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2005 Fiscal Year Final Research Report Summary

Development of High-Speed Dry Coating of Cu-Wiring Using Clean Metal-Arc Plasma

Research Project

Project/Area Number 15360189
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

SAKAKIBARA Tateki  Toyohashi University of Technology, Electrical and Electronic Engineering, Professor, 工学部, 教授 (10023243)

Co-Investigator(Kenkyū-buntansha) TAKIKAWA Hirofumi  Toyohashi University of Technology, Electrical and Electronic Engineering, Associate professor, 工学部, 助教授 (90226952)
Project Period (FY) 2003 – 2005
KeywordsCu wiring / Dry process / Vacuum arc deposition / Filtered arc with magnetic transportation / T-FAD / Multi-source gun / Plasma scanner / Large area coating
Research Abstract

The purpose of this project is that the development of principal technology of Cu-wiring film formation for LSI device tip by fry process using cathodic vacuum arc deposition, instead of current wet process of electroplating. In the cathodic vacuum arc deposition, solid metal is used as cathode of vacuum arc, the metal was directly evaporated by the cathode spot, and the film is plated by the ions in the metal vapor plasma without any gas. However ; the micron-order particles of cathode materials, so-called droplets, are also emitted from the cathode spot by its explosive phenomenon. The droplets have the film decreased unilbrmity and may block the wiring trench. The droplet should be removed from the processing vacuum are plasma. In this project, the vacuum arc deposition system with filtration of the droplets from the plasma using the technique of the arc plasma magnetically transporting through a bent duct. The principal outcomes are as follows.
1st year : A new filtered arc depositi … More on system with Y shape filter duct (Y-FAD) was roughly designed, in which the deposition speed was expected to be three times higher than that in a current T-shape filtered arc deposition system (T-FAD). In order to realize the large area deposition, high-throughput plasma-beam scanner using magnetic field was designed and made. The 100 mm diameter deposition with well uniformity was attained with the scanner.
2nd year: The detail of Y-FAD was deigned and partly manufactured. In order to improve the deposition rate, the method of applying the bias voltage to the plasma transportation duct (=filter duct) was examined. As a result, when the suitable duct bias was applied, it was found that the deposition rated increased twice to three times.
Last year : The Y-FAD with two cathode evaporating sources has finished building up and its performance was examined. As a result, it was revealed the new Y-FAD can provide enough high-deposition rate and wide-deposition area. Furthermore, it was found that the substrate temperature increased quickly due to high-speed deposition and the substrate needed to be cooled. Less

  • Research Products

    (12 results)

All 2005

All Journal Article (12 results)

  • [Journal Article] フィルタードアーク蒸着装置を用いたCu配線膜の成膜速度向上2005

    • Author(s)
      岩崎 康浩
    • Journal Title

      第66回応用物理学会学術講演会 7p・A・12

      Pages: 699

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Y字状フィルタードアーク蒸着装置の開発と銅配線膜の成膜2005

    • Author(s)
      彦坂 博紀
    • Journal Title

      電気学会放電研究会 ED-05-150

      Pages: 41-44

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Improvement of Deposition Rate in T-Shape Filtered Arc Deposition2005

    • Author(s)
      Y.Iwasaki
    • Journal Title

      Proceedings on PSS-2005/SPP-22

      Pages: 173-174

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] T字状フィルタードアーク蒸着におけるDLC膜成膜速度の向上2005

    • Author(s)
      岩崎 康浩
    • Journal Title

      プラズマ応用と複合機能材料 14

      Pages: 71-74

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Influence of Duct Bias on T-Shape Filtered Arc Deposition Apparatus2005

    • Author(s)
      Y.Iwasaki
    • Journal Title

      The 5th International Symposium on Applied Plasma Science PII・3

      Pages: 193-198

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 多層膜合成用T/クランク-ハイブリッドFADの開発2005

    • Author(s)
      彦坂 博紀
    • Journal Title

      電気学会プラズマ研究会 PST-05-84

      Pages: 55-59

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Improvement of Deposition Rate of Cu Film for Wiring in Filtered Arc Deposition2005

    • Author(s)
      Y.Iwasaki, H.Hikosaka, T.Takikawa, T.Sakakibara, Y.Hasegawa, N.Tsuji
    • Journal Title

      Extended Abstracts (The 66^<th> Autumn Meeting, 2005) ; The Japan Society of Applied Physics 7p-A-12

      Pages: 699

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of Y-shape Filtered Arc Deposition Apparatus and Cu Film Deposition for Wiring2005

    • Author(s)
      H.Hikosaka, Y.Iwasaki, H.Takikawa, T.Sakakibara, Y.Hasegawa, N.Tsuji
    • Journal Title

      The Papers of Technical Meeting on Electrical Discharges, IEE Japan ED-05-150

      Pages: 41-44

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Improvement of Deposition Rate in T-Shape Filtered Arc Deposition2005

    • Author(s)
      Y.Iwasaki, S.Minamisawa, H.Takikawa, G.C.Xu, T.Sakakibara, Y.Hasegawa
    • Journal Title

      Proceedings on PSS-2005 SPP-22

      Pages: 173-174

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Improvement of Deposition Rate of DLC Film in T-Shape Filtered Arc Depension2005

    • Author(s)
      Y.Iwasaki, S.Minamisawa, G.C.Xu, H.Takikawa, T.Sakakibara, Y.Hasegawa
    • Journal Title

      Plasma Application and Hybrid Functionally Materials 14

      Pages: 71-74

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Influence of Duct Bias on T-Shape Filtered Arc Deposition Apparatus2005

    • Author(s)
      Y.Iwasaki, S.Minamisawa, H.Takikawa, T.Sakakibara, Y.Hasegawa
    • Journal Title

      The 5^<th> International Symposium on Applied Plasma Science P II-3

      Pages: 193-198

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of T/Crank-Hybrid Filtered Arc Deposition Apparatus for multiplayer films2005

    • Author(s)
      H.Hikosaka, Y.Iwasaki, H.Takikawa, T.Sakakibara, Y.Hasegawa, N.Tsuji
    • Journal Title

      The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-05-84

      Pages: 55-59

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2007-12-13  

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