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2003 Fiscal Year Final Research Report Summary

Research of High Performance Lasers and Novel Photonic Devices using Strain-Compensated Low-Dimensional Quantum Structures

Research Project

Project/Area Number 13305021
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

ARAI Shigehisa  Tokyo Institute of Technology, Research Center for Quantum Effect Electronics, Professor, 量子効果エレクトロニクス研究センター, 教授 (30151137)

Project Period (FY) 2001 – 2003
KeywordsSemiconductor laser / Quantum-wire laser / Strained quantum-wire laser / Distributed reflector laser / GaInAsP compound crystal / Electron beam lithography / Organometallic vapor-phase-epitaxy / Dry etching
Research Abstract

Aiming at high-performance semiconductor lasers and novel photonic devices, we have developed strain-compensated low-dimensional quantum structures with high-quality interfaces and high-density nanostructures.
Accomplishments obtained in this research are as follows:
(1)A RT-CW operation of GaInAsP/InP quantum-wire lasers (23 nm wide, 5 stacked quantum-wires), fabricated by electron beam lithography, CH_4/H_2-reactive ion etching and two-step organometallic vapor-phase-epitaxial growth processes, was realized for the first time. Lifetime measurement of this quantum-wire laser was also carried out at RT-CW condition, and no noticeable performance degradation was observed even after more than 10,000 hours.
(2)GaInAsP/InP strain-compensated 5-stacked compressively strained quantum-wire lasers with the wire width of 14 nm in the period of 80 nm were realized using this fabrication method.
(3)GaInAsP/InP multiple-quantum-wire structures with the wire widths of 18 nm and 27 nm in the period of 8 … More 0 nm were fabricated by this fabrication method. Size distributions of these quantum-wire structures were measured by scanning electron microscope and the standard deviation was estimated to be less than 10%.
(4)Wire width dependence of the large energy blue shift in GaInAsP/InP partially strain-compensated vertically-stacked multiple-quantum-wire structures is accurately explained for the first time using an 8 band k・p theory without any fitting parameter. It was found that unlike quantum films, the energy-band structures of strained quantum-wires depend on the amount of strain-compensation in barrier regions and on the number of wire layers, in the vertical stack.
(5)By using a lateral quantum confinement effect, a new type of distributed reflector laser, consisting of a wirelike active section and a passive DBR section with quantum-wire structure was realized. A high performance operation with a threshold current of 2.8 mA, differential quantum efficiency of 35%/facet and sub-mode suppression ratio (SMSR) of 55 dB, was obtained under a RT-CW condition. Less

  • Research Products

    (58 results)

All Other

All Publications (58 results)

