2002 Fiscal Year Final Research Report Summary
Preparation of transparent, thick films with high refractive index by the sol-gel method and application to the fine patterning process
| Project/Area Number |
13555242
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
無機工業化学
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| Research Institution | Osaka Prefecture University |
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Principal Investigator |
MINAMI Tsutomu Osaka Prefecture Univ., President, 学長 (80081313)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUDA Atsunori Toyohashi Univ. of Technol., Assoc. Prof., 物質工学系, 助教授 (70295723)
TADANAGA Kiyoharu Osaka Prefecture Univ., Assoc. Prof., 工学研究科, 助教授 (90244657)
TATSUMISAGO Masahiro Osaka Prefecture Univ., Prof., 工学研究科, 教授 (50137238)
NAKAMA Kenichi Nippon Sheet Glass, Lab. Maneger, 技術研究所, 主任
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| Project Period (FY) |
2001 – 2002
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| Keywords | Sol-Gel method / Thick film / refractive index / Micropatterning / Silsesquioxane / Organic-inorganic hybrid / Transparent / UV-irradiation |
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| Research Abstract |
1. Transparent, thick films with high refractive index have been successfully prepared using silsesquioxanes from such as phenyltriethoxysilane and benzyltriethoxysilane and metal oxides. Titania-silsesquioxane films showed the highest refractive index. Thick films from diphenyldimethoxysilane and titania showed higher refractive index than the films from phenyltrietoxysilane and titania. Thick films from diphenylmethoxysilane showed fluidity with less than 30 mol % of titania.
2. Changes of structure, morphology, and optical properties of silsesquioxane-titania thick films by UV-irradiation have been investigated. Irradiation of UV-light led to depletion of Si-C bonds in the thick films, and hardness and refractive index of the films were increased. It was found that hardness of the vinylsilsesquioxane-titania films mostly increased.
3. Micropatterns of phenylsisisesquioxane-titana thick films were successfully prepared by the embossing process. Convexly shaped micropatterns have been formed on hydrophobic-hydrophilic patterned substrate with titania and fluoroalkylsilanes thin layer, based on the difference in the surface free energy and fluidity of the phenylsilsesquioxane-titana at temperatures higher than then-glass transition temperatures.
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