symposium. 49 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Abe, M.Esashi: "Endpoint Detectable Copper Through-hole Plating for the Fabrication of Glass with Electrical Feed-throughs"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 139-142 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.-Y.Zhang, C.Chang, T.Ono, M.Esashi: "A Piezodriven XY-Microstage for Multiprobe Nanorecording"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 449-452 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, LeT.T.Tuyen, M.Esashi: "Microfabrication and Characterization of Field Emission Device with Integrated Electrostatic Lenz Array"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 561-564 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, LeT.T.Tuyen, T.Ono, H.Mimura, M.Esashi: "Electron Field Emission with Carbon Nanotube on a Si Tip"Extended Abstracts of the 2002 Intn.Conf. on Solid State Devices and Materials. 96-97 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] H.Miyashita, T.Ono, M.Esashi: "Freestanding Carbon Nanotube Bridge Grown, by Hot-filament Chemical Vapor Deposition"2002 Internl.Microprocess and Nanotechnology Conf.. 36-37 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] C.Konoma, T.Ono, H.Miyashita, Y.Kanamori, M.Esashi: "Fabrication of Diamond Mold for Imprint Lithography"2002 Internl.Microprocess and Nanotechnology Conf.. 164-165 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, M.Esashi: "Versatile Tool for Sensing an Extremely Small Force with Ultra thin Silicon Resonator"Proceedings of the 19th Sensor Symposium. 17-21 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, Y.Haga, K.Inoue, M.Sasaki, K.Hane, M.Esashi: "Integrated Microlens at the Cores of Optical Fiber Bundle for Optical Fiber Based"Proceedings of the 19th Sensor Symposium. 109-112 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] L.Li, T.Abe, X.Li, M.Esashi: "Smooth Surface Glass Etching by Deep RIE with SF_6/Xe Gas"Proceedings of the 19th Sensor Symposium. 249-252 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] C.Chang, T.Abe, M.Esashi: "Low Stress TEOS/Ozone PECVD Oxide for Deep Trench Filling"Proceedings of the 19th Sensor Symposium. 271-274 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] J.-H.Bae, T.Ono, S.Kamiya, M.Esashi: "Scanning Diamond Probe for Nano-processing"Proceedings of the 19th Sensor Symposium. 315-320 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] T.Abe, Y.Gi Hong, K.Shinoda, K.Kobayashi, T.Yano, M.Esashi: "Micromachining of Noble Metal and Magnetic Metal Thin Film by RIE"Proceedings of the 19th Sensor Symposium. 337-340 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] J.H.Kuypers, T.Ono, M.Esashi: "Aluminium Nitride Based Piezoelectric Microactuators"Proceedings of the 19th Sensor Symposium. 459-464 (2002)

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      「研究成果報告書概要(和文)」より
  • [Publications] J.H.Bae, T.Ono, C.Konoma, M.Esashi: "Scanning Diamond Probe and Application to Thereto-mechanical Nanolithography"Proceedings MEMS'2003. 24-27 (2003)

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      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, D.Wang, S.Sugimoto, H.Miyashita, M.Esashi: "Nanomechanics of Ultrathin Silicon Beams and Carbon Nanotubes"Proceedings MEMS'2003. 33-36 (2003)

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      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Abe, M.Esashi: "Endpoint Detectable Plating through Femto-laser Drilled Glass Wafers for Three-dimentional Electric Interconnections"Proceedings MEMS'2003. 638-641 (2003)

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      「研究成果報告書概要(和文)」より
  • [Publications] 小野崇人, ファン ミンゴ, 江刺正喜: "ナノリソグラフィーをめざすマイクロシステム"O plus E. 25,12. 1362-1368 (2003)

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      「研究成果報告書概要(和文)」より
