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2004 Fiscal Year Final Research Report Summary

Measurement of dynamics of plasma excited species on dielectric surface using waveguide type optical near field

Research Project

Project/Area Number 15540469
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionUniversity of Yamanashi

Principal Investigator

SAKURAI Takeki  University of Yamanashi, Department of Research Interdisciplinary Graduate School of Medicine and Engineering, Professor, 大学院・医学工学総合研究部, 教授 (00092841)

Project Period (FY) 2003 – 2004
KeywordsBarrier discharge / LiNbO_3 / Optical waveguide / Metastable excited atoms / Dielectric surface / Laser optical near field / Absorption
Research Abstract

In recent discharge applications, an interaction between excited species produced in plasma and dielectric surface is fundamentally important. A new technique using an waveguide type optical near field laser spectroscopy is developed to quantitatively observe the excited species on the dielectric surface in plasma.
1.An optical waveguide on LiNbO_3 crystal was produced by ion-exchanging method. Ion-exchange was performed with H_3PO_4 liquid in high temperature and an annealing in oxygen gas made it possible to reduce a transmission loss. From the comparison with theoretical analysis of waveguide, the optimum waveguide depth was determined to be 1.8 μm and the laser transmission in TM0 mode was suit for this experiment
2.Using LiNbO_3 with waveguide, a parallel plate barrier discharge device was constructed in a vacuum chamber. The discharge was produced with a pure Ar gas. Laser was incident to the waveguide from a coupling prizm and the optical near field appeared on the waveguide interacted with Ar metastable atoms in the vicinity of surface. After transmitting in the waveguide, the absorbed laser was detected. As a result of improvement of the optical system, the absorption signal due to metastables was obtained with a high S/N.
3.Ar metastable density on the dielectric surface was measured from the absorption signal as a function of Ar gas pressure up to 50 Torr and it was clear that the dependence on pressure was much different from the dependence of metastables in bulk plasma. The flux of metastables on the surface was estimated.
4.A new phenomenon such that the transmitted laser intensity considerably decreased in exponentially just after the discharge started was found experimentally. This phenomenon should be analyzed. This experimental technique must be mixed with a cross-beam type spectroscopic method in order to observe a dynamic behavior of excited species on the surface.

  • Research Products

    (20 results)

All 2005 2004 2003

All Journal Article (20 results)

  • [Journal Article] Characteristics of two-dimensional array-type barrier microdischarges operating at high pressures of inert gases2005

    • Author(s)
      T.Sakurai
    • Journal Title

      Jpn.J.Appl.Phys. 44-2(掲載予定)

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Characteristics of two-dimensional array-type barrier microdischarges operating at high pressures of inert gases.2005

    • Author(s)
      T.Sakurai
    • Journal Title

      Jpn.J.Appl.Phys. 44 (to be published)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] バリアー放電プラズマの誘電体近傍のミクロ観察2004

    • Author(s)
      櫻井 彪
    • Journal Title

      電気学会論文誌A 124

      Pages: 170-175

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Spectroscopic study on a thermoelectron-enhanced microplasma jet2004

    • Author(s)
      T.Ito
    • Journal Title

      J.Phys.D : Appl.Phys. 37

      Pages: 445-448

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 導波路型光近接場レーザー分光法によるバリアー放電壁面近傍励起種の計測2004

    • Author(s)
      岩下智史
    • Journal Title

      電気学会プラズマ研究会資料 PST-04-27

      Pages: 1-5

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] マイクロプラズマのミクロ光計測2004

    • Author(s)
      櫻井 彪
    • Journal Title

      O plus E 26,11

      Pages: 1333-1337

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Diagnostics and Simulation of Microplasmas2004

    • Author(s)
      K.Tachibana
    • Journal Title

      J.Plasma Fusion Res. 80,10

      Pages: 835-844

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Surface dynamics of metastable excited atoms in a barrier discharge measured by a cross-beam type LIEF2004

    • Author(s)
      T.Sakurai
    • Journal Title

      Proceed.of 8^<th> Intern.Conf.on Near-field Nano Optics and Related Tech., Seoul, Korea

      Pages: 281

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Characteristics of two-dimensional array-type microbarrier discharges for a VUV light source operating in high gas pressures2004

    • Author(s)
      T.Sakurai
    • Journal Title

      2^<nd> Intern.Workshop on Microplasmas, New Jersey, U.S.A.

      Pages: 54

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Spatial and temporal measurement of wall voltage in barrier discharges2004

    • Author(s)
      T.Sakurai
    • Journal Title

      2^<nd> Intern.Workshop on Microplasmas, New Jersey, U.S.A.

      Pages: 53

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Microobservation of plasma near the dielectric surface In a barrier discharge (in Japanese)2004

    • Author(s)
      T.Sakurai
    • Journal Title

      T.TEE Japan 124A

      Pages: 170-175

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Measurement of excited species near the wall surface in barrier discharges using optical waveguide type optical near field laser spectroscopy (in Japanese)2004

    • Author(s)
      T.Iwashita
    • Journal Title

      The paper of Technical Meeting on Plasma, IEE Japan PST-04-27

      Pages: 1-5

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Optical micromeasurement of microplasma (in Japanese)2004

    • Author(s)
      T.Sakurai
    • Journal Title

      O plus E 26, 11

      Pages: 1333

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Diagnostics and simulation of microplasma2004

    • Author(s)
      K.Tachibana
    • Journal Title

      J.Plasma Fusion Res. 80, 10

      Pages: 835

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Surface dynamics of metastable excited atoms in a barrier discharge measured by a cross-beam type LIEF2004

    • Author(s)
      T.Sakurai
    • Journal Title

      Proceed.of 8^<th> Intern.Conf.on Near-field Nano Optics and Related Tech., Seour, Korea 281

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Characteristics of two-dimensional array-type microbarrier discharges for a VUV light source operating in high gas pressures2004

    • Author(s)
      T.Sakurai
    • Journal Title

      2^<nd> Intern.Workshop on Microplasmas, New Jersey, U.S.A. 54

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Spatial and temporal measurement of wall voltage in barrier discharges2004

    • Author(s)
      T.Sakurai
    • Journal Title

      2^<nd> Intern.Workshop on Microplasmas, New Jersey, U.S.A. 53

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Measurement of wall voltage in barrier discharges using an electro-optic crystal2003

    • Author(s)
      K.Sugimoto
    • Journal Title

      J.Phys.D : Appl.Phys. 36

      Pages: 2887-2890

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Behaviors of Ar metastable atoms and charges on a wall in barrier discharges2003

    • Author(s)
      T.Sakurai
    • Journal Title

      Proceed.of the 11^<th> Intern.Symp.on Laser-aided Plasma Diagonostics, Grenoble, France

      Pages: 81

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Behaviors of Ar metastable atoms and charges on a wall in barrier discharges2003

    • Author(s)
      T.Sakurai
    • Journal Title

      Proceed.of the 11^<th> Intern.Symp.on Laser-aided Plasma Diagonostics, Grenoble, France 81

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2006-07-11  

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