2004 Fiscal Year Final Research Report Summary
Aspherical Mirror Polishing with Water and Excimer Laser
| Project/Area Number |
15360034
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | Tokai University |
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Principal Investigator |
MURAHARA Masataka Tokai University, Dept.of Electronics and Electrics, Professor, 電子情報学部, 教授 (40166301)
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| Co-Investigator(Kenkyū-buntansha) |
OHYAMA Ryuichiro Tokai University, Dept.of Electronics and Electrics, Associate Professor, 電子情報学部, 助教授 (40233291)
YOSHIDA Kunio Osaka Institute of Technology, Engineering Dept., Professor, 工学部, 教授 (70029338)
OKAMOTO Takayuki Okamoto Optic Co.Ltd., President, 社長
KUZUU Nobu University of Fukui, Engineering Dept., Associate Professor, 工学部, 助教授 (70283158)
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| Project Period (FY) |
2003 – 2004
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| Keywords | Fused Silica Glass / Spot Contact Polishing / Teflon Lens / Silicone Oil / Strong Adhesion of Silica Glass at Room Temperature / Photochemical Surface Modification: Effect of Combined Use with Plasma / Asuherical Mirror Polishing Device / Micro Domain Structure |
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| Research Abstract |
To achieve highly precision polishing of any material or surface shape, the point contact polishing method with hydrofluoric acid produced by a light reaction has been developed : a convex teflon lens was put on the side ground in the presence of water, and a laser light was irradiated while rotating the teflon lens to induce a light reaction at the contact point of the sample surface, the teflon surface, and water, which produced the hydrofluoric acid. In order to carry it, silicone oil was used for bonding a fluoroplastic to a fused silica glass that composed the teflon lens, which is the first time in the world. The fluoroplastic surface was treated by plasma and had closer affinity with medicine temporarily, which was then exposed to ultraviolet rays to improve the adhesion strength. The surface modification efficiency, as a result, was increased by 1000 times or more. The ArF laser light was irradiated on the contact point of the teflon lens produced by the above method and the sample, and the face with 0.1 nm precision was yielded after polishing for ten minutes. This research of adhesion strength improvement took us time more than expected, and it will take us one or two more years to develop a polishing device and evaluate the capability the polished face in resisting laser damage.
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