• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

2004 Fiscal Year Final Research Report Summary

Electrostatic manipulation of a micro-object by controlling applied voltage

Research Project

Project/Area Number 15360133
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

ONZAWA Tadao  Tokyo Institute of Technology, Dept.of Mechanical and Control Engineering, Professor, 大学院・理工学研究科, 教授 (10016438)

Co-Investigator(Kenkyū-buntansha) TAKAHASHI Kunio  Tokyo Institute of Technology, Dept.of International Development Engineering, Associate Professor, 大学院・理工学研究科, 助教授 (70226827)
SAITO Shigeki  Tokyo Institute of Technology, Dept.of Mechanical and Aerospace Engineering, Associate Professor, 大学院・理工学研究科, 助教授 (30313349)
Project Period (FY) 2003 – 2004
Keywordselectrostatic force / adhesional force / micromanipulation / IC packaging / conductive micro-particle / Rapid voltage control / micro-object alignment / kinetic energy
Research Abstract

This project had aimed at establishing a technique of electrostatic micro-manipulation with high reliability. For that purpose, an optimal voltage as a time-dependent function was theoretically derived ; the effectiveness was demonstrated through the experiment by electrostatic micro-manipulator. The voltage function was determined so that the kinetic energy of a micro-object could be controlled during the flight after detachment from a probe-tip and become zero at landing on a substrate. Additionally, since the energy absorbed due to the adhesional hysteresis exists at the contact of the micro-object to the substrate, an allowable error of voltage for the energy absorption was evaluated. In order to realize the derived voltage function, a power source with high voltage and high-speed response was designed. With this power source, a solder ball with the diameter of 30 um was successfully deposited on the substrate after detachment from the probe-tip in the experiment of electrostatic micro-manipulation. These results theoretically and experimentally proved that this method can be applied to IC packaging or micro-device assembly.

  • Research Products

    (4 results)

All 2004 2003

All Journal Article (4 results)

  • [Journal Article] Non-impact Electrostatic Micromanipulation by Voltage Sequence for Time2004

    • Author(s)
      Shigeki Saito et al.
    • Journal Title

      Material Research Society Symposium Proceedings 782

      Pages: A.10.5.1-6

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Non-impact Electrostatic Micromanipulation by Voltage Sequence for Time2004

    • Author(s)
      Shigeki Saito, Kunio Takahashi, Masataka Urago
    • Journal Title

      Material Science Research Symposium Proceedings vol.782

      Pages: A.10.5.1-A.10.5.6

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Kinetic control of a particle by voltage sequence for a nonimpact electrostatic micromanipulation2003

    • Author(s)
      Shigeki Saito et al.
    • Journal Title

      Applied Physics Letters 83・10

      Pages: 2076-2078

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Kinetic control of a particle by voltage sequence for a nonimpact electrostatic micromanipulation2003

    • Author(s)
      Shigeki Saito, Hideo Himeno, Kunio Takahashi, Masataka Urago
    • Journal Title

      Applied Physics Letters vol.83, no.10

      Pages: 2076-2078

    • Description
      「研究成果報告書概要(欧文)」より

URL: 

Published: 2006-07-11  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi