Increasing of the ductility on single crystal silicon and its application to microneedle

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K17937
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Materials/Mechanics of materials
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: Izumi Hayato 名古屋工業大学, 工学(系)研究科(研究院), 助教 (90578337)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: シリコン / 水素 / 転位 / 塑性変形

Outline of Final Research Achievements

The aim of study is to evaluate plastic deformation behavior on silicon surface of both defect and hydrogen. Two groups of silicon sample with/without surface damage introduced by reactive ion etching (RIE) and exposure to hydrogen plasma to introduce hydrogen into crystal, thus four types of samples were prepared. Depth profile and trapping state of hydrogen atoms diffused into each samples were measured by thermal desorption spectroscopy (TDS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Nanoindentation curve of each samples were compared under deep and shallow indentation depth. As a results, there found on change in indentation depth under same load level between two case with/without exposure to hydrogen plasma. In contrast to this, surface damage and hydrogen had significantly deeper indents than the other cases. These results suggested that plastic deformation of silicon is enhanced due to synergy effect of both defect and hydrogen even at room temperature.

Free Research Field

機械工学