Structure and function of nano-bubbles formed by a thinfilm with nano-scaled through holes

2016 Fiscal Year Final Research Report

• Project/Area Number: 15K13279
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Nanomaterials chemistry
• Research Institution: Tohoku University
• Principal Investigator: Niwano Michio 東北大学, 電気通信研究所, 教授 (20134075)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Keywords: ナノバブル / ポーラスアルミナ / 洗浄効果 / 粒径分布

Outline of Final Research Achievements

We have proposed a simple method of generating nano-bubbles (NBs) by a porous alumina film with ordered nano-scaled holes. We have investigated the size distribution of NBs generated by our proposed method using the nano tracking analysis (NTA) and the semiconductor surface cleaning effect of NBs using infrared absorption spectroscopy in the multiple internal reflection geometry (MIR-IRAS) and a scanning electron microscope (SEM). We found that the diameter of the NBs is in the range of 50-150 nm and depends on the kind of the gas in NBs. When a Si surface covered with an organic film was exposed to NBs in water, absorption bands originated from the film significantly decreased their absorption intensities. In addition, SEM images showed that after exposure to NBs, there appeared a number of circular traces where no carbon contaminations were observed. These observation clearly indicate the surface cleaning effect of NBs.

Free Research Field

ナノエレクトロニクス