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2004 Fiscal Year Final Research Report Summary

Development of Thin Film Radiation Detectors using TiO_2 film by plasma CVD method

Research Project

Project/Area Number 15560267
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

SHIMOZUMA Mitsuo  Hokkaido University, School of Medicine, Professor, 医学部, 教授 (70041960)

Co-Investigator(Kenkyū-buntansha) DATE Hiroyuki  Hokkaido University, School of Medicine, Professor, 医学部, 教授 (10197600)
Project Period (FY) 2003 – 2004
KeywordsSmall size Radiation Detector / TiO_2 / TiO_2 / Ceramics Structure / SiC / SiC / Alumina Structure / Thin Film Radiation Detector / Plasma CVD / Plasma Processing
Research Abstract

The TiO_2 film have been deposited on alumina substrate by the 50Hz plasma-enhanced CVD at 600℃ using TiCl_4+O_2 gas mixture with a substrate bias circuit using two diodes. Substrate bias voltage was -50(V), and the gas mixture ratio (TiO_2/O_2) was 0.05. The refractive index, dielectric constant and optical energy gap were about 2.7, 120 and 3.0, respectively.
Thin film Radiation detector was made by TiO_2/alumina structure. TiO_2 on alumina plate (1mm in thickness) was deposited 100(nm) to 1(μm) in thickness by the plasma CVD. It seems that thickness of TiO_2 influence upon detector S/N characters. Detector dark current at TiO_2 thickness 200(nm) of TiO_2/alumina structure by 10(V) applied voltage was few tens pA, 1(μm) thickness TiO_2/alumina was few nA current. Therefore, I think so that the thickness of TiO_2 is better than less about 100(nm). Gold thin film two electrodes were set on TiO_2/alumina structure, and add 1 to 100(V) between two electrodes. The film detector was irradiated γ-ray and X-ray of exposure rate 2〜8(C/kg/min) and 5〜33×10^<-4>(C/kg/min), respectively. Irradiation current of I=5 (pA) to 300(pA) was measured with an electrometer at applied voltage 10(V). The measured irradiation current has linearity against radiation intensity. And detection sensitivity of radiation was about 60(nA/ (C/kg/min)). Accordingly, it appears that the thin film radiation detector of TiO_2/alumina structure can be measuring intensity of γ-ray and X-ray. Moreover, the detector was made possible small size as 5×5×1(mm). Moreover, SiC/alumina structure has lower dark current than that of TiO_2/alumina structure. Therefore, it seems that SiC/alumina structure was good detector in comparison with TiO_2/alumina structure.

  • Research Products

    (13 results)

All 2004

All Journal Article (12 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Monte Carlo Simulation for Designing Radiation Detectors Using Radiation Induced Surface Activation.2004

    • Author(s)
      Date H
    • Journal Title

      11^<th> International Congress of the International Radiaton Protection Association (IRPA11) 3g3

      Pages: 84-87

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Fundamental Study on Designing Radiation Detectors Using Radiation Induced Surface Activation.2004

    • Author(s)
      Takamasa T
    • Journal Title

      11^<th> International Congress of the International Radiaton Protection Association (IRPA11) 3h71

      Pages: 71-78

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Development of TiO_2/Ceramics Radiation Detectors by Plasma CVD2004

    • Author(s)
      Shimozuma M
    • Journal Title

      The 21^<th> Symposium on Plasma Processing 21

      Pages: 134-135

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Decomposition Characteristics of Benzene in a Low Pressure Glow Discharge2004

    • Author(s)
      Sawada T
    • Journal Title

      The 21^<th> Symposium on Plasma Processing 21

      Pages: 270-271

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] プラズマCVD法による薄膜/セラミクス構造の放射線センサーの開発2004

    • Author(s)
      下妻光夫
    • Journal Title

      第51回応用物理学関係連合講演集 51

      Pages: 28p-S-4

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] プラズマCVDによる薄膜/セラミクス構造を持つ小型放射線検出器の試作2004

    • Author(s)
      下妻光夫
    • Journal Title

      日本放射線安全管理学会第3回学術大会講演集 3

      Pages: 3P09

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Monte Carlo Simulation for Designing Radiation Detectors Using Radiation Induced Surface Activation.2004

    • Author(s)
      Date H.
    • Journal Title

      Proceedings of 11^<th> International Congress of the International Radiation Protection Association (IRPA11) 3g3

      Pages: 84-87

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fundamental Study on Designing Radiation Detectors Using Radiation Induced Sure face Activation2004

    • Author(s)
      Takamasa T
    • Journal Title

      Proceedings of 11^<th> International Congress of the International Radiation Protection Association (IRPA11) 3h71

      Pages: 71-78

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of TiO_2/Ceramics Radiation Detectors by Plasma CVD2004

    • Author(s)
      Shimozuma M.
    • Journal Title

      Proceedings of 21^<st> Symposium on Plasma Processing 21

      Pages: 134-135

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Decomposition Characteristics of Benzene in a Low Pressure Glow Discharge2004

    • Author(s)
      Sawada T.
    • Journal Title

      Proceedings of 21^<st> Symposium on Plasma Processing 21

      Pages: 270-271

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of TiO_2/Ceramics Radiation Detectors by Plasma CVD2004

    • Author(s)
      Shimozuma M.
    • Journal Title

      Proceedings of 51^<st> JSAP Spring Meeting 51

      Pages: 28ps4

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of Thin Film/ Insulator Radiation Detectors by Plasma CVD2004

    • Author(s)
      Shimozuma M.
    • Journal Title

      Proceedings of 3rd JRSM Meeting 3

      Pages: 3P09

    • Description
      「研究成果報告書概要(欧文)」より
  • [Patent(Industrial Property Rights)] 放射線の線量測定素子およびこれを用いた放射線の線量測定装置2004

    • Inventor(s)
      伊達 広行, 下妻 光夫
    • Industrial Property Rights Holder
      伊達 広行, 下妻 光夫
    • Industrial Property Number
      JP-0117
    • Filing Date
      2004-05-20
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2006-07-11  

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