2016 Fiscal Year Final Research Report
Lift-off based microfabrication of functional oxides
| Project/Area Number |
15H06029
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| Research Category |
Grant-in-Aid for Research Activity Start-up
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| Allocation Type | Single-year Grants |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Tohoku University |
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Principal Investigator |
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| Project Period (FY) |
2015-08-28 – 2017-03-31
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| Keywords | 微細加工 / 機能性物質 / デバイス |
|---|
| Outline of Final Research Achievements |
Advance in materials science has brought various materials with interesting functionality. Microfabrication of thin films is essential to use such materials in real devices. Here, we have developed a versatile process usable to pattern wide varieties of materials without deteriorating their properties. The key is to use a easily-soluble sacrificial layer as a template. After growing a target material, the template layer is removed by a suitable etchant to get a device structure. This method can open a way to fabricate devices with new functionality out of emerging materials.
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| Free Research Field |
応用物理学
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