  • [Publications] J.H.Bae, T.Ono, M.Esashi: "Scanning Probe with an Integrated Diamond Heater Element for Nanolithography"Applied Physics Letters. 82・5. 814-816 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, X.Li, H.Miyashita, M.Esashi: "Mass Sensing of Adsorbed Molecules in Sub-picogram Sample with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・3. 1240-1243 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Ono, R.Lin, M.Esashi: "Resonance Enhancement of Micromachined Resonators with Strong Mechanical-coupling between two Degrees of Freedom"Microelectronic Engineering. 65. 1-12 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, Y.Haga, K.Inoue, M.Sasaki, K.Hane, M.Esashi: "Batch Fabrication of Microlens at the End of Optical Fiber Using Self-photolithography and Etching Technique"Optical Review. 10,3. 150-154 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, S.Sugimoto, H.Miyashita, M.Esashi: "Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultrahigh Vacuum"Jpn.J.Appli.Phys.. 42,Part 2,No.6B. L683-L684 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Chang, T.Abe, M.Esashi: "Glass Etching Assisted by Femtosecond Pulse Modification"Sensor and Materials. 15,3. 137-145 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, C.Konoma, H.Miyashita, Y.Kanamori, M.Esashi: "Pattern Transfer of Self-Ordered Structure with Diamond Mold"Jpn.J.Appl.Phys.. 42,Part 1,No.6B. 3867-3870 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, L.T.T.Tuyen, T.Ono, H.Miyashita, Y.Suzuki, H.Mimura, M.Esashi: "Selective Growth of Carbon Nanotubes on Si Microfabricated Tips and Application for Electron Field Emitters"J.Vac.Sci.Technol.B. 21・4. 1705-1709 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, S.Yoshida, M.Esashi: "Electrical Modification of a Conductive Polymer Using a Scanning Probe Microscope"Nanotechnology. 14. 1051-1054 (2003)

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      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, D.F.Wang, M.Esashi: "Time Dependence of Energy Dissipation in Resonating Silicon Cantilevers in Ultrahigh Vacuum"Applied Physics Letters. 83・10. 1950-1952 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Ono, Y.Wang, M.Esashi: "Ultrathin Single-Crystal-Silicon Cantilever Resonators : Fabrication Technology and Significant Specimen Size Effect on Young's Modulus"Applied Physics Letters. 83・15. 3081-3083 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.F.Wang, T.Ono, M.Esashi: "Crystallographic Influence on Nanomechanics of (100)-oriented Silicon Resonator"Applied Physics Letters. 83・15. 3189-3191 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, M.Esashi: "Magnetic Force and Optical Force Sensing with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・12. 5141-5146 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.Zhang, C.Chang, T.Ono, M.Esashi: "A Piezodriven XY-microstage for Multiprobe Nanorecording"Sensors and Actuators, A. 108. 230-233 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Abe, X.Li, M.Esashi: "Endpoint Detectable Plating Through Femtosecond Laser Drilled Glass Wafers for Electrical Interconnections"Sensors and Actuators, A. 108. 234-238 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.H.Bae, T.Ono, M.Esashi: "Boron-doped Diamond Scanning Probe for Thereto-mechanical Nanolithography"Diamond and Related Materials. 12. 2128-2135 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, H.Miyashita, M.Esashi: "Nanomechanical Structure with Integrated Carbon Nanotube"Jpn.J.Appl.Phys.. 43・2. 855-859 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Miyashita, T.Ono, M.Esashi: "Nanomechanical Structures with an Integrated Carbon Nanotube"Digest of Technical Papers, Transducers'03. 12. 182-185 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.F.Wang, T.Ono, M.Esashi: "Crystallographic Influence on Nanomechanics of Ultra-Thin Silicon Resonators"Digest of Technical Papers, Transducers'03. 12. 336-339 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Iwami, T.Ono, E.Oesterschlze, M.Esashi: "Electrostatic Actuator Integrated Optical Near-Field Probe with Bow-Tie Antenna for High Transmission Efficiency"Digest of Technical Papers, Transducers'03. 12. 548-551 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Kikuchi, Y.Haga, M.Maeda, W.Makishi, M.Esashi: "Piezoelectric 2D Micro Scanner for Minimally Invasive Therapy Fabricated Using Femtosecond Laser Abration"Digest of Technical Papers, Transducers'03. 12. 603-606 (2003)

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      「研究成果報告書概要(和文)」より
