2003 Fiscal Year Annual Research Report

高圧力・高密度マイクロ波プラズマ源の開発とその大面積薄膜プロセスへの応用

Research Project

Project/Area Number	14580516
Research Institution	Shizuoka University
Principal Investigator	永津雅章静岡大学, 工学部, 教授 (20155948)
Co-Investigator(Kenkyū-buntansha)	菅井秀郎名古屋大学, 工学研究科, 教授 (40005517)
Keywords	マイクロ波プラズマ / プラズマCVD / ダイヤモンド薄膜 / カーボンナノチューブ / マイクロ波ランチャー / 電磁界解析 / アッシング
Research Abstract	最終年度の平成15年度では昨年度の研究成果を踏まえ、実験装置の大面積化を主な研究課題として、以下の研究項目を実施した (1)マイクロ波プラズマ装置の大面積化:平成14年度に設計した直径60cmの大口径プラズマ真空装置を製作し、また新しく開発した直径50cm内挿型同軸マイクロ波ランチャー(特許出願)を用いて大面積プラズマ生成実験を実施した。マイクロ波ランチャーの設計および構造の最適化には電磁界解析シミュレータMAFIAを用いて共振器型構造および開放型構造のランチャー形状に対して放射電磁界の解析を行い、プラズマ大面積化に関するマイクロ波ランチャー構造の設計指針を示した。 (2)大面積マイクロ波プラズマの生成:アルゴンあるいはヘリウムを用いたプラズマ生成実験を実施し、開放型ランチャーを用いたとき、マイクロ波パワー1kW、圧力約0.1Torrにおいて直径40cm以上にわたりほぼ均一な大面積プラズマが生成できることを示した。 (3)大面積プラズマ装置の各種応用:マイクロ波プラズマのプラズマCVDへの応用として、直径40cmの表面波プラズマ装置を用い、直径20cmにわたる大面積カーボンナノチューブの堆積実験を行い、空間的に均一性なナノチューブ合成が可能であることを示した。また、本研究の内容と異なるが、同装置の医療滅菌への応用についても併せて研究を実施し、高速かつ低温滅菌が可能であることを示し、その実用化の可能性を示した(外国特許出願)。 (4)高圧力マイクロ波プラズマ生成実験:2台のマイクロ波を用いた新しい高圧力マイクロ波プラズマ装置を開発し(特許出願)、プラズマ放電領域が従来のマイクロ波CVD装置に比べ、約2倍に拡大できることを示し、ダイヤモンド膜の大面積堆積が可能であることを示した。 (5)研究成果のまとめ:本研究に関連する成果は、学術論文に3件、著書3編、国際会議に11件、国内学会・研究会に20件発表し、国内特許出願2件、外国特許出願1件を行った。

Research Products

(21 results)

All Other

All Publications (21 results)

[Publications] M.Nagatsu: "Low-Temperature Sterilization with Surface-Wave-Excited Oxygen Plasma"Jpn.J.Appl.Phys.. Vol.42, No.7B. L856-L859 (2003)
[Publications] A.F.Bardamid: "The Prospect on the Use of Be mirrors in a Fusion Reactor with Be First Wall"Problems of Atomic Science and Technology, Series Plasma Physics. Vol.9, No.1. 52-55 (2003)
[Publications] M.Nagatsu: "Large-Area Microwave Plasma Device Using Internally Mounted Planar Launcher"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 31 (2003)
[Publications] M.Nagatsu: "Characteristics of Low-Temperature Sterilization Using Surface Wave Plasma"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 131 (2003)
[Publications] M.Nagatsu: "Production of Large-Area Microwave Plasma and its Application to Plasma CVD"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 107 (2003)
[Publications] J.Maeda: "Microwave Plasma CVD Reactor for Diamond Film Synthesis with Double Microwave Launchers System"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 157-158 (2003)
[Publications] M.Nagatsu: "Experimental Study of Low-Temperature Sterilization Using Surface Wave Plasma Excited by a 2.45 GHz Microwave"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 205-206 (2003)
[Publications] S.Kurita: "Growth of Catalytic Metal Composed Amorphous Carbon Films and Carbon Nanotube Using Large-Area Surface-Wave Plasma"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 161-162 (2003)
[Publications] M.Nagatsu: "Diamond Film Synthesis Using Microwave Plasma CVD Combined with Hot Filament Technique"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.1 (2003)
[Publications] M.Nagatsu: "New Microwave Plasma CVD Device for Diamond Film Synthesis Using Two-Oscillators System"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.6 (2003)
[Publications] M.Nagatsu: "Characterisation of Catalytic Metal Composed Carbon Films Prepared with Large-Area Surface-Wave Plasma"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.3.9 (2003)
[Publications] T.Sugie: "Irradiation Test on Mo- and W-Mirrors by Low Energy Deuterium Ions for ITER"J.Nuclear Materials. (掲載予定). (2004)
[Publications] K.Naito: "Field Analysis of Internally Mounted Planar Microwave Launcher and Its Characteristics of Plasma Production"Proc.of 21^<st> Symposium of Plasma Processing. 82-83 (2004)
[Publications] S.Kurita: "Production of Amorphous Carbon Coated Nanotubes Using Surface-Wave Plasma CVD and Their Field Emission Characteristics"Proc.of 21^<st> Symposium of Plasma Processing. 144-145 (2004)
[Publications] J.Maeda: "Diamond Film Synthesis Using Microwave Plasma CVD Reactor with Double Launchers System"Proc.of 21^<st> Symposium of Plasma Processing. 146-147 (2004)
[Publications] F.Terashita: "Measurement of Survival Curves in Microwave Plasma Sterilization Using Colony Count Technique"Proc.of 21^<st> Symposium of Plasma Processing. 266-267 (2004)
[Publications] M.Nagatsu: "Novel Microwave Plasma Reactor with Two Microwave Oscillators for Nano-Crystalline Diamond Film Synthesis"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 63 (2004)
[Publications] M.Nagatsu: "Field Emission Performance of Carbon Nanotube Overcoated with Amorphous Carbon Film Prepared with Surface-wave Plasma"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 66 (2004)
[Publications] 電気学会・マイクロ波プラズマ調査専門委員会編(分担執筆): "マイクロ波プラズマの技術"オーム社. 272 (2003)
[Publications] プラズマ・核融合学会編(分担執筆): "プラズマの生成と診断 -応用への道-"コロナ社. 456 (2003)
[Publications] A.Ohl 編著 (分担執筆): "Vth Int.Workshop on Microwave Discharges : Fundamentals and Applications"Institute for Niedertemperature-Plasmaphysik Kiebu-Druck GmbH. 272 (2003)

