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2005 Fiscal Year Final Research Report Summary

Study of nanostructure formation processes on thin film surfaces irradiated with femtosecond laser pulses and development of its physical model

Research Project

Project/Area Number 15360030
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

MIYAZAKI Kenzo  Kyoto University, Institute of Advanced Energy, Professor, エネルギー理工学研究所, 教授 (50293957)

Co-Investigator(Kenkyū-buntansha) YASUMARU Naoki  Fukui National College of Technology, Department o Mechanical Engineering, Professor, 機械工学科, 教授 (90158006)
Project Period (FY) 2003 – 2005
KeywordsFemtosecond laser / Laser ablation / Nanostructure formation / Surface modification / Hard thin films / Reflectivity / Pump-probe technique / Local field generation
Research Abstract

For the purposes of developing a new nanotechnology using femtosecond (fs) lasers, this research project was aiming at making clear experimental conditions and constructing a physical model for the periodic nanostructure formation and the selective change in bonding structure that we have recently found on hard thin films irradiated with fs laser pulses. The main results obtained are as follows.
・The nanostructure size observed was λ/10〜λ/5 of the laser wavelength λ when fs laser pulses were irradiated on the thin films such as TiN and diamond-like carbon (DLC) at a low fluence near ablation threshold. We have shown that the nanostructure and its size could be controlled with the laser polarization, wavelength and fluence.
・In addition, we have found that the DLC consisting of sp^3 and sp^2 can be modified into the conductive glassy carbon (GC) through the selective transition of sp^3 into sp^2 under almost the same experimental condition as for the nanostructure formation.
・Reflectivity of DLC film surface was measured as a function of fluence and laser pulse shots. The results have shown that the reflectivity change is closely associated with the nanostructure formation, and that the superimposed laser shots and resulting incubation effect mainly contribute to the nanostructure formation.
・The reflectivity of DLC was also measured using a pump and probe technique. The results have shown a characteristic reflectivity change due to the formation of a grating on the surface, where the selective change in the bonding structure from sp^3 to sp^2 induces a swelling of the film surface.
・The measurements have demonstrated that the nanostructure formation on the DLC surface is certainly preceded by the change in the bonding structure.
・On the basis of the experimental results obtained we have been developing a physical model for the nanostructure formation that relies on a localized field created in the interaction.

  • Research Products

    (58 results)

All 2006 2005 2004 2003 Other

All Journal Article (54 results) Book (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Femtosecond-laser-induced nanostructure formation and surface modification on diamond-like carbon film2006

    • Author(s)
      G.Miyaji, et al.
    • Journal Title

      Electrochimica Acta (to be published)

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film2005

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Appl. Phys. A : Materials Science and Processing 80

      Pages: 17-21

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High-order harmonic generation from femtosecond-laser aligned N_2, O_2 and CO_2 molecules2005

    • Author(s)
      M.Kaku, et al.
    • Journal Title

      IQEC 2005 & CLEO-PR 2005 Technical Digest

      Pages: 1036-1037

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Frequency spectra in field-free revival structure of fs-laser-aligned molecules2005

    • Author(s)
      G.Miyaji, et al.
    • Journal Title

      IQEC 2005 & CLEO-PR 2005 Technical Digest

      Pages: 1038-1039

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Reflectivity change in femtosecond-laser-induced ablation of diamond-like carbon film2005

    • Author(s)
      G.Miyaji, et al.
    • Journal Title

      IQEC 2005 & CLEO-PR 2005 Technical Digest

      Pages: 1427-1428

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] フェムト秒レーザーによる硬質薄膜表面のナノ構造形成と制御2005

    • Author(s)
      安丸尚樹, 他
    • Journal Title

      レーザー研究 33

      Pages: 519-524

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Fluence dependence on femtosecond-laser-induced nanostructure formed on TiN and CrN2005

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Appl. Phys. A : Materials Science and Processing 81

      Pages: 933-937

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] フェムト秒レーザーアブレーションによるナノ構造形成と表面改質2005

    • Author(s)
      宮崎健創, 安丸尚樹
    • Journal Title

      未来材料 5,No.9

      Pages: 28-34

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Field-free alignment of molecules observed with high-order harmonic generation2005

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Phys. Rev. Lett. 95

      Pages: 243903-

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High-order harmonic generation from femtosecond laser-aligned molecules2005

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      Ultrafast Phenomena XIV (eds.T.Kobayashi et al.)(Springer, Berlin, 2005)

      Pages: 195-197

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Materials control with high-intensity femtosecond laser pulses. I. Ultrafast alignment of molecules and its real-time detection2005

    • Author(s)
      M.Kaku et al.
    • Journal Title

      Proc.2nd In.Symp. on Sustainable Energy System (Kyoto Univ., Kyoto, 2005)

      Pages: 127

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Materials control with high-intensity femtosecond laser pulses. II. Nanostructure formation and modification of hard thin films2005

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      Proc.2nd In.Symp.on Sustainable Energy System (Kyoto Univ., Kyoto, 2005)

      Pages: 128

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Reflectivity in femtosecond-laser- induced structural changes of diamond-like carbon film2005