  • [Publications] C.H.Tsai, P.N.Minh, T.Ono, N.Sato, Le T.T.Tuyen, P.H.Khoi, Y.W.Lee, C.Y.Wu, M.Esashi: "Carbon Nanotube Integrated on Silicon Tips for Electron Field Emitter : Tip Apex Patterning and Emission Characterization"Digest of Technical Papers, Transducers'03. 12. 770-773 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "Diamond Micro-Schottky Emitter with an Integrated Heating Element"Digest of Technical Papers, Transducers'03. 12. 778-781 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, N.Sato, H.Mimura, M.Esashi: "Micro Electron Field Emitter Array with Focus Lenses for Multi-Electron Beam Lithography"Digest of Technical Papers, Transducers'03. 12. 1295-1298 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.Y.Zhang, T.Ono, M.Esashi: "Piezoactuator-Integrated Monolithic Microstage with Six Degrees of Freedom"Digest of Technical Papers, Transducers'03. 12. 1518-1521 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "Aluminium Nitride Based Thin Film Bulk Acoustic Resonator Using Germanium Sacrificial"Digest of Technical Papers, Transducers'03. 12. 1780-1783 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "MEMS Based Thin Film 2GHz Resonator for CMOS Integration"2003 IEEE MTT-S Internl.Microwave Symposium Digest. 1797-1800 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, T.Ono, N.Sato, H.Mimura, K.Yokoo, M.Esashi: "From SOI Wafer to Micro Election Field Emission Device with Focus Lenses"Technical Digest of IVMC2003. 179-180 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Single Carbon Nanocoil"Technical Digest of IVMC2003. 233-234 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "A Schottky Emitter Using Boron-Doped Diamond"Technical Digest of IVMC2003. 247-248 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Individual Carbon Nanocoil"The Intern.Conf. on the Science and Application of Nanotubes 2003. 183 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.F.Wang, T.Ono, M.Esashi: "Surface Effect on Nanomechanics of Ultra-thin Silicon Resonator"Eurosensors'03. 20-23 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Iwami, T.Ono, E.Oesterschulze, M.Esashi: "Adjustable Bow-tie Antenna Optical Near-field Probe with Electrostatic Actuator for High Transmission Efficiency and Resolution"Proc. Of the 4^<th> Asia-Pacific International Conference on Near-Field Optics (APNFO-4). 4. 55-56 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, D.F.Wang, M.Esashi: "Mass Sensing with Resonating Ultrathin Double Beams"Second IEEE Intn.Conf. on Sensors (IEEE Sensors 2003). 2. 825-829 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.N.Minh, P.N.Hong, T.M.Cuong, T.Ono, M.Esashi: "Utilization of Carbon Nanotube and Diamond for Electron Field Emission Devices"Proceedings MEMS'2004. 17. 430-433 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Takahashi, T.Ono, Y.Cho, M.Esashi: "Diamond Probe for Ultra-High-Density Ferroelectric Data Storage Based on Scanning Nonlinear Dielectric Microscopy"Proceedings MEMS'2004. 17. 536-539 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Watanabe, K.Horio, K.Muta, M.Esashi: "Development of Multi-Channel Variable Attenuators Using Electrostatic Comb Drive Actuator"Proceedings of the 20th Sensor Symposium. 20. 25-28 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Kawai, T.Ono, M.Esashi: "Fabrication of Distributed Silicon Nanomechanical Structure"Proceedings of the 20th Sensor Symposium. 20. 61-64 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Chang, T.Abe, Y.Kawai, M.Esashi: "Fabrication of Silica-Based Microfluidic Channels without Bonding Process"Proceedings of the 20th Sensor Symposium. 20. 245-248 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Yoshida, T.Ono, T.Abe, M.Esashi: "Electrical Modification on Conductive Polymer Using a Scanning Probe Microscope"Proceedings of the 20th Sensor Symposium. 20. 365-370 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Li, T.Abe, M.Hara, M.Esashi: "Large-Diameter Wafer Process of Array-MEMS with Electrical Interconnection through a Thin Glass Wafer"Proceedings of the 20th Sensor Symposium. 20. 425-428 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Esashi, T.Ono: "Micro-Nano ElectroMechanical Systems by Silicon Bulk-Micromachining"Intn.Conf. on Advanced Technology in Experimental Mechanics 2003 (ATEM'03). 113 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Esashi, T.Ono, P.N.Minh: "Micro-Nano ElectroMechanical Systems"Korea-Japan Joint Symposium on Nanoengineering 2003. 13-23 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Chang, T.Abe, M.Esashi: "Trench Filling Characteristics of Low Stress TEOS/Ozone Oxide Deposited by PECVD and SACVD"Microsystem Technologies. 10,2. 