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2006 Fiscal Year Final Research Report Summary

Spectro-ellipsometric Analysis of Periodically Structured Samples

Research Project

Project/Area Number 15560031
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionShizuoka University

Principal Investigator

YAMAGUCHI Tomuo  Shizuoka University, Research Institute of Electronics, Professor, 電子工学研究所, 教授 (40010938)

Project Period (FY) 2003 – 2006
Keywordsscatterometry / spectroellipsometry / periodic nano-structure / lithography / optical mesurement / rectangular array / periodic wire / magneto-optics
Research Abstract

1) Recent ultra fine structures in integrated circuits require new optical monitoring technology called optical scatterometry. In this research project, the scatterometry based on spectroscopic ellipsometry and also based on magneto-optic spectroscopy was applied to the analysis of periodically structured samples. In the theoretical calculations, coupled wave theory for gratings was introduced. Although integration circuits have a complicated structure, periodic structure is fabricated on a portion called teg for the monitoring of each lithography step.
2) Results on the spectroscopic ellipsometry : Rectangular gratings with 250 nm period and 500 nm depth with various width ratio fabricated on a fused quartz substrate using an electron beam lithography and similar gratings with 130 nm period fabricated on a Si surface were analyzed and showed a good correspondence with cross sectional SEM images. Rectangular Ta wires fabricated on a fused quartz substrate required barreled cross section in the analysis and correspond well with SEM images. Two dimensionally distributed circular holes with 94 nm diameter, 180 nm pitch and 100 nm depth fabricated on a Si surface were analyzed by keeping lattice parameters. Values of the diameter and the depth correspond well with the SEM image of the cross section.
3) Results on the magneto-optical spectroscopy: Nano-structures fabricated with ferromagnetic materials were analyzed. The magnetic nano-structure is aimed to monitor fabrication process of magneto-optic memory and magnetic random access memory (MRAM) and also aimed to study basic properties of magnetic nano-structure. They have anisotropic properties, so that optical response of magnetic nano-structure was summerized.

  • Research Products

    (31 results)

All 2007 2006 2005 2004

All Journal Article (31 results)

  • [Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2007

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Opt. Express 13

      Pages: 4651-4656

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Optics of anisotropic nanostructures2006

    • Author(s)
      K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Czech. J. Phys.(760)(9) 56・7

      Pages: 665-764

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006

    • Author(s)
      R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
    • Journal Title

      Intern. J. of Microwave and Opt. Technol.(759)(10) 1・2

      Pages: 905-909

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Total reflection ellipsometry of lamellar gratings2006

    • Author(s)
      J.Pistora, J.Vlcek, K.Watanabe, K.Postava, S.Visnovsky, R.Antos, T.Yamaguchi
    • Journal Title

      Intern. J. of Microwave and Opt. Technol.(757)(11) 1・2

      Pages: 910- 913

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Convergence properties of critical dimension measurementsby spectroscopic ellipsometry on gratings made of various materials2006

    • Author(s)
      R.Antos, J.Pistora, J.Mistrik, T.Yamaguchi, S.Yamaguchi., M.Horie, S.Visnovsky, Y.Otani
    • Journal Title

      J. Appl. Phys.(754)(12) 100

      Pages: 054906, 1-11

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
    • Journal Title

      J. Magn. Soc. Japan(756)(13) 30・6-2

      Pages: 630-636

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2006

    • Author(s)
      R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
    • Journal Title

      Trans. Magn. Soc. Japan 4

      Pages: 282-285

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Optics of anisotropic nanostructures2006

    • Author(s)
      K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Czech. J. Phys 56,7

      Pages: 665-764

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006

    • Author(s)
      R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
    • Journal Title

      International Journal of Microwave and Optical Technology 1,2

      Pages: 905-909

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Total reflection ellipsometry of lamellar gratings2006

    • Author(s)
      J.Pistora, J.Vlcek, K.Watanabe, K.Postava, S.Visnovsky, R.Antos, T.Yamaguchi
    • Journal Title

      International Journal of Microwave and Optical Technology 1,2

      Pages: 910-913

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials2006

    • Author(s)
      R.Antos, J.Pistora, J.Mistrik, T.Yamaguchi, S.Yamaguchi, M.Horie, S.Visnovsky, Y.Otani
    • Journal Title

      J. Appl. Phys. 100

      Pages: 054906

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
    • Journal Title

      J. Magn. Soc. Jpn. 30,6-2

      Pages: 630-636

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005

    • Author(s)
      R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
    • Journal Title

