Development of metal/oxide multilayer films showing self-propagating exothermic reaction with controllable heat generation performance

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K04626
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Nanomaterials engineering
• Research Institution: University of Hyogo
• Principal Investigator: Inoue Shozo 兵庫県立大学, 工学研究科, 教授 (50193587)
• Co-Investigator(Renkei-kenkyūsha): NAMAZU Takahiro 愛知工業大学, 工学部, 教授 (90347526)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: 多層薄膜 / スパッタリング / 自己伝播発熱反応

Outline of Final Research Achievements

The purpose of this study is to develop biocompatible nano-materials showing self-propagating exothermic reaction with controllable reaction behavior for medical applications. Ti/Si multilayer film can be a promising material, but its reactivity is so high that its reaction ignits with a very small mechanical stimulus such as tweezers picking. Therefore, we propose a Ti/SiOx multilayer film as an alternative to control the reactivity. As x increases up to 0.56, the Ti/SiOx multilayer films allow us to suppress an excessive reactivity without reducing heat emission. It was also found that SiO2 is formed together with Ti silicide during the reaction of Ti-SiOx solid state reaction.

Free Research Field

薄膜工学