2003 Fiscal Year Final Research Report Summary
Research on Optical Wave Control Devices using A Fluorinated Silicon Oxide Thin-Films Formed by Selective Liquid Phase Deposition
| Project/Area Number |
13650384
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
電子デバイス・機器工学
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| Research Institution | Shibaura Institute of Technology |
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Principal Investigator |
HOMMMA Tetsuya Shibaura Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (60286698)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAHASHI Hideo Shibaura Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (90052795)
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| Project Period (FY) |
2001 – 2003
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| Keywords | Thin-Film Optical Waveguide / Fluorinated Silicon Oxide (SiOF) / Liquid Phase Deposition (LPD) Technique / Spin-on Glass (SOG) / Thermo-Optical Device / Thermal Coefficient of Refractive Index / Extinction Ratio / Half-Wave Power |
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| Research Abstract |
The transmission loss of thin-film optical waveguides using liquid-phase deposited (LPD) fluorinated silicon oxide (SiOF) core-layer and organic spin-on glass (SOG) cladding-layer was 2〜9 dB/cm at 532〜834 nm wavelengths. The thermo-optical devices with this waveguide show switching time 2.4 msec, extinction ratio 16 dB and half-wave power 2.78W.
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Research Products
(14 results)
