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2003 Fiscal Year Final Research Report Summary

Single Electron Integrated Circuits Based on A BDD Architecture Utilizing Quantum Dots Controlled by Nano-Schottky Gates

Research Project

Project/Area Number 13305020
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

HASEGAWA Hideki  Hokkaido Univ., Graduate School of Eng., Prof., 大学院・工学研究科, 教授 (60001781)

Co-Investigator(Kenkyū-buntansha) AKAZAWA Masamichi  Hokkaido Univ., Res.Center For Integrated Quantum Electronics, Associate Prof., 量子集積エレクトロニクス研究センター, 助教授 (30212400)
HASHIZUME Tamotsu  Hokkaido Univ., Res.Center For Integrated Quantum Electronics, Associate Prof., 量子集積エレクトロニクス研究センター, 助教授 (80149898)
AMEMIYA Yoshihito  Hokkaido Univ., Graduate School of Eng., Prof., 大学院・工学研究科, 教授 (80250489)
KASAI Seiya  Hokkaido Univ., Graduate School of Eng., Associate Prof., 大学院・工学研究科, 助教授 (30312383)
Project Period (FY) 2001 – 2003
KeywordsSingle Electron Circuit / Binary Decision Diagram (BDD) / Hexagonal BDD Quantum Circuit / Quantum Dots / Schottky Gate / Quantum Wire Network / Power-Delay Product / Quantum Transport
Research Abstract

The purpose of this research was to investigate a novel single electron integrated circuit based on a binary-decision diagram (BDD) architecture utilizing quantum dots controlled by nano-Schottky gates. Main results are listed below :
(1)A novel "hexagonal BDD quantum circuit approach" for realization of quantum LSIs, in which the BDD architecture is implemented on hexagonal nanowire network in high dense, was proposed. Various logic subsystems and arithmetic logic units (ALUs) were successfully designed utilizing the novel circuit approach.
(2)Elemental BDD devices (node devices) were realized using GaAs-based etched nanowires controlled by Schottky wrap gates (WPGs). They showed clear path switching characteristics from low temperature to room temperature. Power-delay product (PDP) of WPG-controlled single electron node devices was found to be as small as 10^<-22> J. Capability of GHz operation of WPG switches was confirmed experimentally by direct measurement of cut-off frequency.
(3)B … More asic BDD logic circuits were fabricated on etched hexagonal nanowire networks controlled by WPGs and they operated correctly in a quantum regime at low temperature. They were found to be possible to operate correctly even at room temperature by trading off of PDP values. Then, high-density integrated circuit fabrication process realizing 45 million devices/cm^2 has been established. Utilizing this process, 2-bit BDD adder circuits were fabricated and their correct operations were confirmed, and 8-bit adder was also successfully fabricated.
(4)Formation of hexagonal quantum nanowire network structures by MBE selective growth on patterned substrates was investigated and ultra-high density network fabrication technology of 240 million nodes/cm^2 for GaAs-based systems and 1 giga nodes/cm^2 for InP-based systems have been established. Branch switches and node devices were successfully fabricated utilizing the selectively MBE grown nanowires and their correct operations were confirmed.