  • [Publications] N.Nunoya: "High-Performance 1.55 μm Wavelength GaInAsP-InP Distributed-Feedback Lasers with Wirelike Active Regions"IEEE J.Select.Topics in Quantum Electron.. 7. 249-258 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.M.Raj: "High-Reflectivity Semiconductor/Benzocyclobutene Bragg Reflector Mirrors for GaInAsP/InP Lasers"Jpn.J.Appl.Phys.. 40. 2269-2277 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Wiedmann: "Deeply Etched Semiconductor/Benzocyclobutene Distributed Bragg Reflector Laser Combined with Multiple Cavities for 1.5-μm-Wavelength Single-Mode Operation"Jpn.J.Appl.Phys.. 40. 4031-4037 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Wiedmann: "1.5 μm Wavelength Distributed Reflector Lasers with Vertical Grating"Electron.Lett.. 37. 831-832 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.-C.Kim: "1.5-μm-Wavelength Distributed Feedback Lasers with Deeply Etched First-Order Vertical Grating"Jpn.J.Appl.Phys.. 40. L1107-L1109 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Okamoto: "Continuous Wave Operation of Optically Pumped Membrane DFB Laser"Electron.Lett.. 37. 1455-1457 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.-H.Jeong: "Polarization Insensitive Deep-Ridge Vertical-Groove DFB Waveguide for All-Optical Switching"Electron.Lett.. 37. 1387-1389 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Wiedmann: "GaInAsP/InP Distributed Reflector Lasers Consisting of Deeply Etched Vertical Gratings"Jpn.J.Appl.Phys.. 40. 6845-6851 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Yagi: "GaInAsP/InP Strain-Compensated Quantum-Wire Lasers Fabricated by CH_4/H_2 Dry Etching and Organometallic Vapor-Phase-Epitaxial Regrowth"Jpn.J.Appl.Phys.. 41. L186-L189 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ohira: "Distributed Reflector Laser with Wirelike Active Regions for Asymmetric Output Property"Jpn.J.Appl.Phys.. 41. 1417-1418 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Okamoto: "Single-Mode Operation of Optically Pumped Membrane Buried Heterostructure Distributed-Feedback Lasers"Jpn.J.Appl.Phys.. 41. L249-L251 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Shim: "Facet Reflectivity of a Spot-Size-Converter Integrated Semiconductor Optical Amplifier"IEEE J.Quantum Electron.. 38. 665-673 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] V.M.Kaganer: "Strain in buried quantum wires : Analytical calculations and x-ray diffraction study"Phys.Rev.B. 66. 035310 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.-H.Jeong: "Polarization-Independent All-Optical Switching in a Nonlinear GaInAsP-InP Highmesa Waveguide with a Vertically Etched Bragg Reflector"IEEE J.Quantum Electron.. 38. 706-715 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Yagi: "Low-Damage Etched/Regrown Interface of Strain-Compensated GaInAsP/InP Quantum-Wire Laser Fabricated by CH_4/H_2 Dry Etching and Regrowth"Appl.Phys.Lett.. 81. 966-968 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Okamoto: "Low-Threshold Singlemode Operation of Membrane BH-DFB Lasers"Electron.Lett.. 38. 1444-1446 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.-C.Kim: "Distributed Reflector Lasers with First-Order Vertical Grating and Second-Order Bragg Reflectors"Jpn.J.Appl.Phys.. 41. 7396-7397 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ohira: "Reliable Operation of GaInAsP/InP Distributed Feedback Laser with Wirelike Active Regions"Jpn.J.Appl.Phys.. 42. 475-476 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sano: "Multiple-Quantum-Wire Structures with Good Size Uniformity Fabricated by CH_4/H_2 Dry Etching and Organometallic Vapor-Phase-Epitaxial Regrowth"Jpn.J.Appl.Phys.. 42. 3471-3472 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Yagi: "Room Temperature-Continuous Wave Operation of GaInAsP/InP Multiple-Quantum-Wire Lasers by Dry Etching and Regrowth Method"Jpn.J.Appl.Phys.. 42. L748-L750 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.-C.Kim: "Narrow-stripe distributed reflector lasers with first-order-vertical grating and distributed Bragg reflector"IEEE Photon.Technol.Lett.. 15. 1032-1034 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Haque: "Electronic band structures of GaInAsP/InP vertically stacked multiple quantum wires with strain-compensating barriers"J.Appl.Phys.. 94. 2018-2023 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ohira: "Distributed Reflector Laser Integrated with Active and Passive Grating Sections Using Lateral Quantum Confinement Effect"Jpn.J.Appl.Phys.. 42. L921-L923 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.