Development of imprinting process with laser-machining

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H04161
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/Microstructural control engineering
• Research Institution: Kyushu University
• Principal Investigator: TSUMORI Fujio 九州大学, 工学研究院, 准教授 (10343237)
• Co-Investigator(Kenkyū-buntansha): 河野 正道 九州大学, 工学研究院, 教授 (50311634) ; 中島 裕典 九州大学, 工学研究院, 助教 (70432862)
• Co-Investigator(Renkei-kenkyūsha): NAKAJIMA Hironori 九州大学, 大学院工学研究院, 助教 (70432862)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: セラミックス / 微細加工 / 微細流路 / インプリントプロセス / 燃料電池 / SOFC

Outline of Final Research Achievements

In this work, we improved nano-imprint lithography (NIL) process. The conventional NIL process uses only polymer material, and formed 2-dimensional pattern. We proposed and developed a new process to fabricate ceramic parts with wavy micro channels. The ceramic channels could be a candidate of the solid oxide fuel cells (SOFC), and our final goal is application of the proposed process to the improved SOFC. During this project, we achieved to fabricate finer channels, leak-testing, control of the process parameters to obtain designed channel structure, optimization of the laser processing. We also discussed to design a new type SOFC with micro channels.

Free Research Field

微細加工