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      Appl.Phys.A : Materials Science and Processing Vol.80

      Pages: 17-21

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High-Order Harmonic Generation from Femtosecond- Laser Aligned N_2,O_2 and CO_2 molecules2005

    • Author(s)
      M.Kaku et al.
    • Journal Title

      IQEC 2005 & CLEO-PR 2005, Technical Digest (Tokyo, 2005)

      Pages: 1036-1037

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Frequency spectra in field-free revival structure of fs-laser-aligned molecules2005

    • Author(s)
      G.Miyaji et al.
    • Journal Title

      IQEC 2005 & CLEO-PR 2005, Technical Digest (Tokyo, 2005)

      Pages: 1038-1039

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Reflectivity change in femtosecond-laser-induced ablation of diamond-like carbon film2005

    • Author(s)
      G.Miyaji et al.
    • Journal Title

      IQEC 2005 & CLEO-PR 2005, Technical Digest (Tokyo, 2005)

      Pages: 1427-1428

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Nanostructure formation on hard thin films surfaces and its control with femtosecond laser pulses2005

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      The Review of Laser Engineering (in Japanese) Vol.33

      Pages: 519-524

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fluence dependence on femtosecond-laser-induced nanostructure formed on TiN and CrN2005

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Appl.Phys.A : Materials Science and Processing Vol.81

      Pages: 933-937

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Nanostructure formation and surface modification with femtosecond laser ablation2005

    • Author(s)
      K.Miyazaki, N.Yasumaru
    • Journal Title

      Expected Materials for Future (in Japanese) Vol.5 No.9

      Pages: 28-34

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Field-Free Alignment of Molecules Observed with High-Order Harmonic Generation2005

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      Phys.Rev.Lett. Vol.95 No.24

      Pages: 243903

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Femtosecond-laser-induced alignment in Coulomb explosion of N_22004

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      J. Phys. B : At. Mol. Opt. Phys 37

      Pages: 753-761

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Observation of revival structure in femtosecond-laser-induced alignment of N_2 with high-order harmonic generation2004

    • Author(s)
      M.Kaku, et al.i
    • Journal Title

      Japanese J. Appl. Phys. 43

      Pages: L591-L593

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Glassy carbon layer formed in diamond-like carbon films with femtosecond laser pulses2004

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Appl. Phys. A : Materials Science and Processing 79

      Pages: 425-427

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High-order harmonic generation from molecules spatially aligned by femtosecond laser pulses2004

    • Author(s)
      M.Kaku, et al.
    • Journal Title

      The 4th Asian Pacific Laser Symposium 2004 Proceeding

      Pages: ThE-B7/1-4

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Femtosecond-laser-induced strucural change of diamond-like carbon film2004

    • Author(s)
      N.Maekawa, et al.
    • Journal Title

      The 4th Asian Pacific Laser Symposium 2004 Proceeding

      Pages: ThP06/1-4

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Nanoscale modification of DLC film surfaces with femtosecond laser pulses2004

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Proceedings of SPIE 5662

      Pages: 755-759

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High-order harmonic generation from femtosecond laser-aligned molecules2004

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Technical Digest of the 14th International Conference on Ultrafast Phenomena

      Pages: ME30/1-3

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Materials control with high-intensity femtosecond laser pulses. I. Ultrafast alignment of molecules and its real-time detection2004

    • Author(s)
      M.Kaku, et al.
    • Journal Title

      Proceedings of the 2nd International Symposium on Sustainable Energy System

      Pages: 127-

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Materials control with high-intensity femtosecond laser pulses. II. Nanostructure formation and modification of hard thin films2004

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Proceedings of the 2nd International Symposium on Sustainable Energy System

      Pages: 128-

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Femtosecond-laser-induced alignment in Coulomb explosion of N_22004

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      J.Phys.B : At.Mol.Opt.Phys. Vol.37

      Pages: 753-761

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Observation of revival structure in femtosecond-laser-induced alignment of N_2 with high-order harmonic generation2004

    • Author(s)
      M.Kaku et al.
    • Journal Title

      Jpn.J.Appl.Phys. Vol.43-4B

      Pages: L591-L593

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Glassy carbon layer formed in diamond-like carbon films with femtosecond laser pulses2004

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Appl.Phys.A, Materials Science and Processing, Vol.79

      Pages: 425-427

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High-order harmonic generation from molecules spatially aligned by femtosecond laser pulses2004

    • Author(s)
      M.Kaku et al.
    • Journal Title

      4th Aisian Pacific Laser Symp.2004 Proceeding (Korea, 2004) ThE-B7

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Femtosecond-laser-induced strucural change of diamond-like carbon film2004

    • Author(s)
      N.Maekawa et al.
    • Journal Title

      4th Aisian Pacific Laser Symposium 2004 Proceeding (Korea, 2004) ThP06

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Nanoscale modification of DLC film surfaces with femtosecond laser pulses2004

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Proc.SPIE Vol.5662

      Pages: 755-759

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Femtosecond-Laser-Induced Manostructures Formed on Hard Coatings of TiN and DLC2003

