2002 Fiscal Year Annual Research Report

集積回路上への選択成長極微細シリコンプローブによるスマート・マイクロチップ

Research Project

Project/Area Number	14205044
Research Institution	Toyohashi University of Technology
Principal Investigator	石田誠豊橋技術科学大学, 工学部, 教授 (30126924)
Co-Investigator(Kenkyū-buntansha)	高尾英邦豊橋技術科学大学, 工学部, 助手 (40314091) 澤田和明豊橋技術科学大学, 工学部, 助教授 (40235461)
Keywords	スマートチップ / 微細針電極 / 単結晶シリコンプローブレイ / VLS選択成長 / 細胞電位計測 / 網膜,脳科学 / MOSFET on Si(111) / マイクロ・ナノテクノロジー
Research Abstract	生体・脳医学分野で求められているセンサは、細胞膜の電位を2次元としてとらえるものである。これを実現するためには、信号処理回路上にミクロンサイズの電極径・間隔で数千〜数万電極を実現できる多電極チップが理想的である。同一チップ上にプローブ電極と信号処理回路を持つことでセンサと回路が一体化された超小型のスマート(賢い)多電極電位センサとなり、1.細胞膜の電位分布をミクロンの精度で計測、2.プローブ直下でのインピーダンス変換、増幅によるノイズの少ない微少信号計測、3.ランダムアクセスが可能等の特徴を持つ。これを実現するために本年度は、下記の要素技術の確立を行うことができた。 1.細胞サイズに追従した単結晶シリコンの製作条件を確立。成長装置は現有のガスソースMBE装置を用いた。これまで100μm程度の長さを実現しているが、細胞内挿入型として、直径が数μm、長さが100μm〜1mmの電極製作条件も確立、さらに細胞へ挿入を検討のため、シリコン電極の形状、強度を顕微鏡下でのピデオ観察により検討することができ、当初の予想を上回る結果を得ることができた。この実験に適した強度の高いシリコン電極の形状の作製条件も得ることができた。 2.シリコン電極の低抵抗化を低温度で行うには、シリコン成長に不純物ガスを混入することで可能なことがわかった。熱拡散法では十分な低抵抗特性を得ている 3.細胞内挿入型シリコン電極として、電極側面の絶縁技術をまず熱酸化膜を用いる方法を確立した。これらの結果は、次年度以降の計画にとって、非常に有益な結果であり今後の計画の推進が期待される。

Research Products
(15 results)

All Other

All Publications (15 results)

[Publications] Takeshi Kawano, Yoshihiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication and Properties of Ultra Small Si Wire Arrays with Circuits by Vapor-Liquid-Solid Growth"Sensors and Actuators A. 97-98. 709-715 (2002)
[Publications] Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording"Japanese Journal of Applied Physics. 42・4B(印刷中). (2003)
[Publications] Maokoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada: "Mechanical and Electrical Properties of Micro-Si Probe Array for Multichannel neural Activity Recording Chip"The International Conference on Electrical Engineering. 1311-1314 (2002)
[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Selectively Grown Si Micro-Prove Array Chip on Si(111) with Signal Process in Circuits"PACIFIC RlM WORKSHOP ON TRANSDUCERS AND MICRO/NANO TECHNOLOGIES. (Invited). 295-298 (2002)
[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Smart chip with selective micro-probes on Si(111) lC chips for detecting nerve potential"International Conference on Smart Materials, Structures and Systems ISSS-SPlE2002. (Invited). 302-309 (2002)
[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Selectively Grown Si Micro-Probe Array Chip on Si(111) with Signal Processing Circuits"2003 RCIQE lnternational Seminar on "Quantum Nanoelectronics for Meme-Media-Based lnformation Technologies". (Invited). 92-99 (2002)
[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Smart microchip for detecting cell potential using Si micro-probes selectively grown on IC ships"Second International Conference on Molecular Electronics and Bioelectronics(M&BE2). (Invited). 139 (2003)
[Publications] Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Vapor-liquid-solid Graon Si Probe Array Chip for Penetrating and Recording in the Nervous System"The 19th Sensor Symposium on the IEEJ. 487-490 (2002)
[Publications] Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Mitsuaki Ahiki, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Signal Conditioning CMOS Circuit Integrated on Si (111) for Neutral Activity Image Recording"The 19th Sensor Symposium on the IEEJ. 421-424 (2002)
[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Multichannel 3D Si Micro-Probe Array on MOSFET Circuits to Record Response Cell in retina"The Japan Society of Applied Physics (The 63rd Spring meeting). 3. 1153 (2002)
[Publications] Hiroshi Ishino, Takeshi Kawano, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication of low resistance VLS micro-Si probe using Au-Sb alloy for neural activity recording"The Japan Society of Applied Physics (The 63rd Spring meeting). No.3. 1153 (2002)
[Publications] Yoshiko Kato, Yoshiaki Ito, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication and evaluation of CMOS-IC on Si (111) for image-recording sensor of neural activity-effect of hydrogen annealing-"The Japan Society of Applied Physics (The 63rd Spring meeting). No.3. 1153 (2002)
[Publications] Takeshi Kawano, Yoshiko Kato Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Electrical Properties of n-channel MOSFETs for On-chip Circuits of Smart Neural Recording Sensor"The Japan Society of Applied Physics (The 50rd Spring meeting). 3. 1393 (2003)
[Publications] Hiroshi Ishino, Takeshi Kawano, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication of low resistance micro-Si probe using in-situ doping VLS growth for neural activity recording"The Japan Society of Applied Physics (The 50rd Spring meeting). 3. 1393 (2003)
[Publications] Ryoji Tani, Takeshi Kawano, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication of varying-length micro Si probe arrays for neural activity recording by vapor-liquid-solid growth method"The Japan Society of Applied Physics (The 50rd Spring meeting). 3. 1393 (2003)

