Development of soft process of dimensional transformation for Si by non-equilibrium high-pressure hydrogen plasma

2016 Fiscal Year Final Research Report

• Project/Area Number: 15K13848
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: Osaka University
• Principal Investigator: Ohmi Hiromasa 大阪大学, 工学研究科, 助教 (00335382)
• Research Collaborator: SIHONDA Fumiya ; HIRANO Tatsuya ; TAKEI Norihisa
• Project Period (FY): 2015-04-01 – 2017-03-31
• Keywords: シリコン / 水素 / プラズマ / ナノ粒子

Outline of Final Research Achievements

Nano-sized Si (n-Si) particle has drawn strong attention as key material for the next-generation opt-electronic devices, such as quantum dot solar cell greater than the theoretical efficiency of Si bulk cell, Si visible light emitting diode, and negative-electrode active material of higher capacity and long cycle lifetime Li ion battery. In this study, we attempted to create n-Si particles from bulk Si material by using a non-equilibrium high-pressure hydrogen plasma toward a low cost production of n-Si particle for negative-electrode active material of Li ion battery from cheap Si bulk material. We developed the various type high-pressure hydrogen plasma sources and evaluated their properties. At last, by using a slit type plasma source, we achieved to create n-Si particles with their diameters of less than 50 nm.

Free Research Field

プラズマ材料科学