2017 Fiscal Year Final Research Report
Development and enhancement of novel functions of silicon/nitrogen-doped diamond-like carbon films
| Project/Area Number |
15K06432
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Hirosaki University |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Keywords | カーボン材料 |
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| Outline of Final Research Achievements |
Diamond-like carbon (DLC) films have excellent properties such as high hardness, high wear resistance, low friction, chemical inertness, and biocompatibility. In this study, we have developed silicon/nitrogen-doped DLC films that were superior to conventional DLC films in mechanical, electrical and optical properties. In addition, we examined correlations between the structure and chemical bonding and the properties of the DLC films to obtain fundamental knowledge for the further improvement of their properties. We demonstrated that the coincorporation of Si and N into the DLC films was very effective in improving the mechanical, electrical and optical properties.
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| Free Research Field |
薄膜工学、半導体工学
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