2003 Fiscal Year Annual Research Report

集積回路上への選択成長極微細シリコンプローブによるスマート・マイクロチップ

Research Project

Project/Area Number	14205044
Research Institution	Toyohashi University of Technology
Principal Investigator	石田誠豊橋技術科学大学, 工学部, 教授 (30126924)
Co-Investigator(Kenkyū-buntansha)	高尾英邦豊橋技術科学大学, 工学部, 助手 (40314091) 澤田和明豊橋技術科学大学, 工学部, 助教授 (40235461)
Keywords	スマートチップ / 微細針電極 / 単結晶シリコンプローブアレイ / VLS選択成長 / 細胞電位計測 / 網膜、脳科学 / MOSFET on Si(111) / マイクロ・ナノテクノロジー
Research Abstract	生体・生理工学、脳科学の分野において、究極の研究対象は多数細胞の電位分布取得による脳・各種神経系の解析である。しかし、現在市販されている細胞集団の電位記録用のマルチ(多)チャンネル電極は、電極サイズ、配列間隔共に非常に大きい。一方で、本研究で提案するSi(シリコン)プローブ電極アレイチップは、電極サイズ、間隔が既存技術の1/10を達成できる。更に、この電極は、同一基板上に信号処理回路の集積化が可能な利点が有る。この電極デバイスを実現するために本年度は、下記の要素技術の確立を行うことができた。 1.神経細胞の測定対象を鯉の網膜に絞り、これに適する60μm長、直径2〜3.5μmのSiプローブの選択VLS成長条件を確立した。また、これらSiプローブを実際にICプロセス後の基板上に製作した。 2.挿入型プローブを実現するため、プローブ低抵抗化、側面絶縁を行った。細胞測定において、生理溶液中の電極インピーダンスが低いことが重要であるが、これをプローブ先端に生体適合性のAu(金)を成膜することで実現した。得られたインピーダンスは、既存の電極と同等かそれ以下であった。 3.生理実験に適用するため、電極実装技術が必至である。実装において、チップ耐水性、絶縁性が問題となるが、これらを解決し更に実際の生理実験が容易となる構成とした。 4.実装したチップを生理溶液に浸し、細胞電位と同等の刺激信号を用いた記録実験を行った。細胞内電位の1/1000の微小な刺激電位(100μVpp、1kHz)においても、Siプローブにより電位記録可能であることを確認し、これよりSiプローブ電極チップの細胞電位記録用としての有用性を示すことが出来た。これらの結果は、次年度以降の計画にとって、非常に有益な結果であり今後の計画の推進が期待される。これらの研究成果を随時に学会、研究会等の場で公開しているが、特に生体工学、医用工学側からの反響が大きくなってきている。

Research Products
(14 results)

All Other

All Publications (14 results)

[Publications] Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording"Japanese Journal of Applied Physics. 42 part1・4B. 2473-2477 (2003)
[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays with On-chip MOSFETs on Si (111) Substrates"IEEE Transactions on Electron Devices. 51・3. 415-420 (2004)
[Publications] Takeshi Kawano, Yoshiko Kato, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Si Microprobe Array Growth after IC Process and Application to Neural Recoding Microchip"Technical Report of Information and Communication Engineering. 73-78 (2003)
[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Neuron Size Si Probe Array Fabricated on Integrated Circuits for Multichannel Electrode"The 12th International Conference on Solid-State Sensors and Actuators (Transducers'03). 2. 1679-1682 (2003)
[Publications] Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "CMOS Signal Processing Circuits on Si (111) for Neural Activity Image-Recording with Epitaxially Grown Micro-Si Probes"The 12th International Conference on Solid-State Sensors and Actuators (Transducers'03). 2. 1682-1690 (2003)
[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Neural Recording Chip with Penetrating Si Microprobe Array and Application to record Response from Cell in Retina"The 20th Sensor Symposium on the IEEJ. 339-342 (2003)
[Publications] Takeshi Kawano, Akito Ishihara, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Electrical Characteristics of VLS-Si Microprobes on Smart Microchip for Neural Recording Experiment"The Japan Society of Applied Physics (The 64rd Fall meeting). 3. 1191 (2003)
[Publications] Yoshiko Kato, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Si (111) CMOS Signal Detection Circuit for Integrated Micro Si Probe Chip"Technical Report of Information and Communication Engineering. 1-6 (2003)
[Publications] Makoto Ishida, Takeshi Kawano, Akito Ishihara, Hidekuni Takao, Kazuaki Sawada: "Multi-recording using Penetrating Si Microprobe Array Sensor (Invited)"The 18th Symposium on Biological and Physiological Engineering. 181-184 (2003)
[Publications] Takeshi Kawano: "Penetrating Si Microprobe Array Sensor Chip for Neural Activity Recording"Japan Society of Next Generation Sensor Technology. 7-10 (2003)
[Publications] Makoto Ishida, Takeshi Kawano, Yoshiko Kato, Hidekuni Takao, Kazuaki Sawada: "Smart Microchips for Intelligent Human Sensing (Invited)"Twelfth International Workshop on The Physics of Semiconductor Devices. 2. 661-666 (2003)
[Publications] Makoto Ishida: "Smart Microchips for Bio-Medical Applications (Invited)"Second Joint Congress -KENSA 2003- The 43rd Annual Meeting of the Japan Society of Clinical Chemistry (JSCC), The 50th National Congress of the Japanese Society of Laboratory Medicine (JSLM). 51 (2003)
[Publications] Naoki Funagayama, Takeshi Kawano, Hiroshi Ishino, Hidekuni Takao Kazuaki Sawada, Makoto Ishida: "Improvement of electrical properties of Si microprobe electrode arrays for neural recording"The Japan Society of Applied Physics (The 51rd Spring meeting). 3. 1438 (2004)
[Publications] Takeshi Kawano, Hiroshi Ishino, Naoki Funagayama, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Package of Si microprobe array chip for recording light evoked retinal neurons"The Japan Society of Applied Physics (The 51rd Spring meeting). 3. 1438 (2004)