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Proceedings of SPIE 4830

      Pages: 521-525

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High-intensity, ultrashort-pulse lasers for advanced material control2003

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Procceedngs of the first International Symposium on Sustainable Energy System

      Pages: 116-

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Femtosecond-laser-induced nanostructure formed in hard thin films of TiN and DLC2003

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Appl. Phys. A : Material Science & Processing 76

      Pages: 983-985

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Periodic nanostructures formed on hard thin films by femtosecond laser pulses2003

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Proceedings of The Third Asian Pacific Laser Symposium

      Pages: 594-597

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Coulomb explosion dynamics of nitrogen molecules with high-intensity femtosecond laser pulses2003

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Proceedings of The Third Asian Pacific Laser Symposium 68

      Pages: 322-325

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 高機能硬質膜のレーザー表面加工・改質技術の開発-フェムト秒レーザーによる光ナノ加工技術の開発と機能性薄膜への応用-2003

    • Author(s)
      安丸尚樹, 他
    • Journal Title

      テクノふくい No.68

      Pages: 20-22

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] レーザーによる硬質膜のレーザー表面の周期的ナノ構造の形成と制御2003

    • Author(s)
      安丸尚樹, 他
    • Journal Title

      レーザー学会第316回研究会報告 RTM-03-31-37

      Pages: 31-35

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Femtosecond-laser-induced alignment in Coulomb explosion of nitrogen molecules2003

    • Author(s)
      K.Miyazaki, et al.
    • Journal Title

      Proceedings of CLEO/Pacific Rim 2003

      Pages: 175-

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Periodic nanostructure formed on TiN and DLC by femtosecond laser pulses2003

    • Author(s)
      N.Yasumaru, et al.
    • Journal Title

      Proceedings of CLEO/Pacific Rim 2003

      Pages: 665-

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Femtosecond-Laser-Induced Nanostructures Formed on Hard Coatings of TiN and DLC2003

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Proc.of SPIE Vol.4830

      Pages: 521-525

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High-intensity, ultrashort-pulse lasers for advanced material control2003

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      The first Int.Symp.on Sustainable Energy System, 21 COE, Proc.(Kyoto Univ., Kyoto, 2003)

      Pages: 116

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Femtosecond-laser-induced nanostructure formed in hard thin films of TiN and DLC2003

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Appl.Phys. A : Material Science & Processing Vol.76

      Pages: 983-985

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Periodic nanostructures formed on hard thin films by femtosecond laser pulses2003

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Proc.3rd Asian Pacific Laser Symp.(Laser Soc.Japan, Osaka, Feb., 2003)

      Pages: 594-597

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Coulomb explosion dynamics of nitrogen molecules with high-intensity femtosecond laser pulses2003

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      Proc.3rd Asian Pacific Laser Symposium (Laser Soc.Japan, Osaka, 2003)

      Pages: 322-325

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of laser technology for surface processing and modification of functional thin films : development of nano-processing with a femtosecond laser and its application to functional thin films2003

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Techno-FUKUI (in Japanese) No.68

      Pages: 20-22

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Periodic nanostructure formation on hard thin films and its control with laser pulses2003

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      The 316th Seminar of the Laser Sciety of Japan, Repor (in Japanese) No.RTM-03-31-37

      Pages: 31-35

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Femtosecond-laser- induced alignment in Coulomb explosion of nitrogen molecules2003

    • Author(s)
      K.Miyazaki et al.
    • Journal Title

      Proc.CLEO/Pacific Rim 2003 (Nat.Taiwan Unv.Taipei, 2003)

      Pages: 175

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Periodic nanostructure formed on TiN and DLC by femtosecond laser pulses2003

    • Author(s)
      N.Yasumaru et al.
    • Journal Title

      Proc.CLEO/Pacific Rim 2003 (Nat.Taiwan Unv.Taipei, 2003)

      Pages: 665

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Femtosecond-laser-induced nanostructure formation and surface modification on diamond-like carbon film

    • Author(s)
      G.Miyaji et al.
    • Journal Title

      Electrochimica Acta (to be published)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Book] High-order harmonic generation from femtosecond laser-aligned molecules, in Ultrafast Phenomena XIV (eds.,T.Kobayashi, et al.)pp.195-197.2005

    • Author(s)
      K.Miyazaki, et al.
    • Total Pages
      907
    • Publisher
      Springer-Verlag(Berlin)
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] High-intensity ultrashort pulse lasers, in Advanced Energy Science and Technology (Kyoto University 21 COE Program, 2005) Chap.8, pp.168-180.2005

    • Author(s)
      K.Miyazaki
    • Total Pages
      180
    • Publisher
      Graduate School of Energy Science, Kyoto University
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 摺動材及びその製造方法2005

    • Inventor(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Industrial Property Rights Holder
      JST アイテック
    • Industrial Property Number
      特願2005-357064
    • Filing Date
      2005-12-12
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 炭素薄膜構造並びに炭素薄膜の加工方法及び製造方法2003

    • Inventor(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Industrial Property Rights Holder
      JST アイテック
    • Industrial Property Number
      特願2003-368423 特開2005-133129
    • Filing Date
      2003-10-29
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2007-12-13  

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