Micro-fabrication by nano-transfer-printing with controlled surface force

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K05729
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Tokyo Metropolitan University
• Principal Investigator: Kaneko Arata 首都大学東京, システムデザイン研究科, 准教授 (30347273)
• Co-Investigator(Kenkyū-buntansha): 諸貫 信行 首都大学東京, システムデザイン研究科, 教授 (90166463)
• Research Collaborator: SHIMIZU Tetsuhide ; TAKEDA Iwori ; KOBAYASHI Hayato
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: トランスファプリント / 薄膜 / 微細構造 / MEMS / 表面力

Outline of Final Research Achievements

PDMS stamps are processed in O2-plasma for surface modification, so that the surface roughness Ra is adjusted in the range of 10 nm to 100 nm. The stamp with moderate surface force improves the transferring ratio of Au thin-film. It is confirmed that high modulus PDMS stamp is favorable in three-dimensional micro-fabrication by transfer-print as compared to low modulus PDMS, because Au thin-films could be easily formed in a micro-beam structure of 50-μm-width and 150-μm-length. It is also demonstrated that a micro-tactile sensor can be fabricated by transfer-print using the high modulus stamp with moderate surface force. Applying load in the range of 0 to 1 N to the fabricated micro-tactile sensor induces the capacitance to be linearly increased with the load, so that the prototype structure has a function of tactile sensing. Another transfer-printing makes bi-layered film of graphene oxide nanoparticles and Au formed into two-dimensional line patterns or rectangular-corrugated film.

Free Research Field

微細加工