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2003 Fiscal Year Final Research Report Summary

Micmfabrication of Sapphire wafers for Sensor Devices with UV Laser Pulses

Research Project

Project/Area Number 13555037
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 機械工作・生産工学
Research InstitutionTOKAI UNIVERSITY

Principal Investigator

HORISAWA Hideyuki  Tokai University, School of Engineering, Associate Professor, 工学部, 助教授 (30256169)

Co-Investigator(Kenkyū-buntansha) KIMURA Shigeo  Yamatake Corporation, Research and Development Headquaiters, 研究開発本部, 主任研究員
YAMAGUCHI Shigeru  Tokai University, School of Science, Professor, 理学部, 教授 (40297205)
Project Period (FY) 2001 – 2003
KeywordsYAG laser / Fifth harmonic generation wave / Sapphire / Laser microfabrication / Surface machining / Short-pulse ultra-violet laser / Heat affecting zone / Hole drilling
Research Abstract

In this study, a fundamental investigation on short-pulse uv-laser micromachining of sapphire wafers was conducted for microfabrication of next-generation sensor-head devices. Examinations and results were as follows :
(i) Development of Fifth Harmonic Generation (HG) Pulse Nd : YAG System
With nonlinear crystals and temperature control systems, stable Forth-HG (wavelength: 266 nm) and Fifth-HG (213 nm) wave systems were assembled.
(ii) Development of PC-Controlled X-Y Stage Micromichining System
Controlling the uv-laser system and an X-Y stage with a personal computer, two-dimensional pattern machining became possible. With this system, hole-drilling, grooving, and surface removing characteristics of sapphire were investigated through a laser-microscope, SEM, and AFM. In addition, heat affecting zone (HAZ) depths were estimated after etching with hot phosphoric acid solution. As the results, holes of 10 μm in diameter and grooves with 20 μm-deep x 50 μm wide with limited HAZ were obtained.
(iii) Micromachining Characteristics of Q-sw Short-Pulse Fifth-HG Nd:YAG Pulses
Fine hole-drilling, fine grooving, and smooth surface removing characteristics with the uv-laser system were investigated. In each case, accurate surface removal was obtained. In these cases, bottom surfaces with average surface roughness of 200 nm could be achieved with homogenized beams.
(iv) Development of PC-Controlled X-Y Stage 3-D Micromachining System
Overlaying several two-dimensional patters, quasi-three-dimensional structures could be realized. With this system, 3-D structures, such as cubes or pyramids, could be machined, and each size of the structure were estimated by a laser-microscope. As the result, accuratesurface removing with the rate of 1〜15 μm/pulse for laser fluence of 60 J/cm^2 were obtained.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] HORISAWA, Hideyuki: "Surface Machining Characteristics of Sapphire with Fifth Harmonic YAG Laser Pulses"Vacuum. Vol.73. 439-447 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 堀澤 秀之: "フェムト秒レーザによる微細加工"電気加工学会誌. Vol.37(86). 26-33 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 堀澤 秀之: "短パルスYAGレーザ高調波による高機能材料の微細加工"レーザ協会誌. Vol.28(2). 45-53 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] TAMURA, Shin: "Laser Ablation of Sapphire with a Pulsed Ultra-Violet Laser Beam"Initiatives of Precision Engineering at the Beginning of a Millenium. 224-228 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] HORISAWA, Hideyuki: "Gas Flow Characteristics in a Laser Cut Kerf"Initiatives of Precision Engineering at the Beginning of a Millenium. 339-343 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] HORISAWA, Hideyuki: "Fundamental Study on Laser Plasma Accelerator for Space Propulsion Applications"Vacuum. Vol.65. 389-396 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] HORISAWA, Hideyuki, et al.: "Surface Machining Characteristics of Sapphire with Fifth Harmonic YAG Laser Pulses"Vacuum. Vol.73. 439-447 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] HORISAWA, Hideyuki, et al.: "Micromachining Characteristics with Femto-second Lasers"Journal of the Japan Society of Electrical Machining Engineers. Vol.37(86). 26-33 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] HORISAWA, Hideyuki, et al.: "Surface Machining Characteristics with Fifth Harmonic YAG Laser Pulses"Journal of the Japan Society of Laser Technology. Vol.28(2). 45-53 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] TAMURA, Shin, et al.: "Laser Ablation of Sapphire with, a Pulsed Ultra-Violet Laser Beam"Initiatives of Precision Engineering at the Beginning of a Millenium. 224-228 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] HORISAWA, Hideyuki: "Gas Flow Characteristics in a Laser Cut Kerf"Initiatives of Precision Engineering at the Beginning of a Millenium. 339-343 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] HORISAWA, Hideyuki, et al.: "Fundamental Study on Laser Plasma Accelerator for Space Propulsion Applications"Vacuum. Vol.65. 389-396 (2002)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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