Ultrahigh sensitivity terahertz sensing by photonic crystal cavity

2016 Fiscal Year Final Research Report

• Project/Area Number: 15K13952
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Electronic materials/Electric materials
• Research Institution: Osaka University
• Principal Investigator: Fujita Masayuki 大阪大学, 基礎工学研究科, 准教授 (40432364)
• Co-Investigator(Renkei-kenkyūsha): NAGATSUMA TADAO 大阪大学, 大学院基礎工学研究科, 教授 (00452417)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Keywords: テラヘルツ / フォトニック結晶 / 共振器 / センシング

Outline of Final Research Achievements

We studied photonic crystal microcavity for ultrahigh sensitivity sensing using terahertz wave with frequency located between the radio and light waves. We fabricated the cavity with a Q factor of approximately 10,000 in the 0.3 THz band from high resistivity silicon wafer using microfabrication technology. As a test bed for the sensing application, we successfully detected a change in the resonant spectrum of the cavity when a dielectric film with a thickness smaller than 1/100 of the wavelength was attached to the surface of the cavity.

Free Research Field

光電子量子工学