Spectral polarization nano topometry for 3D nanostructure and constituent element

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H03941
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Utsunomiya University
• Principal Investigator: Otani Yukitoshi 宇都宮大学, 工学(系)研究科(研究院), 教授 (10233165)
• Co-Investigator(Kenkyū-buntansha): セラノオG ダビッドI 宇都宮大学, 学内共同利用施設等, 特任研究員 (80747270)
• Research Collaborator: Nathan Hagen ; Kawabata Shuichi
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: ナノ形状計測 / ナノ構造 / ナノ材料 / 分光偏光計 / シングルピクセルカメラ

Outline of Final Research Achievements

We proposed a spectral Stokes polarimeter and a spectral Mueller matrix polarimeter with high speed and accuracy by photo-elastic modulators. A super continuum laser is used for a light source by selecting specified spectrum using a Tellurium dioxide acoustic-optic tunable filter. A three-dimensional nano-structure is analyzed by structured birefringence and diattenuation from high precision partial and full Mueller matrix comparing with simulated data by boundary element method(BEM). We succeeded to determine a few nano meters of sensitivity of nano structures and show the possibilities for constituent element
from spectral information.

Free Research Field

光工学