(5)For surface passivation of III-V semiconductor quantum nanostructures, a technique using ultra-thin Si and c-GaN interface control layers (ICLs) was investigated for III-V materials and optimized. It was found that GaAs surfaces was successfully passivated by preparation of Ga-rich (4×6) reconstructed surface as an initial surface for the ICL formation. Ultra-small minimum interface state density of 4×10^<10> cm^<-2>eV^<-1> was obtained in the SiO_2/GaAs interface. Less

  • Research Products

    (151 results)

All Other

All Publications (151 results)

  • [Publications] S.Kasai: "GaAs-Based Single Electron Transistors and Logic Inverters Utilizing Schottky Wrap-Gate Controlled Quantum Wires and Dots"Japanese Journal of Applied Physics. 40. 2029-2032 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Electrical Properties of Nanometer-Sized Schottky Contacts for Gate Control of III-V Single Electron Devices and Quantum Devices"Japanese Journal of Applied Physics. 40. 2021-2025 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Muranaka: "Characterization and Optimization of Atomic Hydrogen Cleaning of InP Surface for Selective MBE growth of InGaAs Quantum Structure Arrays"Japanese Journal of Applied Physics. 40. 1874-1877 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Bulk and Interface Deep Levels in InGaP/GaAs Heterostructures Grown by Tertiarybutyl Phosphine-Based Gas Source Molecular Beam Epitaxy"Japanese Journal of Applied Physics. 40. 2769-2774 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Jin: "In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N_2"Japanese Journal of Applied Physics. 40. 2757-2761 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "Improvement of Growth Process to Achieve High Geometrical Uniformity in InGaAs Ridge Quantum Wires Grown by Selective MBE on Patterned InP Substrate"Japanese Journal of Applied Physics. 40. 3003-3008 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Okada: "Novel Single Electron Memory Device Using Metal Nano-Dots and Schottky In-Plane Gate Quantum Wire Transistors"Japanese Journal of Applied Physics. 40. 2797-2800 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Miczek: "Computer analysis of photoluminescence efficiency at InP surface with U-shaped surface state continuum"Vacuum. 63. 223-227 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yoshida: "Realization of UHV-Compatible Defect-Free Hydrogen Terminated Silicon Surfaces with the Use of UHV Contactless Capacitance-Voltage Method"Applied Surface Science. 175/176. 163-168 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Current Transport and Capacitance-Voltage Characteristics of GaAs and InP Nanometer-Sized Schottky Contacts Formed by in situ Electrochemical Process"Applied Surface Science. 175/176. 181-186 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "Conductance Gap Anomaly in Scanning Tunneling Spectra of MBE-Grown (001) Surfaces of III-V Compound Semiconductors"Applied Surface Science. 175/176. 255-259 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.-G.Xie: "Fabrication and characterization of InGaAs/InAlAs insulated gate pseudomorphic HEMTs having a silicon interface control layer"IEICE-C. E84-C 10. 1335-1343 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Takahashi: "Process Characterization and Optimization for a Novel Oxide-Free Insulated Gate Structure for InP MISFETs Having Silicon Interface Control Layer"IEICE-C. E84-C 10. 1344-1349 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Surface passivation process for GaN-based electronic devices utilizing ECR-CVD SiN_x film"IEICE-C. E84-C 10. 1455-1461 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 謝永桂: "InP系高速デバイス用多層エピタキシャル構造のSi超薄膜による表面不活性化"電子情報通信学会論文誌C. J84-C. 872-882 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yamada: "Quantum-Dot Logic Circuits Based on the Shared Binary-Decision Diagram"Japanese Journal of Applied Physics. 40. 4485-4488 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.G.Xie: "A Novel InGaAs/InAlAs Insulated Gate Pseudomorphic HEMT with a Silicon Interface Control Layer Showing High DC- and RF-Performance"IEEE Electron Device Letter. 22. 312-314 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Anantathanasarn: "Surface passivation of GaAs using an ultrathin cubic GaN interface control layer"Journal of Vacuum Science & Technology B. 19. 1589-1596 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Chemistry and electrical properties of surfaces of GaN and GaN/AlGaN heterostuctures"Journal of Vacuum Science & Technology B. 19. 1675-1681 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Ultra high vacuum-based in situ characterization of compound semiconductor surfaces by a contactless capacitance-voltage technique"Materials Science & Engineering B. 80. 147-151 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Surface characterization of GaN and AlGaN layers grown by MOVPE"Materials Science & Engineering B. 80. 