2003 Fiscal Year Final Research Report Summary
Development of Fabrication Technology of Ferrite Thin Materials for Microwave Magnetic Devices
| Project/Area Number |
13450145
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
電子デバイス・機器工学
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| Research Institution | Yamaguchi University |
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Principal Investigator |
YAMAMOTO Setsuo Yamaguchi University, Graduate School of Medicine, Professor, 大学院・医学研究科, 教授 (30182629)
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| Project Period (FY) |
2001 – 2003
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| Keywords | ferrite / thin-film / Microwave / magnetic device / inductor / isolator / circulator / communication device |
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| Research Abstract |
Use of bulk ferrite materials disturbs achievement of magnetic devices and mobile communication sets. The purpose of this research is to develop fabrication technology of ferrite thin-films at low temperature and to investigate the feasibility of application to small and low height magnetic devices. The following research results were obtained
1. Using reactive sputtering utilizing electron-cyclotron-resonance microwave plasma, Ni-Zn ferrite thin-films with a coercivity as low as 11 Oe and high crystal orientation was successfully prepared at high deposition rate of 44 nm/min. Use of conic sputtering target instead of platelet target was effective to achieve this
2. Extremely small size inductor using Ni-Zn ferrite thin-film was developed. 25 % increase in inductance and 15 % increase in Q-value as compared with inductor without magnetic core was obtained up to 1 GHz. The area of the inductor was 6×10^4μm^2 (250μm×240μm) which was about 50 % of the smallest inductor already developed by another researchers. Thus the effectiveness of use of ferrite thin-film as a magnetic core was proved
3. Microstrip Y junction type isolator using ferrite thin-film with a novel structure was designed using high frequency FEM simulator. The height of this isolator was less than 1 mm. Ground plane underneath of the circle portion of the Y junction was located closed to the microstrip line to enhance circulation of microwave transmission. The isolator was fabricated in trial using micromachining technology. The isolator showed non-reciprocal transmission characteristics
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