2003 Fiscal Year Final Research Report Summary
A high spatial resolution observation and its quantification of an oxygen radical
| Project/Area Number |
14580524
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
プラズマ理工学
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| Research Institution | Musashi Institute of Technology |
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Principal Investigator |
ONO Shigeru Musashi Institute of Technology, Electrical Engineering, Professor, 工学部, 教授 (80097170)
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| Co-Investigator(Kenkyū-buntansha) |
TEII Shinriki Musashi Institute of Technology, Electrical Engineering, Professor, 工学部, 教授 (70061512)
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| Project Period (FY) |
2002 – 2003
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| Keywords | Platinum / Oxygen radical / Gas temperature / Recombination / Plasma / Positive column / Catalytic action / Dissociative recombination |
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| Research Abstract |
Study for measuring the oxygen radical density in the plasma by proper accuracy and high spatial resolution in the Heisei 14 to 15 fiscal year has been done. The outline is as follows.
(1) Establishment of the quantitive measuring method of an oxygen radical density
Since heat up of a platinum wire was based on the surface recombination of an oxygen radical, the oxygen radical density was deduced from the temperature of the platinum wire. As a result of comparing this result with the result of the measurement by a mass spectrometer, good agreement was obtained and it became. clear that an oxygen radical density could be measured from the temperature of the platinum wire.
(2) Investigation about the effect of gas temperature on measurement
When measuring the oxygen radical of lower density comparatively, the temperature changes of the platinum wire are small and effect of-the gas temperature of the surroundings of the platinum wire may be unable to ignore them. In order to solve this, as a result of also measuring gas temperature simultaneously and considering the effect, it became clear that, effect is small in many cases.
(3) Establishment of a lower density oxygen radical density measurement method
By maintaining the platinum wire at the temperature zone where it applies an electric current to a platinum wire, and a catalytic action occurs actively, the sensitivity lowering at the time of lower density was able to be prevented.
(4) The test of high spatial resolution measurement
With this method devised so far, the spatial distribution observation of the oxygen radical density in the plasma was tried. In the lower density region, it became clear that the about double figures radical density of lower density could also be measured conventionally, and the spatial distribution in a glass discharge tube has been measured.
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