309-312 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Quantum Devices and Integrated Circuits based on Quantum Confinement in III-V Nanowire Networks controlled by Nano-Schottky Gates"The Electrochemical Society Proceedings Volumes 2001-19 "Quantum Confinement : Nanostructured Materials and Devices". 189-208 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Hexagonal binary decision diagram quantum logic circuits using Schottky in-plane and wrap-gate control of GaAs and InGaAs nanowires"Physica E. 11. 149-154 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ootomo: "Surface passivation of AlGaN/GaN heterostructures using and ultrathin Al_2O_3 layer"Physica Status Solidi A. 188. 371-374 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Formation and Quantum Devices Applications of III-V Compound Semiconductor Nanostructures"Journal of the Korean Physical Society. 39. S402-S409 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Miczek: "Characterization of electronic properties of InP(100) surfaces from computer-aided analysis of photoluminescence"Optica Applicata. 32. 227-233 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Selective MBE growth of GaAs/AlGaAs nanowires on patterned GaAs (001) substrates and its application to hexagonal nanowire network formation"Institute of Physics Conference Series. 170. 325-330 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Self-consistent computer analysis of cathodoluminescence in-depth spectra for compound semiconductor heterostructures"Institute of Physics Conference Series. 170. 461-466 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Konishi: "In-situ XPS and photoluminescence characterization of GaN surfaces grown by MBE on MOVPE GaN templates"Institute of Physics Conference Series. 170. 837-842 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.G.Xie: "Surface passivation of epitaxial multilayer structures for InP-based high-speed devices by an ultrathin silicon layer"Electronics and Communications in Japan, Part II-Electronics. 2-85. 17-28 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Adamowicz: "Rigorous analysis of photoluminescence efficiency for characterization of electronic properties of InP(100) surfaces"Vacuum. 67. 3-10 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Graph-based quantum logic circuits and their realization by novel GaAs multiple quantum wire branch switches utilizing Schottky wrap gates"Microelectronic Engineering. 63. 287-291 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "Molecular beam epitaxy growth mechanism and wire width control for formation of dense networks of narrow InGaAs quantum wires"Microelectronic Engineering. 63. 293-299 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "A single electron binary-decision-diagram quantum logic circuit based on Schottky wrap gate control of a GaAs nanowire hexagon"IEEE Electron Device Letter. 23. 446-448 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Miczek: "Determination of InP surface state density distribution from excitation-power-dependent photoluminescence spectra using genetic algorithm-based fitting procedure"Surface Science. 507. 240-244 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "III-V quantum devices and circuits based on nanoscale Schottky gate control of hexagonal quantum wire networks"Applied Surface Science. 190. 176-183 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Ito: "Formation of high-density hexagonal networks of InGaAs ridge quantum wires by atomic hydrogen-assisted selective molecular beam epitaxy"Applied Surface Science. 190. 231-235 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Gate control characteristics in GaAs nanometer-scale Schottky wrap gate structures"Applied Surface Science. 190. 242-246 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Negoro: "Scanned-probe topological and spectroscopic study of surface states on clean and Si-deposited GaAs (001)-c(4×4) surfaces"Applied Surface Science. 190. 269-274 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Fu: "Gated photoluminescence study of oxide-free InP MIS structure having an ultrathin silicon interface control layer"Applied Surface Science. 190. 298-301 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Oyama: "Mechanism of current leakage through metal/n-GaN interfaces"Applied Surface Science. 190. 322-325 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Anantathanasarn: "Photoluminescence and capacitance-voltage characterization of GaAs surface passivated by an ultrathin GaN interface control layer"Applied Surface Science. 190. 343-347 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Jin: "Effects of nitrogen addition on methane-based ECR plasma etching of gallium nitride"Applied Surface Science. 190. 361-365 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Depth-resolved cathodoluminescence characterization of buried InGaP/GaAs heterointerfaces"Applied Surface Science. 