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2003 Fiscal Year Final Research Report Summary

GaInNAs vertical cavity surface emitting laser arrays for ultra-high speed and parallel data-links

Research Project

Project/Area Number 13555091
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

MIYAMOTO Tomoyuki  Tokyo Institute of Technology, Precision and Intelligence Lab., Associate Professor, 精密工学研究所, 助教授 (70282861)

Co-Investigator(Kenkyū-buntansha) SAKAGUCHI Takahiro  Tokyo Institute of Technology, Precision and Intelligence Lab., Research Assistant, 精密工学研究所, 助手 (70215622)
KOYAMA Fumio  Tokyo Institute of Technology, Precision and Intelligence Lab., Professor, 精密工学研究所, 教授 (30178397)
Project Period (FY) 2001 – 2003
Keywordssemiconductor laser / optical network / optical interconnect / quantum well / quantum dot / VCSEL / GaInNAs / epitaxy
Research Abstract

Low cost and high performance lasers are required in next short distance lightwave networks and optical LANs. The vertical cavity surface emitting laser (VCSEL) is important light source and the VCSEL with 1.1-1.6μm of wavelength is suitable for the optical fiber systems. This research is aiming to realize the long wavelength VCSEL for optical data links using GaAs based material.
As GaAs based materials, highly strained GaInAs quantum well (QW), GaInNAs QW, GaInNAs quantum dot (QD) and GaInAsSb QD are grown using CBE, MBE and MOCVD epitaxial techniques for realizing high emission efficiency and long wavelength emission. 1.1-1.2μm emission by GaInAs QWs, 1.2-1.4μm by GaInNAs QWs, and 1.4-1.5μm by GaInAsSb QDs were observed from photoluminescence measurement of grown crystals. These results indicate applicability of GaAs based material for long wavelength lasers. It was also found that GaInNAs QDs were effective in high-density dot formation which is advantageous for improving in the laser characteristics. The edge emitting lasers are grown and fabricated using highly strained GaInAs and GaInNAs QWs and the lasing at 1.2μm and 1.4μm, respectively were observed. In addition, a 1.13μm wavelength VCSEL was fabricated by highly strained GaInAs QWs. The VCSEL was operated under high temperature and the long-distance high-speed tr'ansmission experiment was demonstrated. These initial lasing performances suggest applicability of GaAs based long wavelength material to the high performance VCSELS. Although, the VCSEL beyond 1.2μm of wavelength is not realized, 1.1-1.5μm VCSELS on GaAs will be achieved by improving emission efficiency of crystals by optimization of growth conditions.

  • Research Products

    (46 results)

All Other

All Publications (46 results)