97-102 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono, H.Miyashita, M.Esashi: "Nanomechanical Structure with Integrated Carbon Nanotube"Jpn.J.Appl.Phys.. 43,No.2. 855-859 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Phan N.Minh, T.Ono, M.Esashi: "Fabrication of Silicon Microprobes for Optical Near-Field Application"CRC Press. 180 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yang, T.Ono, M.Esashi: "Investigating Surface Stress : Surface Loss in Ultrathin Single-Crystal Silicon Cantilevers"J.Vac.Sci.Technol.B. 19,2. 551-556 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, M.Esashi: "Spatial Distribution and Polarization Dependence of the Optical Near-field in a Silicon Microfabricated Probe"J.of Microscopy. 202,Pt.1. 28-33 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, M.Esashi: "Near-field Optical Apertured Tip and Modified Structures for Local Field Enhancement"Applied Optics. 40,15. 2479-2484 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, H.Watanabe, S.S.Lee, Y.Haga, M.Esashi: "Hybrid Optical Fiber-apertured Cantilever Near-field Probe"Applied Physics Letters. 79,19. 3020-3022 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B.J.Pokines, J.Tani, M.Esashi, T.Hamano, K.Mizuno, D.J.Inman: "Active Material Micro-actuator Arrays Fabricated with SU-8 Resin"Microsystem Technologies. 7. 117-119 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Esashi: "Multi-probe aiming at high-density Data Storage"Laser Research. 29,8. 516-521 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, H.Watanabe, Y.Haga, M.Esashi: "Hybrid Optical Fiber Bundle and Apertured Catilever for Optical Near-field Applications"IEEE/LEOS International Conf.on Optical MEMS 2001. 121-122 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, K.Goto, M.Esashi: "Near-field Recording with High Optical Throughput aperture Array"Sensors and Actuators. A95. 168-174 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.W.Lee, T.Ono, M.Esashi: "Fabrication of Thermal Microprobes with a Sub-100nm Metal-to-metal Junction"Nanotechnology. 13. 29-32 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, H.Miyashita, M.Esashi: "Electric-field-enhanced Growth of Carbon Nanotubes for Scanning Probe Microscopy"Nanotechnology. 13. 62-64 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] G.Suzuki, M.Esashi: "Fabrication of Stacked-Piezo Actuator by Dicing and Electroplating"Electronic Society E. 122-E,4. 217-222 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.W.Lee, T.Ono, E.Abe, M.Esashi: "Microprobe Array with Electrical Interconnection for Thermal Imaging and Data Storage"J.of Microelectromechanical Systems. 11,3. 215-219 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.W.Lee, T.Ono, M.Esashi: "Electrical and Thermal Recording Techniques Using a Heater Integrated Microprobe"J.Micromech.Microeng.. 12,6. 841-848 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, M.Esashi: "High Sensing by Micro Nanomachining"Molecular Electronics and Bioelectronics. 13,4. 159-164 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, L.T.T.Tuyen, T.Ono, H.Mimura, K.Yokoo, M.Esashi: "Carbon Nanotube on a Si Tip for Electron Field Emitter"Jpn.J.Appl.Phys.. 41 Part2,12A. L1409-L1411 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Abe, Y.Liu, M.Esashi: "Fabrication of High-Density Electrical Feed-Throughs by Deep-Reactive-Ion Etching of Pyrex Glass"J.of Microelectromechanical Systems. 11,6. 625-629 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Yang, T.Ono, M.Esashi: "Energy Dissipation in Submicrometer Thick Single-Crystal Silicon Cantilevers"J.of Microelectromechanical Systems. 11,6. 775-783 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Ono, Y.Wang, M.Esashi: "Study on Ultra-Thin NEMS Cantilevers -High Yield Fabrication and Size-Effect on Young's Modulus of Silicon"Technical Digest MEMS'2002, Las Vegas. 427-430 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.W.Lee, T.Ono, M.Esashi: "Recording on PZT and AgInSbTe thin films for probe-based data storage"Technical Digest MEMS'2002, Las Vegas. 685-688 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, L.T.Tuyen, T.Ono, H.Mimura, K.Yokoo, M.Esashi: "Fabrication and Characterization of Carbon Nanotube on a Si Tip for Electron Field Emitter"15th International Vacuum Microelectronics Conference & 48th International Field Emission Symposium. 