190. 508-512 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Nakano: "Strong photoluminescence and low surface state densities on clean and silicon deposited (001) surfaces of GaAs with (4×6) reconstruction"Japanese Journal of Applied Physics. 41. 2542-2547 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Novel quantum wire branch-switches for binary decision diagram logic architecture utilizing Schottky wrap-gate control of GaAs/AlGaAs nanowires"Japanese Journal of Applied Physics. 41. 2671-2674 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Endo: "Reactive ion beam etching of GaN and AlGaN/GaN for nanostructure fabrication using methane-based gas mixtures"Japanese Journal of Applied Physics. 41. 2689-2693 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "GaAs and InGaAs single electron hexagonal nanowire circuits based on binary decision diagram logic architecture"Physica E. 13. 925-929 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Muranaka: "Control of morphology and wire width in InGaAs ridge quantum wires grown by atomic hydrogen-assisted selective molecular beam epitaxy"Physica E. 13. 1185-1189 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Anantathanasarn: "Pinning-free GaAs MIS structures with Si interface control layers formed on (4×6) reconstructed (001) surface"Applied Surface Science. 216. 275-282 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Cathodoluminescence in-depth spectroscopy study of AlGaN/GaN heterostructures"Applied Surface Science. 212-213. 885-889 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "Terahertz response of Schottky wrap gate-controlled quantum dots"Physica Status Solidi C. 0. 1329-1332 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Characterization and control of surfaces and interfaces for III-V nanoelectronics"Physica Status Solidi A. 195. 9-17 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Akazawa: "A UHV contactless capacitance-voltage characterization method applicable to semiconductor layers grown on insulating substrates"Physica Status Solidi A. 195. 248-254 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kakumu: "Control of order parameter during growth of In_<0.5>Ga_<0.5>P/GaAs heterostructures by gas source molecular beam epitaxy using tertiarybutylphosphine"Japanese Journal of Applied Physics. 42. 2230-2236 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Fabrication of AlGaN/GaN quantum nanostructures by methane-based dry etching and characterization of their electrical properties"Japanese Journal of Applied Physics. 42. 2375-2381 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "Fabrication of GaAs-based integrated half and full adders by novel hexagonal BDD quantum circuit approach"Solid State Electronics. 47. 199-204 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Kameda: "Effects of surface states on control characteristics of nano-meter scale Schottky gates formed on GaAs"Solid State Electronics. 47. 323-331 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Surface passivation of GaN and GaN/AlGaN heterostructures by dielectric films and its application to insulated-gate heterostructure transistors"Journal of Vacuum Science & Technology B. 21. 1828-1838 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Mechanisms of current collapse and gate leakage currents in AlGaN/GaN heterostructure field effect transistors"Journal of Vacuum Science & Technology B. 21. 1844-1855 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Negoro: "Effects of Si deposition on the properties of Ga-rich (4×6) GaAs (001) surfaces"Journal of Vacuum Science & Technology B. 21. 1945-1952 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Formation of III-V low dimensional structures and their applications to intelligent quantum chips"Microelectronics Journal. 34. 341-345 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Al_2O_3-based surface passivation and insulated gate structure for AlGaN/GaN HFETs"Physica Status Solidi C. 0. 2380-2384 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Characterization of Recombination Processes in GaN by Cathodoluminescence In-Depth Spectroscopy"Physica Status Solidi C. 0. 2707-2711 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Suppression of Current Collapse in Insulated Gate AlGaN/GaN Heterostructure Field-Effect Transistors Using Ultrathin Al_2O_3 Dielectric"Applied Physics Letter. 83. 2952-2954 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Selective MBE Growth of GaAs Ridge Quantum Wire Arrays on Patterned (001) Substrates and Its Growth Mechanism"Institute of Physics Conference Series. 174. 145-148 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Properties of Electronic States at Free Surfaces and Schottky Barrier Interfaces of AlGaN/GaN"Institute of Physics Conference Series. 174. 