2003 Fiscal Year Final Research Report Summary
Development of mechanical micro-fabrication system using pencil-shape electroformed tool
| Project/Area Number |
13450061
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Fukuoka Institute of Technology |
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Principal Investigator |
FUJIYAMA Hirokazu Fukuoka Institute of Technology, Department of Intelligent Mechanical Engineering, Associate Professor, 工学部, 助教授 (50148912)
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| Co-Investigator(Kenkyū-buntansha) |
ONIKURA Hiromochi Kyushu University, Department of Mechanical Engineering, Professor, 大学院・工学研究科, 教授 (90108655)
SEMBA Takuya Fukuoka Institute of Technology, Department of Intelligent Mechanical Engineering, Associate Professor, 工学部, 教授 (30154678)
TANAKA Shuji Fukuoka Institute of Technology, Department of Information Electronics Engineering, Associate Professor, 工学部, 助教授 (30236591)
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| Project Period (FY) |
2001 – 2003
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| Keywords | Microgrinding / Nickel / Phosphorous plating / Micro-Truing / Micro-Dressing / Micro dies and molds / Grinding tool / Diamond tool / Electroforming |
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| Research Abstract |
Development of mechanical microfabrication system using microgrinding was made for the purpose to fabricate 3-dimensional micro dies and molds that could not be fabricated by the conventional techniques, such as LIGA technology and Micro Electro mechanical System MEMS. During last 2 years, the following 3 research projects were conducted.
(1)Development of high-speed electroforming technique that can produce electroformed diamond tool with superior bending strength,
(2)Development of micro truing and dressing techniques that can fabricate electroformed diamond tool to pencil-shape microgrinding tool under 0.1 mm diameter,
(3)Fabrication of 2 and 3 dimensional micro-sized dies and molds using pencil-shape microgrinding tool and ultraprecision machining center.
The results obtained could be summarized as follows;
(1)Nickel/phosphorous plating technique that can produce an electroformed diamond tool processing the same bending strength with the conventional, cemented carbide tool could be successfully developed.
(2) Micro truing and dressing techniques that can fabricate the tool end of the microgrinding tool to spherical and wedge shape could be developed using electroformed diamond tool from #3000 to #8000 in diamond mesh size.
(3)It was verified from the grinding test that the microgrinding tool could be adapted to the fabrication of 2 and 3 dimensional micro structures, such as micro-reflectors, micro-reactors and micro-prism arrays.
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