2003 Fiscal Year Annual Research Report

高圧力・高密度マイクロ波プラズマ源の開発とその大面積薄膜プロセスへの応用

Principal Investigator

永津 雅章 静岡大学, 工学部, 教授 (20155948)

Research Products

[Publications] M.Nagatsu: "Low-Temperature Sterilization with Surface-Wave-Excited Oxygen Plasma"Jpn.J.Appl.Phys.. Vol.42, No.7B. L856-L859 (2003)

[Publications] A.F.Bardamid: "The Prospect on the Use of Be mirrors in a Fusion Reactor with Be First Wall"Problems of Atomic Science and Technology, Series Plasma Physics. Vol.9, No.1. 52-55 (2003)

[Publications] M.Nagatsu: "Large-Area Microwave Plasma Device Using Internally Mounted Planar Launcher"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 31 (2003)

[Publications] M.Nagatsu: "Characteristics of Low-Temperature Sterilization Using Surface Wave Plasma"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 131 (2003)

[Publications] M.Nagatsu: "Production of Large-Area Microwave Plasma and its Application to Plasma CVD"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 107 (2003)

[Publications] J.Maeda: "Microwave Plasma CVD Reactor for Diamond Film Synthesis with Double Microwave Launchers System"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 157-158 (2003)

[Publications] M.Nagatsu: "Experimental Study of Low-Temperature Sterilization Using Surface Wave Plasma Excited by a 2.45 GHz Microwave"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 205-206 (2003)

[Publications] S.Kurita: "Growth of Catalytic Metal Composed Amorphous Carbon Films and Carbon Nanotube Using Large-Area Surface-Wave Plasma"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 161-162 (2003)

[Publications] M.Nagatsu: "Diamond Film Synthesis Using Microwave Plasma CVD Combined with Hot Filament Technique"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.1 (2003)

[Publications] M.Nagatsu: "New Microwave Plasma CVD Device for Diamond Film Synthesis Using Two-Oscillators System"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.6 (2003)

[Publications] M.Nagatsu: "Characterisation of Catalytic Metal Composed Carbon Films Prepared with Large-Area Surface-Wave Plasma"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.3.9 (2003)

[Publications] T.Sugie: "Irradiation Test on Mo- and W-Mirrors by Low Energy Deuterium Ions for ITER"J.Nuclear Materials. (掲載予定). (2004)

[Publications] K.Naito: "Field Analysis of Internally Mounted Planar Microwave Launcher and Its Characteristics of Plasma Production"Proc.of 21^<st> Symposium of Plasma Processing. 82-83 (2004)

[Publications] S.Kurita: "Production of Amorphous Carbon Coated Nanotubes Using Surface-Wave Plasma CVD and Their Field Emission Characteristics"Proc.of 21^<st> Symposium of Plasma Processing. 144-145 (2004)

[Publications] J.Maeda: "Diamond Film Synthesis Using Microwave Plasma CVD Reactor with Double Launchers System"Proc.of 21^<st> Symposium of Plasma Processing. 146-147 (2004)

[Publications] F.Terashita: "Measurement of Survival Curves in Microwave Plasma Sterilization Using Colony Count Technique"Proc.of 21^<st> Symposium of Plasma Processing. 266-267 (2004)

[Publications] M.Nagatsu: "Novel Microwave Plasma Reactor with Two Microwave Oscillators for Nano-Crystalline Diamond Film Synthesis"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 63 (2004)

[Publications] M.Nagatsu: "Field Emission Performance of Carbon Nanotube Overcoated with Amorphous Carbon Film Prepared with Surface-wave Plasma"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 66 (2004)

[Publications] 電気学会・マイクロ波プラズマ調査専門委員会編(分担執筆): "マイクロ波プラズマの技術"オーム社. 272 (2003)

[Publications] プラズマ・核融合学会編(分担執筆): "プラズマの生成と診断 -応用への道-"コロナ社. 456 (2003)

[Publications] A.Ohl 編著 (分担執筆): "Vth Int.Workshop on Microwave Discharges : Fundamentals and Applications"Institute for Niedertemperature-Plasmaphysik Kiebu-Druck GmbH. 272 (2003)

永津雅章静岡大学, 工学部, 教授 (20155948)