299-302 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Tamai: "Formation of High-Density GaAs Hexagonal Nano-Wire Networks by Selective MBE Growth on Pre-patterned (001) Substrates"Physica E. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Yoshida: "Selective Molecular Beam Epitaxy Growth of GaAs Hexagonal Nanowire Networks on (111)B Patterned Substrates"Japanese Journal of Applied Physics. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Evolution Mechanism of Heterointerface Cross Section during Growth of GaAs Ridge Quantum Wires by Selective Molecular Beam Epitaxy"Applied Surface Science. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Effects of Nitrogen Deficiency on Electronic Properties of AlGaN Surfaces Subjected to Thermal and Plasma Processes"Applied Surface Science. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Iizuka: "Surface Plasma Wave Interactions between Semiconductor and Electromagnetic Space Harmonics from Microwave to THz Range"Thin Solid Films. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Kotani: "Computer Simulation of Current Transport in GaN and AlGaN Schottky Diodes Based on Thin Surface Barrier Model"Applied Surface Science. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Manaf Hashim: "Plasma Wave Interactions in Microwave to THz Range between Carriers in Semiconductor 2DEG and Interdigital Slow Waves"Superlattice and Microstructures. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Fabrication of BDD Quantum Node Switches on Embedded GaAs Quantum Wires Grown by Selective MBE"Superlattice and Microstructures. (in press). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 長谷川英機: "応用物理ハンドブック第2版(第8章編著)"丸善株式会社. 1094 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai, H.Hasegawa: "GaAs-Based Single Electron Transistors and Logic Inverters Utilizing Schottky Wrap-Gate Controlled Quantum Wires and Dots"Japanese Journal of Applied Physics. 40. 2029-2032 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sato, S.Kasai, H.Hasegawa: "Electrical Properties of Nanometer-Sized Schottky Contacts for Gate Control of III-V Single Electron Devices and Quantum Devices"Japanese Journal of Applied Physics. 40. 2021-2025 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Muranaka, C.Jiang, A.Ito, H.Hasegawa: "Characterization and Optimization of Atomic Hydrogen Cleaning of InP Surface for Selective MBE growth of InGaAs Quantum Structure Arrays"Japanese Journal of Applied Physics. 40. 1874-1877 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F.Ishikawa, A.Hirama, H.Hasegawa: "Bulk and Interface Deep Levels in InGaP/GaAs Heterostructures Grown by Tertiarybutyl Phosphine-Based Gas Source Molecular Beam Epitaxy"Japanese Journal of Applied Physics. 40. 2769-2774 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z.Jin, T.Hashizume, H.Hasegawa: "In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N_2"Japanese Journal of Applied Physics. 40. 2757-2761 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Jiang, T.Muranaka, H.Hasegawa: "Improvement of Growth Process to Achieve High Geometrical Uniformity in InGaAs Ridge Quantum Wires Grown by Selective MBE on Patterned InP Substrate"Japanese Journal of Applied Physics. 40. 3003-3008 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Okada, H.Hasegawa: "Novel Single Electron Memory Device Using Metal Nano-Dots and Schottky In-Plane Gate Quantum Wire Transistors"Japanese Journal of Applied Physics. 40. 2797-2800 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Miczek, B.Adamowicz, J.Szuber, H.Hasegawa: "Computer analysis of photoluminescence efficiency at InP surface with U-shaped surface state continuum"Vacuum. 63. 223-227 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Yoshida, H.Hasegawa: "Realization of UHV-Compatible Defect-Free Hydrogen Terminated Silicon Surfaces with the Use of UHV Contactless Capacitance-Voltage Method"Applied Surface Science. 175/176. 163-168 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sato, S.Kasai, H.Hasegawa: "Current Transport and Capacitance-Voltage Characteristics of GaAs and InP Nanometer-Sized Schottky Contacts Formed by in situ Electrochemical Process"Applied Surface Science. 175/176. 181-186 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kasai, N.Negoro, H.Hasegawa: "Conductance Gap Anomaly in Scanning Tunneling Spectra of MBE-Grown (001) Surfaces of III-V Compound Semiconductors"Applied Surface Science. 175/176. 255-259 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.-G.Xie, S.Kasai, H.Takahashi, C.Jiang, H.Hasegawa: "Fabrication and characterization of InGaAs/InAlAs insulated gate pseudomorphic HEMTs having a silicon interface control layer"IEICE-C. E84-C 10. 1335-1343 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Takahashi, M.Yamada, Y.G.Xie, S.Kasai, H.Hasegawa: "Process Characterization and Optimization for a Novel Oxide-Free Insulated Gate Structure for InP MISFETs Having Silicon Interface Control Layer"IEICE-C. E84-C 10. 