49 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Abe, M.Esashi: "Endpoint Detectable Copper Through-hole Plating for the Fabrication of Glass with Electrical Feed-throughs"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 139-142 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.-Y.Zhang, C.Chang, T.Ono, M.Esashi: "A Piezodriven XY-Microstage for Multiprobe Nanorecording"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 449-452 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, LeT.T.Tuyen, M.Esashi: "Microfabrication and Characterization of Field Emission Device with Integrated Electrostatic Lenz Array"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 561-564 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, LeT.T.Tuyen, T.Ono, H.Mimura, M.Esashi: "Electron Field Emission with Carbon Nanotube on a Si Tip"Extended Abstracts of the 2002 Intn.Conf.on Solid State Devices and Materials. 96-97 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Miyashita, T.Ono, M.Esashi: "Freestanding Carbon Nanotube Bridge Grown by Hot-filament Chemical Vapor Deposition"2002 Internl.Microprocess and Nanotechnology Conf.. 36-37 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Konoma, T.Ono, H.Miyashita, Y.Kanamori, M.Esashi: "Fabrication of Diamond Mold for Imprint Lithography"2002 Internl.Microprocess and Nanotechnology Conf.. 164-165 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, M.Esashi: "Versatile Tool for Sensing an Extremely Small Force with Ultrathin Silicon Resonator"Proceedings of the 19th Sensor Symposium. 17-21 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, Y.Haga, K.Inoue, M.Sasaki, K.Hane, M.Esashi: "Integrated Microlens at the Cores of Optical Fiber Bundle for Optical Fiber Based Application"Proceedings of the 19th Sensor Symposium. 109-112 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] L.Li, T.Abe, X.Li, M.Esashi: "Smooth Surface Glass Etching by Deep RIE with SF_6/Xe Gas"Proceedings of the 19th Sensor Symposium. 249-252 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Chang, T.Abe, M.Esashi: "Low Stress TEOS/Ozone PECVD Oxide for Deep Trench Filling"Proceedings of the 19th Sensor Symposium. 271-274 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.-H.Bae, T.Ono, S.Kamiya, M.Esashi: "Scanning Diamond Probe for Nano-processing"Proceedings of the 19th Sensor Symposium. 315-320 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Abe, Y.Gi Hong, K.Shinoda, K.Kobayashi, T.Yano, M.Esashi: "Micromachining of Noble Metal and Magnetic Metal Thin Film by RIE"Proceedings of the 19th Sensor Symposium. 337-340 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.H.Kuypers, T.Ono, M.Esashi: "Aluminium Nitride Based Piezoelectric Microactuators"Proceedings of the 19th Sensor Symposium. 459-464 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.H.Bae, T.Ono, C.Konoma, M.Esashi: "Scanning Diamond Probe and Application to Thermo-mechanical Nanolithography"Proceedings MEMS'2003. 24-27 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, D.Wang, S.Sugimoto, H.Miyashita, M.Esashi: "Nanomechanics of Ultrathin Silicon Beams and Carbon Nanotubes"Proceedings MEMS'2003. 33-36 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Abe, M.Esashi: "Endpoint Detectable Plating through Femto-laser Drilled Glass Wafers for Three-dimentional Electric Interconnections"Proceedings MEMS'2003. 638-641 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, P.N.Minh, M.Esashi: "Micro System for Nanolithography"O plus E. 25,12. 1362-1368 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.H.Bae, T.Ono, M.Esashi: "Scanning Probe with an Integrated Diamond Heater Element for Nanolithography"Applied Physics Letters. 82,5. 814-816 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, X.Li, H.Miyashita, M.Esashi: "Mass Sensing of Adsorbed Molecules in Sub-picogram Sample with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74,3. 1240-1243 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Ono, R.Lin, M.Esashi: "Resonance Enhancement of Micromachined Resonators with Strong Mechanical-coupling between two Degrees of Freedom"Microelectronic Engineering. 65. 1-1241 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, Y.Haga, K.Inoue, M.Sasaki, K.Hane, M.Esashi: "Batch Fabrication of Microlens at the End of Optical Fiber Using Self-photolithography and Etching Technique"Optical Reviews. 10,3. 