Spontaneous formation of semiconductor/insulator superlattice thin film using Dynamic Aurora PLD and its large thermoelectric property

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H04123
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Shizuoka University
• Principal Investigator: Wakiya Naoki 静岡大学, 電子工学研究所, 教授 (40251623)
• Co-Investigator(Kenkyū-buntansha): 鈴木 久男 静岡大学, 電子工学研究所, 教授 (70154573) ; 坂元 尚紀 静岡大学, 電子工学研究所, 准教授 (80451996)
• Co-Investigator(Renkei-kenkyūsha): SHINOZAKI Kazuo 東京工業大学, 理工学研究科, 教授 (00196388)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: ダイナミックオーロラPLD / スピノーダル分解 / 自発的超格子構造生成 / エピタキシャル成長 / 熱電特性 / 酸化物 / 薄膜

Outline of Final Research Achievements

Using a “Dynamic Aurora PLD” we deposited La or Nb-doped strontium titanate or lanthanum strontium cobalt oxide thin film on strontium titanate single crystal substrate, and found out spontaneous superlattice formations. For these thin films, it was clarified that the figure of merit of thermoelectric properties increases with decreasing the superlattice period. This phenomenon suggests that the thin films are approaching to the 2-dimensional electron gas structure by decreasing the thick ness of spontaneously formed carrier doped layer. These results are in good agreement with the previous reports of artificial superlattice.

Free Research Field

電子セラミックス薄膜の作製と評価