1344-1349 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, R.Nakasaki, S.Ootomo, H.Hasegawa: "Surface passivation process for GaN-based electronic devices utilizing ECR-CVD SIN_x film"IEICE-C. E84-C 10. 1455-1461 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.-G.Xie, S.Kasai, H.Takahashi, C.Jiang, H.Hasegawa: "Surface passivation of epitaxial multilayer structures for InP-based high-speed devices by an ultrathin silicon layer (in Japanese)"IEICE-C. J84-C. 872-882 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Yamada, Y.Kinoshita, S.Kasai, H.Hasegawa, Y.Amemiya: "Quantum-Dot Logic Circuits Based on the Shared Binary-Decision Diagram"Japanese Journal of Applied Physics. Vol.40. 4485-4488 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.G.Xie, S.Kasai, H.Takahashi, C.Jiang, H.Hasegawa: "A Novel InGaAs/InAlAs Insulated Gate Pseudomorphic HEMT with a Silicon Interface Control Layer Showing High DC-and RF-Performance"IEEE Electron Device Letter. vol.22. 312-314 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Anantathanasarn, H.Hasegawa: "Surface passivation of GaAs using an ultrathin cubic GaN interface control layer"Journal of Vacuum Science & Technology B. 19. 1589-1596 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, S.Ootomo, S.Oyama, M.Konishi, H.Hasegawa: "Chemistry and electrical properties of surfaces of GaN and GaN/AlGaN heterostuctures"Journal of Vacuum Science & Technology B. 19. 1675-1681 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa, H.Takahashi, T.Yoshida, T.Sakai: "Ultra high vacuum-based in situ characterization of compound semiconductor surfaces by a contactless capacitance-voltage technique"Materials Science & Engineering. B80. 147-151 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, R.Nakasaki, S.Ootomo, S.Oyama, H.Hasegawa: "Surface characterization of GaN and AlGaN layers grown by MOVPE"Materials Science & Engineering. B80. 309-312 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa: "QUANTUM DEVICES AND INTEGRATED CIRCUITS BASED ON QUANTUM CONFINEMENT IN III-V NANOWIRE NETWORKS CONTROLLED BY NANO-SCHOTTKY GATES"The Electrochemical Society Proceedings. Volumes 2001-19. 189-208 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa, S.Kasai: "Hexagonal binary decision diagram quantum logic circuits using Schottky in-plane and wrap-gate control of GaAs and InGeAs nanowires"Physica E. 11. 149-154 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ootomo, T.Hashizume, H.Hasegawa: "Surface passivation of AlGaN/GaN heterostructures using and ultrathin Al_2O_3 layer"Physica Status Solidi A-Applied Research. 188. 371-374 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa: "Formation and Quantum Devices Applications of III-V Compound Semiconductor Nanostructures"Journal of The Korean Physica Society. 39. S402-S409 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Miczek, B.Adamowicz, H.Hasegawa: "Characterization of electronic properties of InP(100) surfaces from computer-aided analysis of photoluminescence"Opt.Appl.. 32. 227-233 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sato, I.Tamai, C.Jiang, H.Hasegawa: "Selective MBE growth of GaAs/AlGaAs nanowires on patterned GaAs(001) substrates and its application to hexagonal nanowire network formation"Institute of Physics Conference.Series. vol.170. 325-330 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F.Ishikawa, H.Hasegawa: "Self-consistent computer analysis of cathodoluminescence in-depth spectra for compound semiconductor heterostructures"Institute of Physics Conference.Series. vol.170. 461-466 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Konishi, S.Anantathanasarn, T.Hashizume, H.Hasegawa: "In-situ XPS and photoluminescence characterization of GaN surfaces grown by MBE on MOVPE GaN templates"Institute of Physics Conference.Series. vol.170. 837-842 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.G.Xie, K.Takahashi, H.Takahashi, C.Jiang, S.Kasai, H.Hasegawa: "Surface passivation of epitaxial multilayer structures for InP-based high-speed devices by an ultrathin silicon layer"Electron.Comm.Jpn.. vol.2-85. 17-28 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B.Adamowicz, M.Miczek, S.Arabasz, H.Hasegawa: "Rigorous analysis of photoluminescence efficiency for characterization of electronic properties of InP(100) surfaces"Vacuum. vol.67. 3-10 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Yumoto, S.Kasai, H.Hasegawa: "Graph-based quantum logic circuits and their realization by novel GaAs multiple quantum wire branch switches utilizing Schottky wrap gates"Microelectronics Engineering. vol.63. 287-291 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Jiang, T.Muranaka, H.Hasegawa: "Molecular beam epitaxy growth mechanism and wire width control for formation of dense networks of narrow InGaAs quantum wires"Microelectronics Engineering. vol.63. 293-299 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kasai, H.Hasegawa: "A single electron binary-decision-diagram quantum logic circuit based on Schottky wrap gate control of a GaAs nanowire hexagon"IEEE Electron Device Letter. vol.23. 