Magneto-strictive-driven dual AFM probe for narrow-gapped delivery in liquid

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H03940
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Yamagata University
• Principal Investigator: Mineta Takashi 山形大学, 大学院理工学研究科, 教授 (50374814)
• Co-Investigator(Kenkyū-buntansha): 小池 邦博 山形大学, 大学院理工学研究科, 准教授 (40241723)
• Co-Investigator(Renkei-kenkyūsha): OKUNO Takashi 山形大学, 大学院理工学研究科, 准教授 (80411031) ; SHIBATA Takayuki 豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (10235575)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: AFMプローブ / 近接探針 / 磁歪薄膜 / 液中デリバリ / MEMS

Outline of Final Research Achievements

Multi-atomic force microscopic (AFM) probe with imaging and other functions have been expected as molecular operation tools, in particular in biology research field. In this research, novel fabrication process technologies of sub-μm-gapped dual Si AFM probe with hollow-structure was established. Large deflectable twin cantilevers with high quality magneto-strictive thin film actuator was also developed for the function of dual cantilever switching.

Free Research Field

機械工学・知能機械学・機械システム