Study on fabrication of nanoparticle-type superatoms by using RT atomic layer deposition

2016 Fiscal Year Final Research Report

• Project/Area Number: 15K13299
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Nanomaterials engineering
• Research Institution: Yamagata University
• Principal Investigator: Hirose Fumihiko 山形大学, 大学院理工学研究科, 教授 (50372339)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Keywords: 原子層堆積 / ナノ微粒子 / コアシェル / 紫外線センサー

Outline of Final Research Achievements

Atomic layer depostion (ALD) has been used as a coating method on wafers although it was difficult to apply it for nanoparticels. The shell coating on the nanoparticle with ALD might pave a way to produce the new functional materials with quantum size effects. In this study, we developed the new ALD for the nanoparticles. It was proved that the prodcution of Au-core TiO2-shell particle was possible, where the thickness was controlled with nanometers of less than 100 nm. We also found a new design of thin film transistor, in which the UV detection is possible with a high sesitivity. The present ALD would be applicable for producing new functional nano materials.

Free Research Field

ナノテクノロジー