446-448 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Miczek, B.Adamowicz, H.Hasegawa: "Determination of InP surface state density distribution from excitation-power-dependent photoluminescence spectra using genetic algorithm-based fitting procedure"Surface Science. vol.507. 240-244 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kasai, H.Hasegawa: "III-V quantum devices and circuits based on nanoscale Schottky gate control of hexagonal quantum wire networks"Applied Surface Science. vol.190. 176-183 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Ito, T.Muranaka, C.Jiang, H.Hasegawa: "Formation of high-density hexagonal networks of InGaAs ridge quantum wires by atomic hydrogen-assisted selective molecular beam epitaxy"Applied Surface Science. vol.190. 231-235 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Yumoto, S.Kasai, H.Hasegawa: "Gate control characteristics in GaAs nanometer-scale Schottky wrap gate structures"Applied Surface Science. vol.190. 242-246 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Negoro, S.Kasai, H.Hasegawa: "Scanned-probe topological and spectroscopic study of surface states on clean and St-deposited GaAs(001)-c(4×4) surfaces"Applied Surface Science. vol.190. 269-274 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z.Fu, S.Kasai, H.Hasegawa: "Gated photoluminescence study of oxide-free InP MIS structure having an ultrathin silicon interface control layer"Applied Surface Science. vol.190. 298-301 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Oyawa, T.Hashizume, H.Hasegawa: "Mechanism of current leakage through metal/n-GaN interfaces"Applied Surface Science. vol.190. 322-325 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Anantathanasarn.H.Hasegawa: "Photoluminescence and capacitance-voltage characterization of GaAs surface passivated by an ultrathin GaN interface control layer"Applied Surface Science. vol.190. 343-347 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z.Jin, T.Hashizume, H.Hasegawa: "Effects of nitrogen addition on methane-based ECR plasma etching of gallium nitride"Applied Surface Science. vol.190. 361-365 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F.Ishikawa, H.Hasegawa: "Depth-resolved cathodoluminescence characterization of buried InGaP/GaAs heterointerfaces"Applied Surface Science. vol.190. 508-512 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Nakano, N.Negoro, H.Hasegawa: "Strong photoluminescence and low surface state densities on clean and silicon deposited (001) surfaces of GaAs with (4 × 6) reconstruction"Japanese Journal of Applied Physics. vol.41. 2542-2547 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Yumoto, S.Kasai, H.Hasegawa: "Novel quantum wire branch-switches for binary decision diagram logic architecture utilizing Schottky wrap-gate control of GaAs/AlGaAs nanowires"Japanese Journal of Applied Physics. vol.41. 2671-2674 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Endo, Z.Jin, S.Kasai, H.Hasegawa: "Reactive ion beam etching of GaN and AlGaN/GaN for nanostructure fabrication using methane-based gas mixtures"Japanese Journal of Applied Physics. vol.41. 2689-2693 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kasai, H.Hasegawa: "GaAs and InGaAs single electron hexagonal nanowire circuits based on binary decision diagram logic architecture"Phisica E. 13(2-4). 925-929 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Muranaka, S.Kasai, C.Jiang, H.Hasegawa: "Control of morphology and wire width in InGaAs ridge quantum wires grown by atomic hydrogen-assisted selective molecular beam epitaxy"Phisica E. 13(2-4). 1185-1189 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Anantathanasarn, H.Hasegawa: "Pinning-free GaAs MIS structures with Si interface control layers formed on (4×6) reconstructed (001) surface"Applied Surface Science. vol.216. 275-282 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F.Ishikawa, H.Hasegawa: "Cathodoluminescence in-depth spectroscopy study of AlGaN/GaN heterostructures"Applied Surface Science. vol.216. 885-889 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kasai, W.Han, M.Yumoto, H.Hasegawa: "Terahertz response of Schottky wrap gate-controlled quantum dots"Physica Status Solidi C. vol.0. 1329-1332 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa: "Characterization and control of surfaces and interfaces for III-V nanoelectronics"Physica Status Solidi A. vol.195. 9-17 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Akazawa, H.Hasegawa: "A UHV contactless capacitance-voltage characterization method applicable to semiconductor layers grown on insulating substrates"Physica Status Solidi A. vol.195. 248-254 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Kakumu, F.Ishikawa, S.Kasai, T.Hashizume, H.Hasegawa: "Control of order parameter during growth of In_<0.5>Ga_<0.5>P/GaAs heterostructures by gas source molecular beam epitaxy using tertiarybutylphosphine"Japanese Journal of Applied Physics. vol.42. 