2003 Fiscal Year Annual Research Report

集積回路上への選択成長極微細シリコンプローブによるスマート・マイクロチップ

Principal Investigator

石田 誠 豊橋技術科学大学, 工学部, 教授 (30126924)

Research Products

[Publications] Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording"Japanese Journal of Applied Physics. 42 part1・4B. 2473-2477 (2003)

[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays with On-chip MOSFETs on Si (111) Substrates"IEEE Transactions on Electron Devices. 51・3. 415-420 (2004)

[Publications] Takeshi Kawano, Yoshiko Kato, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Si Microprobe Array Growth after IC Process and Application to Neural Recoding Microchip"Technical Report of Information and Communication Engineering. 73-78 (2003)

[Publications] Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Neural Recording Chip with Penetrating Si Microprobe Array and Application to record Response from Cell in Retina"The 20th Sensor Symposium on the IEEJ. 339-342 (2003)

[Publications] Takeshi Kawano, Akito Ishihara, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Electrical Characteristics of VLS-Si Microprobes on Smart Microchip for Neural Recording Experiment"The Japan Society of Applied Physics (The 64rd Fall meeting). 3. 1191 (2003)

[Publications] Yoshiko Kato, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Si (111) CMOS Signal Detection Circuit for Integrated Micro Si Probe Chip"Technical Report of Information and Communication Engineering. 1-6 (2003)

[Publications] Makoto Ishida, Takeshi Kawano, Akito Ishihara, Hidekuni Takao, Kazuaki Sawada: "Multi-recording using Penetrating Si Microprobe Array Sensor (Invited)"The 18th Symposium on Biological and Physiological Engineering. 181-184 (2003)

[Publications] Takeshi Kawano: "Penetrating Si Microprobe Array Sensor Chip for Neural Activity Recording"Japan Society of Next Generation Sensor Technology. 7-10 (2003)

[Publications] Makoto Ishida, Takeshi Kawano, Yoshiko Kato, Hidekuni Takao, Kazuaki Sawada: "Smart Microchips for Intelligent Human Sensing (Invited)"Twelfth International Workshop on The Physics of Semiconductor Devices. 2. 661-666 (2003)

[Publications] Makoto Ishida: "Smart Microchips for Bio-Medical Applications (Invited)"Second Joint Congress -KENSA 2003- The 43rd Annual Meeting of the Japan Society of Clinical Chemistry (JSCC), The 50th National Congress of the Japanese Society of Laboratory Medicine (JSLM). 51 (2003)

[Publications] Naoki Funagayama, Takeshi Kawano, Hiroshi Ishino, Hidekuni Takao Kazuaki Sawada, Makoto Ishida: "Improvement of electrical properties of Si microprobe electrode arrays for neural recording"The Japan Society of Applied Physics (The 51rd Spring meeting). 3. 1438 (2004)

[Publications] Takeshi Kawano, Hiroshi Ishino, Naoki Funagayama, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida: "Package of Si microprobe array chip for recording light evoked retinal neurons"The Japan Society of Applied Physics (The 51rd Spring meeting). 3. 1438 (2004)

石田誠豊橋技術科学大学, 工学部, 教授 (30126924)