2002 Fiscal Year Final Research Report Summary
REVELATION OF LIGHT ACTIVE FUNCTION IN AMORPHOUS TiO3 THIN FILM
| Project/Area Number |
13650010
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Aichi University of Technology (2002)
Shizuoka University (2001) |
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Principal Investigator |
HATANAKA Yoshinori AICHI UNIVERSITY OF TECHNOLOGY FACULTY OF ENGINEERING PROFESSOR, 工学部, 教授 (60006278)
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| Co-Investigator(Kenkyū-buntansha) |
AOKI Toru SHIZUOKA UNIVERSITY, RESEARCH INSTITUTE OF ELECTRONICS RESEARCH ASSOCIATE, 電子工学研究所, 助手 (10283350)
LUCEL Sirghi SHIZUOKA UNIVERSITY, RESEARCH INSTITUTE OF ELECTRONICS ASSOCIATE PROFESSOR, 電子工学研究所, 助教授 (70324340)
KORZEC Dariusz UNIVERSITY OF WUPPERTAL CENTER OF MICRO-STRUCTURE TECHNICAL HEAD
WROBEL Aleksander m. POLISH ACADEMY OF SCIENCE PROFESSOR
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| Project Period (FY) |
2001 – 2002
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| Keywords | Environmental materials / TiO2 / Plasma CVD / Hollow cathode plasma / Light catalytic function / Oxygen sensor / Hydrophilic function / Organic titanium / Coating technology |
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| Research Abstract |
A hollow-cathode jet plasma source has been developed for the generation of high density plasma radicals. By using this plasma source, amorphous TiO2 thin films are deposited from organic-titanium (titanium tetra-isopropoxide: TTIP). It has been found that the films obtained have an active function for ultra-violet light, because OH bases included in the film terminate the unpaired electron and make the defects disappeared. It has been also found that these films have high photoconductivity for ultra-violet light and sensitive in dark current for the kind of environment gas, that is, very low for oxygen and high for hydrogen. These characteristics have been investigated for the application of gas sensor.
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