150-154 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, S.Sugumoto, H.Miyashita, M.Esashi: "Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultrahigh Vacuum"Jpn.J.Appli.Phys.. 42,Part 2 No.6B. L683-L684 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Chang, T.Abe, M.Esashi: "Glass Etching Assisted by Femtosecond Pulse Modification"Sensors and Materials. 15,3. 137-145 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, C.Konoma, H.Miyashita, Y.Kanamori, M.Esashi: "Pattern Transfer of Self-Ordered Structure with Diamond Mold"Jpn.J.Appli.Phys.. 42,Part 2 No.6B. 3867-3870 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, L.T.T.Tuyen, T.Ono, H.Miyashita, Y.Suzuki, H.Mimura, M.Esashi: "Selective Growth of Carbon Nanotubes on Si Microfabricated Tips and Application for Electron Field Emitters"J.Vac.Sci.Technol.B. 21,4. 1705-1709 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, S.Yoshida, M.Esashi: "Electrical Modification of a Conductive Polymer Using a Scanning Probe Microscope"Nanotechnology. 14. 1051-1054 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, D.F.Wang, M.Esashi: "Time Dependence of Energy Dissipation in Resonating Silicon Cantilevers in Ultrahigh Vacuum"Applied Physics Letters. 83,10. 1950-1952 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Ono, Y.Wang, M.Esashi: "Ultrathin Single-Crystal-Silicon Cantilever Resonators Fabrication Technology and Significant Specimen Size Effect on Young's Modulus"Applied Physics Letters. 83,15. 3081-3083 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.F.Wang, T.Ono, M.Esashi: "Crystallographic Influence on Nanomechanics of (100)-oriented Silicon Resonator"Applied Physics Letters. 83,15. 3189-3191 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, M.Esashi: "Magnetic Force and Optical Force Sensing with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74,12. 5141-5146 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.-Y.Zhang, C.Chang, T.Ono, M.Esashi: "A Piezodriven XY-microstage for Multiprobe Nanorecording"Sensors and Actuators, A. 108. 230-233 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Abe, X.Li, M.Esashi: "Endpoint Detectable Plating Through Femtosecond Laser Drilled Glass Wafers for Electrical Interconnections"Sensors and Actuators, A. 108. 234-238 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.H.Bae, T.Ono, M.Esashi: "Boron-doped Diamond Scanning Probe for Thermo-mechanical Nanolithography"Diamond and Related Materials. 12. 2128-2135 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, H.Miyashita, M.Esashi: "Nanomechanical Structure with Integrated Carbon Nanotube"Jpn J Appl Phys. 43.2. 855-859 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Miyashita, T.Ono, M.Esashi: "Nanomechanical Structures with an Integrated Carbon Nano tube"Digest of Technical Papers, Transducers'03. 12. 182-185 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.F.Wang, T.Ono, M.Esashi: "Crystallographic Influence on Nanomechanics of Ultra-Thin Silicon Resonators"Digest of Technical Papers, Transducers'03. 12. 336-339 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Iwami, T.Ono, E.Oesterschlze, M.Esashi: "Electrostatic Actuator Integrated Optical Near-Field Probe with Bow-Tie Antenna for High Transmission Efficiency"Digest of Technical Papers, Transducers'03. 12. 548-551 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Kikuchi, Y.Haga, M.Maeda, W.Makishi, M.Esashi: "Piezoelectric 2D Micro Scanner for Minimally Invasive Therapy Fabricated Using Femtosecond Laser Abration"Digest of Technical Papers, Transducers'03. 12. 603-606 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.H.Tsai, P.N.Minh, T.Ono, N.Sato, Le T.T.Tuyen, P.H.Khoi, Y.W.Lee, C.Y.Wu, M.Esashi: "Carbon Nanotube Integrated on Silicon Tips for Electron Field Emitter : Tip Apex Patterning and Emission Characterization"Digest of Technical Papers, Transducers'03. 12. 770-773 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "Diamond Micro-Schottky Emitter with an Integrated Heating Element"Digest of Technical Papers, Transducers'03. 12. 778-781 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, N.Sato, H.Mimura, M.Esashi: "Micro Electron Field Emitter Array with Focus Lenses for Multi-Electron Beam Lithography"Digest of Technical Papers, Transducers'03. 12. 