Development of mold for thermal nanoimprinting capable of forming nano pattern of complicated shape on glass surface

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K05747
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Kanagawa Institute of Industrial Sclence and Technology
• Principal Investigator: Yasui Manabu 地方独立行政法人神奈川県立産業技術総合研究所, 電子技術部, 主任研究員 (80426361)
• Co-Investigator(Renkei-kenkyūsha): Arai Masahiro 名古屋大学, 大学院工学研究科, 教授 (30260532) ; Ito Hiroaki 近畿大学, 工学部, 講師 (70534981)
• Research Collaborator: Kaneko Satoru (地独)神奈川県立産業技術総合研究所, 電子技術部電子材料グループ, グループリーダ (40426359) ; Kurouchi Masahito (地独)神奈川県立産業技術総合研究所, 電子技術部電子材料グループ, 主任研究員 (10452187)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: Ni-W金型 / ナノインプリント / ガラス / めっき / アルミ二ウム

Outline of Final Research Achievements

We fabricated a Ni-W mold with a moth - eye structure using Ni-W plating with excellent releasability. Since aluminum nano-holes have been studied as a light receiving element utilizing plasmon resonance, we have studied aluminum nanoimprinting using a Ni-W mold. As a result, nanoholes could be formed on the surface of the pure aluminum plate at room temperature. The required pressure was 100 MPa. Compared to thermal nanoimprint for thermoplastic resin, the pressure of aluminum nanoimprint is more than 10 times greater, and it is a task to lower the pressure. In addition, Ni - W molds with large warpage due to thermal nanoimprint embrittles and has a high possibility of cracking. Therefore, we stopped thermal nanoimprint for glass.

Free Research Field

工学