2004 Fiscal Year Final Research Report Summary
The Efficient Use of Burned Shell Ceramics as Polishing Abrasive
| Project/Area Number |
15560107
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Hachinohe National College of Technology |
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Principal Investigator |
NAKAMURA Hitoshi Hachinohe National College of Technology, Department of Mechanical Engineering, Lecturer, 機械工学科, 講師 (20227929)
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| Co-Investigator(Kenkyū-buntansha) |
WAKAMATSU Yoshinobu Hachinohe National College of Technology, Department of Liberal Arts and Engineering Science, Professor, 総合科学科, 教授 (80042133)
AKAGAKI Tomoharu Hachinohe National College of Technology, Department of Mechanical Engineering, Professor, 機械工学科, 教授 (20149909)
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| Project Period (FY) |
2003 – 2004
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| Keywords | recycle of shell / non-burned or burned shell ceramics / mica / polishing / silicon wafer / nano meter order roughness / performance of polishing / ecological abrasive |
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| Research Abstract |
The research employs shell ceramics and mica as new polishing abrasive (the condition of the slurry) for the silicon wafer.
○ Shell ceramics
When using the shell ceramics, the silicon wafer whose surface roughness is 110〜130 nmRa becomes a mirror surface (1-5 nmRm) under the condition of 22.4 kPa polishing pressure and 30 minutes polishing time. The shell ceramics is the efficient polishing abrasive. The burned shell ceramics polishes better than the non-burned shell ceramics.
○ Mica
The mirror surface of the nano meter order is obtained by the polishing using mica, as is obtained by the shell ceramics. The research demonstrates that both the shell ceramics and mica can be effectively used as abrasive for polishing. They are ecologically recommendatory than the existing abrasive slurry, and hence, user-friendly.
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