-C.Kim: "1.5μm-Wavelength Narrow Stripe Distributed Reflector Lasers for High-Performance Operation"IEEE J.Select.Topics in Quantum Electron.. 9. 1146-1152 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ohira: "Stable Single-Mode Operation of Distributed Feedback Lasers With Wirelike Active Regions"IEEE J.Select.Topics in Quantum Electron.. 9. 1166-1171 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Okamoto: "Optically Pumped Membrane BH-DFB Lasers for Low-Threshold and Single-Mode Operation"IEEE J.Select.Topics in Quantum Electron.. 9. 1361-1366 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Okamoto: "Low Threshold Membrane BH-DFB Laser Arrays with Precisely Controlled Wavelength over a Wide Range"IEEE Photon.Technol.Lett.. 16. 1242-1244 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Yagi: "GaInAsP/InP Partially Strain-Compensated Multiple-Quantum-Wire Lasers Fabricated by Dry Etching and Regrowth Processes"Jpn.J.Appl.Phys.. 43. (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Haque: "Anomalous in-plane polarization dependence of optical gain in compressively strained GaInAsP/InP quantum wire lasers"IEEE J.Quantum Electron.. (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Nunoya, M.Nakamura, M.Morshed, STamura, S.Arai: "High-Performance 1.55μm Wavelength GaInAsP-InP Distributed-Feedback Lasers with Wirelike Active Regions"IEEE J. Select Topics in Quantum Electron.. vol.7,no.2. 249-258 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.M.Raj, J.Wiedmann, S.Toyoshima, Y.Saka, K.Ebihara, S.Arai: "High-Reflectivity Semiconductor/Benzocyclobutene Bragg Reflector Mirrors for GaInAsP/InP Lasers"Jpn. J. Appl. Phys.. vol.40,part1,no.4A. 2269-2277 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Wiedmann, M.M.Raj, K.Ebihara, K.Matsui, S.Tamura, S.Arai: "Deeply Etched Semiconductor/Benzocyclobutene Distributed Bragg Reflector Laser Combined with Multiple Cavities for 1.5-μm-Wavelength Single-Mode Operation"Jpn. J. Appl. Phys.. vol.40,part 1,no 6A. 4031-4037 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Wiedmann, K.Ebihara, H-C.Kim, B, Chen, M.Ohta, K.Matsui, S.Tamura, S.Arai: "1.5 μm Wavelength Distributed Reflector Lasers with Vertical Grating"Electron. Left. vol.37,no.13. 831-832 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.-C.Kim, J.Wiedmann, K.Matsui, S.Tamura, S.Arai: "1.5-μm-Wavelength Distributed Feedback Lasers with Deeply Etched First-Order Vertical"Jpn. J. Appl. Phys.. vol.40,part 2, no.10B. L1107-L1109 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Okamoto, N.Nunoya, Y.Onodera, S.Tamura, S.Arai: "Continuous Wave Operation of Optically Pumped Membrane DFB Laser"Electron. Left.. vol.37, no.24. 1455-1457 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.-H.Jeong, H.-C.Kim, T.Mizumoto, J.Wiedmaun, S.Arai, M.akenaka, Y.Nakano: "Polarization Insensitive Deep-Ridge Vertical-Groove DFB Waveguide for All-Optical Switching"Electron. Left.. vol.37, no.23. 1387-1389 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Wiedmann, H.-C.Kim, K.Ebihara, B.Chen, M.Ohta, S.Tamura, J.-I.Shim, S.Arai: "GaInAsP/InP Distributed Reflector Lasers Consisting of Deeply Etched Vertical Gratings"Jpn. J. Appl. Phys.. vol.40, part 1, no.12. 6845-6851 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Yagi, K.Muranushi, N.Nunoya, T.Sano, S.Tamura, S.Arai: "GaInAsP/InP Strain-Compensated Quantum-Wire Lasers Fabricated by CH_4/H_2 Dry Etching and Organometallic Vapor-Phase-Epitaxial Regrowth"Jpn. J. Appl. Phys.. vol.41, part 2, no.2. L186-L189 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ohira, N.Nunoya, S.Tamura, S.Arai: "Distributed Reflector Laser with Wirelike Active Regions for Asymmetric Output Property"Jpn. J. Appl. Phys.. vol.41, part 1, no.3A. 1417-1418 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Okamoto, N.Nunoya, Y.Onodera, S.Tamura, S.Arai: "Single-Mode Operation of Optically Pumped Membrane Buried Heterostructure Distributed-Feedback Lasers"Jpn. J. Appl. Phys.. vol.41, part 2, no.3A. L249-L251 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Shim, J.Kim, D.Jang, Y.Eo, S.Arai: "Facet Reflectivity of a Snot-Size-Converter Integrated Semiconductor Ontical Amplifier"IEEE J. Quantum Electron.. vol.38, no.6. 