2230-2236 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa, T.Muranaka, S.Kasai, T.Hashizume: "Fabrication of AlGaN/GaN quantum nanostructures by methane-based dry etching and characterization of their electrical properties"Japanese Journal of Applied Physics. vol.42. 2375-2381 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kasai, M.Yumoto, H.Hasegawa: "Fabrication of GaAs-based integrated half and full adders by novel hexagonal BDD quantum circuit approach"Solid State Electronic. vol.47. 199-204 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Kameda, S.Kasai, T.Sato, H.Hasegawa: "Effects of surface states on control characteristics of nano-meter scale Schottky gates formed on GaAs"Solid State Electronic. vol.47. 323-331 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, S.Ootomo, T.Inagaki, H.Hasegawa: "Surface passivation of GaN and GaN/AlGaN heterostructures by dielectric films and its application to insulated-gate heterostructure transistors"Journal of vacuum Science and Technology B. 21. 1828-1838 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa, T.Inagaki, S.Ootomo, T.Hashizume: "Mechanisms of current collapse and gate leakage currents in AlGaN/GaN heterostructure field effect transistors"Journal of vacuum Science and Technology B. 21. 1844-1855 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Negoro, S.Anantathanasarn, H.Hasegawa: "Effects of Si deposition on the properties of Ga-rich (4×6) GaAs(001) surfaces"Journal of vacuum Science and Technology B. 21. 1945-1952 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa: "Formation of III-V low dimensional structures and their applications to intelligent quantum chips"Microelectronics Journal. 34. 341-345 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, S.Ootomo, H.Hasegawa: "Al_2O_3-based surface passivation and insulated gate structure for AlGaN.GaN HFETs"Phisica Status Solidi C. Vol.0. 2380-2384 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F.Ishikawa H.Hasegawa: "Characterization of Recombination Processes in GaN by Cathodoluminescence In-Depth Spectroscopy"Physica Status Solidi C. Vol.0(7). 2707-2711 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, S.Ootomo, H.Hasegawa: "Suppression of current Collapse in Insulated Gate AlGaN/GaN Heterostructure Field-Effect Transistors Using Ultrathin Al_2O_3 Dielectric"Applied Physics Letter. vol.83(14). 2952-2954 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sato, I.Tamai, H.Hasegawa: "Selective MBE Growth of GaAs Ridge Quantum Wire Arrays on Patterned (001) Substrates and Its Growth Mechanism"Institute of Physics Conference Series. vol.174-3. 145-148 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hasegawa, T.Inagaki, S.Ootomo, T.Hashizume: "Properties of Electronic States at Free Surfaces and Schottky Barrier Interfaces of AlGaN/GaN"Institute of Physics Conference Series. vol.174-3. 299-302 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Tamai, T.Sato, H.Hasegawa: "Formation of High-Density GaAs Hexagonal Nano-Wire Networks by Selective MBE Growth on Pre-patterned (001) Substrates"Physica E. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Yoshida, I.Tamai, T.Sato, H.Hasegawa: "Selective Molecular Beam Epitaxy Growth of GaAs Hexagonal Nanowire Networks on (111)B Patterned Substrates"Japanese Journal of Applied Physics. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sato, I.Tamai, S.Yoshida, H.Hasegawa: "Evolution Mechanism of Heterointerface Cross Section during Growth of GaAs Ridge Quantum Wires by Selective Molecular Beam Epitaxy"Applied Surface Science. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, H.Hasegawa: "Effects of Nitrogen Deficiency on Electronic Properties of AlGaN Surfaces Subjected to Thermal and Plasma Processes"Applied Surface Science. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Iizuka, A.Manaf Hashim, H.Hasegawa: "Surface Plasma Wave Interactions between Semiconductor and Electromagnetic Space Harmonics from Microwave to THz Range"Thin Solid Films. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Kotani, H.Hasegawa, T.Hashizume: "Computer Simulation of Current Transport in GaN and AlGaN Schottky Diodes Based on Thin Surface Barrier Model"Applied Surface Science. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Manaf Hashim, T.Hashizume, K.Iizuka, H.Hasegawa: "Plasma Wave Interactions in Microwave to THz Range between Carriers in Semiconductor 2DEG and Interdigital Slow Waves"Superlattice and Microstructures. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Yumoto, T.Tamura, T.Sato, H.Hasegawa: "Fabrication of BDD Quantum Node Switches on Embedded GaAs Quantum Wires Grown by Selective MBE"Superlattice and Microstructures. (in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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