2002 Fiscal Year Final Research Report Summary
Development of Corrosion Fatigue Testing Machine for Micro-Sized Specimens for Bio-MEMS
| Project/Area Number |
13555186
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Structural/Functional materials
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| Research Institution | TOKYO INSTITUTE OF TECHNOLOGY |
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Principal Investigator |
TAKASHIMA Kazuki Precision and Intelligence Laboratory, Tokyo Institute of Technology, Associate Professor, 精密工学研究所, 助教授 (60163193)
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| Co-Investigator(Kenkyū-buntansha) |
ISHIYAMA Chiemi Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research Associate, 精密工学研究所, 助手 (00311663)
SHIMOJO Masayuki Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research Associate, 精密工学研究所, 助手 (00242313)
HIGO Yakichi Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 教授 (30016802)
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| Project Period (FY) |
2001 – 2002
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| Keywords | Bio-Micromachine / MEMS / Micro-sized specimens / Corrosion fatigue / Fatigue life / Materials evaluation / Amorphous alloy / Austenitic stainless steel |
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| Research Abstract |
MEMS (Micro electro mechanical systems) devices are expected to be used in human body as Bio-MEMS (diagnosis and treatment devices) and in corrosive environments as inspection devices. The size of components used in such MEMS devices are considered to be in the order of microns. This size is smaller than the grain diameter in conventional metals and alloys. Mechanical properties of such micro-sized materials are considered to be different from those of bulk materials. In addition, the effect of corrosion is considered to be more prominent, because the specific surface area of micro-sized specimens is larger compared with that of bulk specimens. Crevices, the size of which is also in the order of microns, may exist in MEMS devices and thus crevice corrosion is also important. Therefore, corrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investiga
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te corrosion fatigue properties of micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, we have developed a fatigue testing machine for micro-sized specimens, and corrosion fatigue tests for micro-sized Ni-P amorphous alloy and 304 austenitic stainless steel specimens have been carried out in air and 0.9% NaCl solution to investigate the size effects on corrosion fatigue properties. Specimens of cantilever-beam-type with dimensions of 10 microns × 10 microns × 50 microns were prepared from a Ni-P amorphous alloy thin film and a 304 austenitic stainless steel thin sheet by focused ion beam machining. The fatigue life of the specimen tested in air was more than 100,000 cycles, while that tested in the corrosive environment was less than 10,000 cycles. Distinct environmental effects on fatigue properties were observed. Several problems and solutions for the testing method were also discussed. Less
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