2016 Fiscal Year Final Research Report
Development of plasma window for innovative vacuum interface
| Project/Area Number |
15K13610
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Plasma science
|
|---|
| Research Institution | Hiroshima University |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2015-04-01 – 2017-03-31
|
| Keywords | プラズマウィンドウ / 高密度プラズマ / 大気圧アーク放電 / プラズマ分光 |
|---|
| Outline of Final Research Achievements |
To realize a novel vacuum-atmosphere interface that does not require a large differential pumping system, a robust cascade arc discharge source called a plasma window is constructed and tested for long-term operation. By modifying a test plasma with a direct current discharge, a vacuum interface with a high gas pressure ratio of ~1/1000 between the discharge and expansion sections is demonstrated for currents as high as 50 A. No significant damage to the electrodes is observed during the operation. Analysis of the visible emission spectra reveals that a stationary, stable argon plasma having a temperature of 1 eV and a density of 5e16/cc is generated in the plasma channel.
|
| Free Research Field |
プラズマ工学
|
