2003 Fiscal Year Final Research Report Summary
Fundamental technology for nano-device fabrication utilizing nanocomposite substrates
| Project/Area Number |
14350362
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Composite materials/Physical properties
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| Research Institution | National Institute of Advanced Industrial Science and Technology (AIST) |
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Principal Investigator |
KOSHIZAKI Naoto National Institute of Advanced Industrial Science and Technology (AIST), Nanoarchitectonics Research Center, Leader, 界面ナノアーキテクトニクス研究センター・高密度界面ナノ構造チーム, 研究チーム長 (40344197)
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| Co-Investigator(Kenkyū-buntansha) |
TERASHIMA Kazuo The University of Tokyo, Graduate School of Frontier Sciences, Associate Professor, 大学院・新領域創成科学研究科, 助教授 (30176911)
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| Project Period (FY) |
2002 – 2003
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| Keywords | Nanocomposite / Nanodevice / Substrate / Carbon Nanotube / Microplasma / Low temperature / Catalyst / Supercritical fluid plasma |
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| Research Abstract |
Final goal of this study is to develop fundamental technology for nano-device fabrication utilizing precisely controlled nanocomposite substrates and microplasma technology. We applied these techniques to carbon nanotube (CNT) fabrication and studied low-temperature processing technique for inorganic nano-parts aiming for future part-to-part contact in nanodevice.
(1)Carbon nanotube array fabrication on nanocomposite thin film substrates
We succeeded in fabrication of forest-like CNT al-rays by plasma-enhanced chemical vapor deposition method using nanocomposite substrate composed of nickel metal as a catalyst for CNT growth and inert substances such as Mo, TiO_2 and SiO_2. Such CNT arrays have twice higher field emission current compared to simple CNT arrays, suggesting the possibility of a self-sustainable and long-life field emission device. Nanocomposite substrate is also applied for a substrate organic molecular arrangement.
(2) Basic technology for nano-wiring utilizing microplasma
We tried to fabricate CNTs at low temperature under atmospheric pressure using a microplasma confined in small space. CNTs were successfully formed under the atmospheric pressure without substrate heating by introducing CH_4 as a raw material and Fe-containing substance as a catalyst into a microplasma in a glass capillary whose diameter is less than 100 micron. At this stage, CNTs were formed on metal wire inserted into the capillary for ignition or on inner surface of glass capillary. We are planning to improve this technique to be able to deposit CNT at any arbitrary position.
We also developed a new technique, laser ablation in liquid media, for high quality nanoparticle preparation.
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Research Products
(29 results)
