A Proposal on the Microfabrication Method of Fluorine Polymer and Its Application to Microfluidic Devices

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K05749
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Toyama Industrial Technology Center,
• Principal Investigator: Nabesawa Hirofumi 富山県工業技術センター, その他部局等, 副主幹研究員 (50416145)
• Co-Investigator(Kenkyū-buntansha): 関 実 千葉大学, 大学院工学研究院, 教授 (80206622)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: プラズマ加工 / マイクロ・ナノデバイス / フッ素樹脂 / 反応性イオンエッチング / マイクロ流体デバイス

Outline of Final Research Achievements

In order to realize fluorine microfluidic devices with chemical resistance, a practical microfabrication method of fluorine polymer bulk plate was investigated by applying reactive ion etching technique. A mechanism of surface morphology formed on fluorine polymer during oxygen plasma etching was clarified to yield smooth etched surface. In addition, this technique was tried to apply to microfluidic device for liquie chromatography and hydrogel droplet generation. The technique presents as a promising tool for micro-reactors and fluorine micro-components.

Free Research Field

ナノマイクロシステム