1295-1298 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.Y.Zhang, T.Ono, M.Esashi: "Piezoactuator-Integrated Monolithic Microstage with 3 Degrees of Freedom"Digest of Technical Papers, Transducers'03. 12. 1518-1521 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "Aluminium Nitride Based Thin Film Bulk Acoustic Resonator Using Germanium Sacrificial Layer Etching"Digest of Technical Papers, Transducers'03. 12. 1780-1783 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "MEMS Based Thin Film 2GHz Resonator for CMOS Integration"2003 IEEE MTT-S Internl.Microwave Symposium Digest. 1797-1800 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, T.Ono, N.Sato, H.Mimura, K.Yokoo, M.Esashi: "From SOI Wafer to Micro Electron Field Emission Device with Focus Lenses"Technical Digest of IVMC2003. 179-180 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Single Carbon Nanocoil"Technical Digest of IVMC2003. 233-234 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "A Schottky Emitter Using Boron-Doped Diamond"Technical Digest of IVMC2003. 247-248 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Individual Carbon Nanocoil"The Intern.Conf.on the Science and Application of Nanotubes 2003. 183 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.F.Wang, T.Ono, M.Esashi: "Surface Effect on Nanomechanics of Ultra-thin Silicon Resonator"Eurosensors03. 20-23 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Iwami, T.Ono, E.Oesterschulze, M.Esashi: "Adjustable Bow-tie Antenna Optical Near-field Probe with Electrostatic Actuator for High Transmission Efficiency and Resolution"Proc.Of the 4^<th> Asia-Pacific International Conference on Near-Field Optics (APNFO-4). 4. 55-56 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, D.F.Wang, M.Esashi: "Mass Sensing with Resonating Ultrathin Double Beams"Second IEEE Intn.Conf.on Sensors. 2. 825-829 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.N.Minh, P.N.Hong, T.M.Cuong, T.Ono, M.Esashi: "Utilization of Carbon Nanotube and Diamond for Electron Field Emission Devices"Proceedings MEMS'2004. 17. 430-433 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Takahashi, T.Ono, Y.Cho, M.Esashi: "Diamond Probe for Ultra-High-Density Ferroelectric Data Storage Based on Scanning Nonlinear Dielectric Microscopy"Proceedings MEMS'2004. 17. 536-539 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Watanabe, K.Horio, K.Muta, M.Esashi: "Development of Multi-Channel Variable Attenuators Using Electrostatic Comb Dribe Actuator"Proceedings of the 20th Sensor Symposium. 20,20. 25-28 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Kawai, T.Ono, M.Esashi: "Fabrication of Distributed Silicon Nanomechanical Structure"Proceedings of the 20th Sensor Symposium. 20. 61-64 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Chang, T.Abe, Y.Kawai, M.Esashi: "Fabrication of Silica-Based Microfluidic Channels without Bonding Process"Proceedings of the 20th Sensor Symposium. 20. 245-248 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Yoshida, T.Ono, T.Abe, M.Esashi: "Electrical Modification on Conductive Polymer Using a Scanning Probe Microscope"Proceedings of the 20th Sensor Symposium. 20. 365-370 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Li, T.Abe, M.Hara, M.Esashi: "Large-Diameter Wafer Process of Array-MEMS with Electrical Interconnection through a Thin Glass Wafer"Proceedings of the 20th Sensor Symposium. 20. 425-428 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Esashi, T.Ono: "Micro-Nano ElectroMechanical Systems by Silicon Bulk-Micromachining"Intn.Conf.on Advanced Technology in Experimental Mechanics 2003 (ATEM'03). 113 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Esashi, T.Ono, P.N.Minh: "Micro-Nano ElectroMechanical Systems"Korea-Japan Joint Symposium on Nanoengineering 2003. 13-23 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Chang, T.Abe, M.Esashi: "Trench Filling Characteristics of Low Stress TEOS/Ozone Oxide Deposited by PECVD and SACVD"Microsystem Technologies. 10,2. 97-102 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ono, H.Miyashita, M.Esashi: "Nanomechanical Structure with Integrated Carbon Nanotube"Jpn.J.Appl.Phys.. 43,No.2. 855-859 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Phan N.Minh, T.Ono, M.Esashi: "Fabrication of Silicon Microprobes for Optical Near-Field Application"CRC Press. 180 (2002)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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