665-673 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] V.M.Kaganer, B.Jenichen, G.Paris, K.H.Ploog, O.Konovalov, P.Mikulik, S.Arai: "Strain in Buried Quantum Wires : Analytical Calculations and X-Ray Diffraction Study"Phys. Rev. B. vol.66, no.3. 035310 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.H.Jeong, H.-C.Kim.T.Mizumoto, J.Wiedmann, S.Arai, M.Takenaka.Y.Nakano: "Polarization-Independent All-Optical Switching in a Nonlinear GaInAsP-InP Highmesa Waveguide with a Vertically Etched Bragg Reflector"IEEE J. Quantum Electron.. vol.38, no.7. 706-715 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Yagi, K.Muranushi, N.Nunoya, T.Sano, S.Tamura, S.Arai: "Low-Damage Etched/Regrown Interface of Strain-Compensated GaInAsP/InP Quantum-Wire Laser Fabricated by CH_4/H_2 Dry Etching and Regrowth"Appl.Phys.Lett.. vol.81, no.6. 966-968 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Okamoto, N.Nunoya, Y.Onodera, S.Tamura, S.Arai: "Low-Threshold Singlemode Operation of Membrane BH-DFB Lasers"Electron. Left.. vol.38, no.23. 1444-1446 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.-C.Kim, H.Kanjo, S.Tamura, S.Arai: "Distributed Reflector Lasers with First-Order Vertical Grating and Second-Order Bragg-Reflectors"Jpn. J. Appl. Phys.. vol.41, no.12, part 1, no.12. 7396-7397 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ohira, N.Nunoya, H.Yagi, K.Muranushi, A.Onomura, S.Tamura, S.Arai: "Reliable Operation of GaInAsP/InP Distributed Feedback Laser with Wirelike Active Regions"Jpn. J. Appl. Phys.. vol.42, part 1, no.2A. 475-476 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sano, H.Yagi, K.Muranushi, S.Tamura, T.Maruyama, A.Haque, S.Arai: "Multiple-Quantum-Wire Structures with Good Size Uniformity Fabricated by CH_4/H_2 Dry Etching and Organometallic Vapor-Phase-Epitaxial Regrowth"Jpn. J. Appl. Phys.. vol.42, part 1, no 6A. 3471-3472 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Yagi, T.Sano, K.Ohira.T.Maruyama, A.Haque, S.Arai: "Room Temperature-Continuous Wave Opelation of GaInAsP/InP Multiple-Quantum-Wire Lasers by Dry Etching and Regrowth Method"Jpn. J. Appl. Phys.. vol.42, part 2, no.7A. L748-L750 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.-C.Kim, H Kanjo, S.Tamura, S.Arai: "Narrow-stripe distributed reflector lasers with first-order-vertical grating and distributed"IEEE Photon. Technol. Lett.. vol.15, no.8. 1032-1034 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Haque, H.Yagi, T.Sano, T.Maruyama, S.Arai: "Electronic band structures of GaInAsP/InP vertically stacked multiple quantum wires with strain-compensating barriers"J. Appl. Phys.. vol.94, no.3. 2018-2023 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ohira.T.Murayama, H.Yagi, S.Tanuira, S.Arai: "Distributed Reflector Laser Integrated with Active and Passive Grating Sections Using Lateral Quantum Confinement Effect"Jpn. J. Appl. Phys.. vol.42, part 2, no.8A. L921-L923 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.-C.Kim, H.Kanjo, T.Hasegawa, S.Tamura, S.Arai: "1.5μm-Wavelength Narrow Stripe Distributed Reflector Lasers for High-Performance Operation"IEEE J. Select. Topics in Quantum Electron.. vol.9, no.5. 1146-1152 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ohira, N.Nunoya, S.Arai: "Stable Single-Mode Operation of Distributed Feedback Lasers With Wirelike Active Regions"IEEE J. Select. Topics in Quantum Electron.. vol.9, no.5. 1166-1171 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Okanioto, N.Nunoya, Y.Otiodera, T.Yamazaki, S.Tamura, S.Arai: "Optically -Pumped Membrane BH-DFB Lasers for Low-Threshold and Single-Mode Operation"IEEE J. Select. Topics in Quantum Electron.. vol.9, no.5. 1361-1366 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Okamoto, T.Yamazaki, S.Sakamoto, S.Tamura, S.Arai: "Low Threshold Membrane BH-DFB Laser Arrays with Precisely Controlled Wavelength over a Wide Range"IEEE Photon. Technol. Lett.. vol.16, no.5. 1242-1244 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Yagi, T.Sano, K.Ohira, D.Plumwongrot, T.Maruyama, A.Haque, S.Tamura, S.Arai: "GaInAsP/InP Partially Strain-Compensated Multiple-Quantum-Wire Lasers Fabricated by Dry Etching and Regrowth Processes"Jpn. J. Appl. Phys.. vol.43, no.6A. (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Haque, T.Maruyama, H.Yagi, T.Sano, D.Plumwongrot, S.Arai: "Anomalous in-plane polarization dependence of optical gain in compressively strained GaInAsP/InP quantum wire lasers"IEEE J. Quantum Electron.. (2004)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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