2005 Fiscal Year Final Research Report Summary
Novel processing of photonic and electronic materials by use of tailored femtosecond laser pulses
| Project/Area Number |
15206011
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | KEIO UNIVERSITY |
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Principal Investigator |
OBARA Minoru Keio University, Faculty of Science and Technology, Professor, 理工学部, 教授 (90101998)
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| Co-Investigator(Kenkyū-buntansha) |
KANNARI Fumihiko Keio University, Faculty of Science and Technology, Professor, 理工学部, 教授 (40204804)
TSUDA Hiroyuki Keio University, Faculty of Science and Technology, Associate Professor, 理工学部, 助教授 (90327677)
SAIKI Toshiharu Keio University, Faculty of Science and Technology, Associate Professor, 理工学部, 助教授 (70261196)
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| Project Period (FY) |
2003 – 2005
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| Keywords | pulsewidth-tunable laser / femtosecond laser / optical waveguide fabrication / nano-particle mediated processing / void fabrication |
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| Research Abstract |
Novel laser processing of photonic and electronic materials with tailored femtosecond lasers has been demonstrated :
Double-Pulsed Femtosecond Laser Processing ;
(1)Using a double-pulsed femtosecond laser, unique ablation characteristics of fused quartz, sapphire, silicon and stainless steel have experimentally been demonstrated. The dependence of the delay time between the two pulses on the ablation characteristics is found to depend on the materials investigated. The ablation rate is decreased as the delay time is increased even within the electron-phonon relaxation time, and further decreased if the laser is strongly coupled with the laser produced plasma. The precise ablation processing of silicon substrate is demonstrated with double-pulsed femtosecond lasers in the delay time range of 30 ps to 100 ps.
2)As for the fabrication of void in transparent materials, the pulse number dependence of void array length is experimentally investigated. The larger voids are fabricated with double-pulsed femtosecond lasers than single pulsed femtosecond lasers at a constant total pulse energy.
(3)The low propagation loss optical waveguides are fabricated with double-pulsed femtosecond lasers.
Nano-Processing with 2D Array Transparent Nano-Particles as Template ;
(4)Sub-wavelength material processing mediated with sub-wavelength nano-particles has been demonstrated. The 2D array nano-holes have been fabricated on a silicon substrate.
(5)The nano-hole profile is well consistent with the optical intensity profile calculated with FDTD simulation.
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