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2003 Fiscal Year Final Research Report Summary

Study on piezoelectric actuator with sensor

Research Project

Project/Area Number 14550409
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionAkita University

Principal Investigator

IMANO Kazuhiko  Akita University, Faculty of Resource Sci & Eng, Professor, 工学資源学部, 教授 (60125705)

Project Period (FY) 2002 – 2003
KeywordsPiezoelectric vibrator / Air-coupled ultrasonic wave / Sensor / measurement of displacement / reference signal
Research Abstract

A measurement method for displacement of micrometer-order using ultrasonic wave of 40kHz in air is newly proposed and evaluated experimentally. The displacement of an reflector is measured from the phase difference φ between the transmitting and received ultrasonic wave signals using a single transducer by reflection method. For detection of displacement under a thousandth of wavelength ~of ultrasonic wave, a novel measurement method of the phase difference φ between the transmitting and received signals is described. The reference signals, of which the number is N, are introduced in this method. The reference signals are locked in the transmitting signal to constant phase differences θ_i(i=0,1,2,...,N) within the range of 0 to 2π. The phase differences ψ_i(i=0,1,2,...,N) between the received signal from the transducer and the reference signals are obtained by phase detection. The displacement is calculated from the phase difference φ which is estimated by the least squares method with the phase differences ψ_i. The displacement measurements based on our method were carried out using ultrasonic wave of 40kHz in air with piezoelectric ceramic transducer. The displacement of 1μm steps of the reflector, which can be translated with 10nm-order accuracy by mechanical translation stage, is measured. The relation ship between the displacement of the reflector and the measured displacement shows good linearity. The displacement measurements have resolution 40nm with the reference signals(N=12). Without a transducer in MHz range, our method having the resolution of 1μm on the displacement measurement with air-coupled ultrasonic transducer of 40kHz is useful

  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] 今野和彦, 西平守正, 濱口大輔, 福田誠: "連続波超音波を用いた固体試料の音速測定とその補正法"素材物性学雑誌. 16. 54-59 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Fukuda, M.Nishihira, K.Imano: "Application of a Double-Layered Piezoelectric Transducer in the Gene-ration of Short Ultrasonic Pulses"Jpn.J.Appl.Phys.. 43, No.5B(印刷中). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Sasaki, M.Nishihira, K.Imano: "Sub-Micrometer Order Displacement Measurements Using an Air-Coupled Ultrasonic Transducer at Frequencies of 40 and 400 kHz"Jpn.J.Appl.Phys.. 43, No.5B(印刷中). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kazuhiko Imano, Morimasa Nishihira, Daisuke Hamaguti, Makoto Fukuda: "A Method for Corrcting the Sound Velocity in Solid Using the Continuous Wave"Jour.Soc.Material Eng.Resource Jpn.. Vol.16,No.2. 54-59

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Makoto Fukuda, Morimasa Nishihira, Kazuhiko Imano: "Application of a Double-Layered Piezoelectric Transducer in the Generation of Short Ultrasonic Pulses"Jpn.J.Appl.Phys.. Vol.43,No.5B(in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Katsuhiro Sasaki, Morimasa Nishihira, Kazuhiko Imano: "Sub-Micrometer Order Displacements Using An Air-Coupled Ultrasonic Transducer at Frequency of 40kHz and 400kHz"Jpn.J.Appl.Phys.. Vol.43,No.5B(in press). (2004)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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