      J. Appl. Phys.(640)(3) 97

      Pages: 053107-1-7

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Generalized scatterometry of laterally patterned periodic nanostructures based on spectroscopic ellipsometry2005

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Reports of the Graduate School of Electronic Science and Technology(Shizuoka University)(705)(4) 26

      Pages: 55-61

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Spectroscopic ellipsometry on sinusoidal surface-relief gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
    • Journal Title

      Appl. Surf. Sci.(646)(5) 244 (1-4)

      Pages: 221-224

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Spectroscopic ellipsometry on lamellar gratings.2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
    • Journal Title

      Appl. Surf. Sci(647)(6) 244 (1-4)

      Pages: 225-229

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth- andf irst-diffraction orders2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Appl. Phys. Lett.(724)(7) 86

      Pages: 231101-1-3

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Optics Express(729)(8) 13・12

      Pages: 4651-4656

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Optical metrology of patterned magnetic structures : deep versus shallow gratings2005

    • Author(s)
      R.Antos, M.Veis, E.Liskova, M.Aoyama, J.Hamrle, T.Kimura, P.Gustafik, M.Horie, J.Mistrik, T.Yamaguchi, S.Visnovsky, N.Okamoto
    • Journal Title

      Proc. SPIE. (San Jose, Feb. 17-May 2005)(667)(14) 5752(国際会議プロシーディングス)

      Pages: 1050-1059

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Airy-like internal reflection series applied in scatterometry and simulations of gratings2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Horie, S.Visnovsky
    • Journal Title

      Proc. SPIE (Munich, 12-16 June 2005)(773)(15) 5858(国際会議プロシーディングス)

      Pages: 58580Y

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.Yamaguchi, M.Horie
    • Journal Title

      Proc. SPIE (Jena, 12-16 Sept. 2005)(772)(3) 5965(国際会議プロシーディングス)

      Pages: 59652B

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005

    • Author(s)
      R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
    • Journal Title

      J. Appl. Phys. 97

      Pages: 053107

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Generalized scatterometry of laterally patterned periodic nanostructures based on spectroscopic ellipsometry2005

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, S.Visnovsky, Yamaguchi
    • Journal Title

      ISSN 0388-5070 (Reports of the Graduate School of Electronic Science and Technology, Shizuoka University) 26

      Pages: 55-61

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Spectroscopic ellipsometry on sinusoidal surface-relief gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, D.Franta, P.Klapetek, J.Mistrik, T.Yamaguchi, S.Visnovsky
    • Journal Title

      Appl. Surf. Sci. 244,1-244,4

      Pages: 221-224

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Spectroscopic ellipsometry on lamellar gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, K.Murakami, T.Yamaguchi, J.Pistora, M.Horie, S.Visnovsky
    • Journal Title

      Appl. Surf Sci 244,1-244,4

      Pages: 225-229

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Appl. Phys. Lett. 86

      Pages: 231101

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Optical metrology of patterned magnetic structures : deep versus shallow gratings," presented at the 30th SPIE International Symposium on Microlithography-Metrology, Inspection, and Process Control for Microlithography XIX, February 27-March 4,2005, San Jose, California USA2005

    • Author(s)
      R.Antos, M.Veis, E.Liskova, M.Aoyama, J.Hamrle, T.Kimura, P.Gustafik, M.Horie, J.Mistrik, T.Yamaguchi, S.Visnovsky, N.Okamoto
    • Journal Title

      Proc. SPIE 5752

      Pages: 1050-1059

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Airy-like internal reflection series applied in scatterometry and simulations of gratings," presented at SPIE International Symposium on Optical Metrology-Micro-and Nano-Metrology the World of Photonics Congress 2005 (17th International Conference on Photonics in Europe Co-located with LASER 2005, World of Photonics); 12-16 June 2005, Munich, Germany2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Horie, S.Visnovsky
    • Journal Title

      Proc. SPIE 5858

      Pages: 58580Y

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
    • Journal Title

      J. Magn. Magn. Mater.(617)(1) 272-276

      Pages: 1670-1671

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2004

    • Author(s)
      R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
    • Journal Title

      Trans. Magn. Soc. Japan(627)(2) 4 (4-2)

      Pages: 282-285

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
    • Journal Title

      J. Magn. Magn. Mater 272-276

      Pages: 1670-1671

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2008-05-27  

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