  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Lasing characteristics of low-threshold GaInNAs lasers grown by metalorganic chemical vapor deposition"Jpn.J.Appl.Phys.. 40/7B. L744-L746 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Makino, T.Miyamoto, 他: "Composition dependence of thermal annealing effect on 1.3μm range GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Jpn.J.Appl.Phys.. 40/11B. 1211-1213 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kageyama, T.Miyamoto, 他: "Temperature Characteristics of λ=1.3μm GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"電子情報通信学会英文論文誌(Trans.IEICE). E85-C/1. 71-78 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence dependence on heterointerface for metalorganic chemical vapor deposition grown GaInNAs/GaAs quantum wells"Appl.Phys.Lett.. 80/6. 962-964 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Ikenaga, T.Miyamoto, 他: "1.4μm GaInNAs/GaAs quantum well laser grown by chemical beam epitaxy"Jpn.J.Appl.Phys.. 41/2A. 664-665 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Makino, T.Miyamoto, 他: "Nitrogen composition and growth temperature dependence of growth characteristics for self-assembled GaInNAs/Gas quantum dots by chemical beam epitaxy"Jpn.J.Appl.Phys.. 41/2B. 953-957 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence and lasing characteristics of GaInNAs quantum wells using GaInAs intermediate layers"Jpn.J.Appl.Phys.. 41/2B. 1034-1039 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kondo, T.Miyamoto, 他: "Low threshold current density operation of 1.16 μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate"Jpn.J.Appl.Phys.. 41/5B. L562-L564 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kondo, T.Miyamoto, 他: "Effect of annealing on highly strained GaInAs/GaAs quantum wells"Jpn.J.Appl.Phys.. 41/6A. L612-L614 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Gouardes, T.Miyamoto, 他: "GaInAs/GaInNAs/GaInAs intermediate layer structure for long wavelength lasers"IEEE Photon.Technol.Lett.. 14/7. 896-898 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Ohta, T.Miyamoto, 他: "Effect of quantum well width reduction for GaInNAs/GaAs lasers"Optical Review. 9/6. 231-233 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Miyamoto, 他: "Wavelength elongation of GaInNAs lasers beyond 1.3 μm"Proc.IEE. 150/1. 59-62 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Makino, T.Miyamoto, 他: "Growth characteristics of GaInNAs/GaAs quantum dots by chemical beam epitaxy"J.Crystal Growth. 256/3-4. 372-377 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Makino, T.Miyamoto, 他: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"Physica Status Solidi. 0(c)/4. 1097-1100 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Uchida, T.Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn.J.Appl.Phys.. 42/11. 6883-6886 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kondo, T.Miyamoto, 他: "Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1 μm GaInAs/GaAs vertical cavity surface emitting laser"Electron.Lett.. 40/1. 65-66 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsuura, T.Miyamoto, 他: "Elongation of emission wavelength of GaInAsSb-covered (Ga)InAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/1AB. L82-L84 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence and lasing characteristics of GaInNAs/GaAsP strain-compensated quantum wells"Jpn.J.Appl.Phys.. 43/2B. L267-L270 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsuura, T.Miyamoto, 他: "p-type doping characteristics of GaInNAs : Be grown by solid source molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/4A. L433-L435 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "GaInNAs intermediate layer for improvement of lasing characteristics of GaInNAs quantum well lasers"Jpn.J.Appl.Phys.. 43/4A. L453-L455 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsuura, T.Miyamoto, 他: "Surfactant effect of Sb on GaInAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/5A. L605-L607 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Improvement in photoluminescence efficiency of GaInNAs/GaAs quantum wells grown by metalorganic chemical vapor deposition for low threshold 1.3 μm range lasers"Jpn.J.Appl.Phys.. (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kageyama, T.Miyamoto, 他: "Low threshold GaInAsSb/GaAs quantum well lasers emitting at 1200 nm-range grown by molecular beam epitaxy"J.Appl.Phys.. (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto, et al.: "Lasing characteristics of low-threshold GaInNAs lasers grown by metalorganic chemical vapor deposition"Jpn. J. Appl. Phys.. vol.40, no.7B. L744-L746 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki Makino, Tomoyuki Miyamoto et al.: "Composition dependence of thermal annealing effect on 1.3μm range GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Jpn. J. Appl. Phys.. vol.40, no.11B. L1211-L1213 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Takeo Kageyama, Tomoyuki Miyamoto et al.: "Temperature characteristics of λ=1.3μm GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Trans. IEICE. vol.E85-C, no.1. 71-78 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Photoluminescence dependence on heterointerface for metalorganic chemical vapor deposition grown GaInNAs/GaAs quantum wells"Appl. Phys. Lett.. vol.80, no.6. 962-964 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yoshihiko Ikenaga, Tomoyuki Miyamoto et al.: "1.4μm GaInNAs/GaAs quantum well laser grown by chemical beam epitaxy"Jpn. J. Appl. Phys.. vol.41, no.2A. 664-665 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki Makino, Tomoyuki Miyamoto et al.: "Nitrogen composition and growth temperature dependence of growth characteristics for self-assembled GaInNAs/Gas quantum dots by chemical beam epitaxy"Jpn. J. Appl. Phys.. vol.41,no.2B. 953-957 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Photoluminescence and lasing characteristics of GaInNAs quantum wells using GaInAs intermediate layers"Jpn. J. Appl. Phys.. vol.41,no.2B. 1034-1039 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Takashi Kondo, Tomoyuki Miyamoto et al.: "Low threshold current density operation of 1.16μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate"Jpn. J. Appl. Phys.. vol.41,no.5B. L562-L564 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Takashi Kondo, Tomoyuki Miyamoto et al.: "Effect of annealing on highly strained GaInAs/GaAs quantum wells"Jpn. J. Appl. Phys.. vol.41, no.6A. L612-L614 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Eric Gouardes, Tomoyuki Miyamoto et al.: "GaInAs/GaInNAs/GalnAs intermediate layer structure for long wavelength lasers"IEEE Photon. Technol. Lett.. vol.14, no.7. 896-898 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masataka Ohta, Tomoyuki Miyamoto et al.: "Effect of quantum well width reduction for GaInNAs/GaAs lasers"Optical Review. vol.9, no.6,. 231-233 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Tomoyuki Miyamoto et al.: "Wavelength elongation of GaInNAs lasers beyond 1.3μm"Proc. IEE. vol.150, no.1. 59-62 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki Makino, Tomoyuki Miyamoto et al.: "Growth characteristics of GaInNAs/GaAs quantum dots by chemical beam epitaxy"J. Crystal Growth. vol.256,no.3-4. 372-377 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki Makino, Tonioyuki Miyamoto et al.: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"Physica Status Solidi. vol.0(c), no.4. 1097-1100 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Takeshi Uchida, Tomoyuki Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn. J. Appl. Phys.. vol.42, no.11. 6883-6886 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Takashi Kondo, Tomoyuki Miyamoto et al.: "Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1μm GaInAs/GaAs vertical cavity surface emitting laser"Electron. Lett.. vol.40, no.1. 65-66 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Tetsuya Matsuura, Tomoyuki Miyamoto et al.: "Elongation of emission wavelength of GaInAsSb-covered (Ga)InAs quantum dots grown by molecular beam epitaxy"Jpn. J. Appl. Phys.. vol.43, no.1AB. L82-L84 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Photoluminescence and lasing characteristics of GaInNAs/GaAsP strain-compensated quantum wells"Jpn. J. Appl. Phys.. vol.43, no.2B. L237-L270 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Tetsuya Matsuura, Tomoyuki Miyamoto et al.: "p-type doping characteristics of GaInNAs : Be grown by solid source molecular beam epitaxy"Jpn. J. Appl. Phys.. vol.43, no.4A. L433-L435 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "GaInNAs intermediate layer for improvement of lasing characteristics of GaInNAs quantum well lasers"Jpn. J. Appl. Phys.. vol.43, no.4A. L453-L455 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Tetsuya Matsuura, Tomoyuki Miyamoto et al.: "Surfactant effect of Sb on GaInAs quantum dots grown by molecular beam epitaxy"Jpn. J. Appl. Phys.. vol.43, no.5A. L605-L607 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Improvement in photoluminescence efficiency of GaInNAs/GaAs quantum wells grown by metalorganic chemical vapor deposition for low threshold 1.3μm range lasers"Jpn. J. Appl. Phys.. (accepted).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Takeo Kageyama, Tomoyuki Miyamoto et al.: "Low threshold GaInAsSb/GaAs quantum well lasers emitting at 1200 nm-range grown by molecular beam epitaxy"J. Appl. Phys.. (accepted). (2004)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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