Development of Super-resolution Technique in Transmission X-ray Imaging using Embedded X-ray Targets

2016 Fiscal Year Final Research Report

• Project/Area Number: 15K13408
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Quantum beam science
• Research Institution: Osaka University
• Principal Investigator: Shimura Takayoshi 大阪大学, 工学研究科, 准教授 (90252600)
• Co-Investigator(Renkei-kenkyūsha): WATANABE HEIJI 大阪大学, 大学院工学研究科, 教授 (90379115) ; HOSOI TAKUJI 大阪大学, 大学院工学研究科, 助教 (90452466)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Keywords: Ｘ線 / イメージング / 超解像 / 画像回復計算

Outline of Final Research Achievements

We propose super-resolution technique in transmission X-ray imaging, in which an array of small X-ray sources is utilized. In this technique, high-spatial-resolution X-ray image equivalent to that obtained with a single small X-ray source is reconstructed from the observation using the source array. We demonstrate the principle of this technique using multi-dot gold targets embedded in a silicon substrate in an X-ray imaging system. In X-ray imaging with an array of six X-ray sources of 1 um diameter, a line & space pattern of 0.6 um width is clearly resolved, indicating the effectiveness of this technique.

Free Research Field

応用表面科学