2003 Fiscal Year Final Research Report Summary

Imaging of Spatial Distribution of Particles in Plasmas using Miniature Mass Spectrometers

Research Project

Project/Area Number	13680552
Research Category	Grant-in-Aid for Scientific Research (C)
Allocation Type	Single-year Grants
Section	一般
Research Field	プラズマ理工学
Research Institution	The University of Tokyo
Principal Investigator	BANNO Tatsuya The University of Tokyo, School of Engineering, Lecturer, 大学院・工学系研究科, 講師 (70189736)
Project Period (FY)	2001 – 2003
Keywords	High Density Plasma / Ambipolar Diffusion / Spatial Distributor of Plazma / Miniature Mass Spectrometer / Mean Free Path
Research Abstract	1.High-density plasmas have been generated in a cylindrical discharge vessel using a Pyrex view port and a ring-slotted microwave launcher. 2.The probe diagnostic technique employing an extremely asymmetric double probe allows the measurements of spatial distribution of plasma parameters and of electron energy distribution functions. The classical ambipolar diffusion of plasma takes place with an intense ionization region in the vicinity of plasma / glass interface. 3.Miniature mass spectrometers have been utilized to measure particle densities in the plasma region. Elaborate measurements have shown that ion flux generated at the plasma / glass interface are qualitatively detected and that the azimuth angle dependence of the flux are correlated with the symmetry of the distribution of the ionization rate at the interface.

(4 results)