Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K17453
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Yamane Daisuke 東京工業大学, 科学技術創成研究院, 助教 (70634096)
• Co-Investigator(Renkei-kenkyūsha): MASU Kazuya 東京工業大学, 科学技術創成研究院, 教授 (20157192) ; MACHIDA Katsuyuki 東京工業大学, 科学技術創成研究院, 特任教授 (90597676) ; SONE Masato 東京工業大学, 科学技術創成研究院, 教授 (30323752)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: ナノG / 加速度 / MEMS / ナノマイクロセンサ / 金 / 金合金 / 結晶 / 金めっき

Outline of Final Research Achievements

Noise of the developed Au-alloy MEMS accelerometer was experimentally evaluated to be below 30 nG/√Hz, and therefore we achieved the target resolution of below 0.1 uG. Long-term vibration test results showed the device functioned even after 10^6 vibration cycles that would usually cause fatigue in metal materials. Temperature test results exhibited the device survived after temperature change from -50 ℃ to 100 ℃. Furthermore, we developed a sensing module with the fabricated MEMS device and demonstrated acceleration sensing on human body. In terms of mechanical strength of Au-alloy, we successfully developed an Au-alloy material with the yield strength of above the target value (1 GPa). In conclusion, the developed Au-alloy device has a promising potential to detect nano-G.

Free Research Field

総合理工