2016 Fiscal Year Annual Research Report
Ultrasonic cavitation assisted fluid jet polishing
| Project/Area Number |
15H06320
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| Research Institution | Kyoto University |
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Principal Investigator |
ブカン アントニー 京都大学, 工学研究科, 講師 (30756838)
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| Project Period (FY) |
2015-08-28 – 2017-03-31
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| Keywords | 精密研磨 / 材料加工-処理 / シミュレーション |
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| Outline of Annual Research Achievements |
Fluid jet polishing is widely used in super-fine finishing of small and complex optical and prosthetic surfaces. Its advantages include highly controllable polishing footprints and absence of tool wear. But the main drawback is very low material removal rate.
To address this issue, a novel process was proposed in which ultrasonic cavitation generates micro-bubbles directly upstream of the nozzle outlet.
In this research project, we first created a numerical simulation of the acoustic and fluid dynamics in the proposed process, to confirm feasibility and optimise design parameters.
We then implemented a prototype system using a 26-130 kHz ultrasonic transducer. Experimental results show that micro-bubbles boost removal rate by up-to 380%, without causing any degradation of surface finish.
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| Research Progress Status |
28年度が最終年度であるため、記入しない。
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| Strategy for Future Research Activity |
28年度が最終年度であるため、記入しない。
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| Remarks |
As well as abrasive polishing, we are now also investigating application of micro-bubble assisted water jet to fine processing of silicon wafers for semiconductor applications.
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