2002 Fiscal Year Annual Research Report

集積回路上への選択成長極微細シリコンプローブによるスマート・マイクロチップ

Principal Investigator

石田 誠 豊橋技術科学大学, 工学部, 教授 (30126924)

Research Products

[Publications] Takeshi Kawano, Yoshihiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication and Properties of Ultra Small Si Wire Arrays with Circuits by Vapor-Liquid-Solid Growth"Sensors and Actuators A. 97-98. 709-715 (2002)

[Publications] Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording"Japanese Journal of Applied Physics. 42・4B(印刷中). (2003)

[Publications] Maokoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada: "Mechanical and Electrical Properties of Micro-Si Probe Array for Multichannel neural Activity Recording Chip"The International Conference on Electrical Engineering. 1311-1314 (2002)

[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Selectively Grown Si Micro-Prove Array Chip on Si(111) with Signal Process in Circuits"PACIFIC RlM WORKSHOP ON TRANSDUCERS AND MICRO/NANO TECHNOLOGIES. (Invited). 295-298 (2002)

[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Smart chip with selective micro-probes on Si(111) lC chips for detecting nerve potential"International Conference on Smart Materials, Structures and Systems ISSS-SPlE2002. (Invited). 302-309 (2002)

[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Selectively Grown Si Micro-Probe Array Chip on Si(111) with Signal Processing Circuits"2003 RCIQE lnternational Seminar on "Quantum Nanoelectronics for Meme-Media-Based lnformation Technologies". (Invited). 92-99 (2002)

[Publications] M.Ishida, T.Kawano, H.Takao, K.Sawada: "Smart microchip for detecting cell potential using Si micro-probes selectively grown on IC ships"Second International Conference on Molecular Electronics and Bioelectronics(M&BE2). (Invited). 139 (2003)

[Publications] Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Vapor-liquid-solid Graon Si Probe Array Chip for Penetrating and Recording in the Nervous System"The 19th Sensor Symposium on the IEEJ. 487-490 (2002)

[Publications] Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Mitsuaki Ahiki, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Signal Conditioning CMOS Circuit Integrated on Si (111) for Neutral Activity Image Recording"The 19th Sensor Symposium on the IEEJ. 421-424 (2002)

[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Multichannel 3D Si Micro-Probe Array on MOSFET Circuits to Record Response Cell in retina"The Japan Society of Applied Physics (The 63rd Spring meeting). 3. 1153 (2002)

[Publications] Hiroshi Ishino, Takeshi Kawano, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication of low resistance VLS micro-Si probe using Au-Sb alloy for neural activity recording"The Japan Society of Applied Physics (The 63rd Spring meeting). No.3. 1153 (2002)

[Publications] Takeshi Kawano, Yoshiko Kato Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Electrical Properties of n-channel MOSFETs for On-chip Circuits of Smart Neural Recording Sensor"The Japan Society of Applied Physics (The 50rd Spring meeting). 3. 1393 (2003)

[Publications] Hiroshi Ishino, Takeshi Kawano, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Fabrication of low resistance micro-Si probe using in-situ doping VLS growth for neural activity recording"The Japan Society of Applied Physics (The 50rd Spring meeting). 3. 1393 (2003)

石田誠豊橋技術科学大学, 工学部, 教授 (30126924)