2004 Fiscal Year Final Research Report Summary
Multi-function-integrated Micro Systems Using Polymer Materials
| Project/Area Number |
13305016
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokyo |
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Principal Investigator |
SHIMOYAMA Isao The University of Tokyo, Information Science & Technology, Professor, 大学院・情報理工学系研究科, 教授 (60154332)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUMOTO Kiyoshi The University of Tokyo, Information Science & Technology, 大学院・情報理工学系研究科, 助教授 (10282675)
HOSHINO Kazunori The University of Tokyo, Information Science & Technology, 大学院・情報理工学系研究科, 講師 (30361546)
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| Project Period (FY) |
2001 – 2004
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| Keywords | Organic Transistor / PDMS / Bacteriorhodopsin / Imaging Sensor / Tactile Sensor |
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| Research Abstract |
In this research, we worked on techniques to integrate polymers, organic semiconductors and proteins into micro electro mechanical systems.
We introduced a patterning method for organic LEDs. We patterned the OLED layers by pressing the layer with a micro edges fabricated on a silicon wafer. This enabled us to fabricate 30-micro-meter-wide LED stripe arrays. We also fabricate an OLED on a released silicon microstructure.
We fabricated a vertical organic transistor. It was designed as a current driver for OLEDs. Since it has a vertical structure, it is suitable to be arranged on/under an OLED. We report a biomolecular image sensor using a retinal membrane protein. To fabricate the photoreceptor array, a bR-patterning method with electro-deposition and surface modification was developed. An image sensor, which consists of an 8x8 array of 1-millimeter square bR photoreceptors, was fabricated. It was demonstrated that the image sensor detected a gradual image and black and white images.
We propose a tactile sensor consisting of standing 300 nm-thick piezoresistive cantilevers embedded in PDMS. The sensor detects the shear stress applied on its surface. We applied the force of 0 [N] to 20 [N] in the X,Y,and Z directions to the sensor. The sensor showed a good linearity and high sensitivity in X-axis.
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