2017 Fiscal Year Final Research Report
Effects of hydrogen gas on the electrical and thermal properties of metal film
| Project/Area Number |
15K17989
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thermal engineering
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| Research Institution | Kyushu University |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Keywords | 水素検知器 / MEMSセンサ / 白金薄膜 / デバイス開発 |
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| Outline of Final Research Achievements |
This study aims to measure the changes of electrical and thermal properties of metal film when exposuring to hydrogen gas. Also, the feasibility of developing a hydrogen sensor by using the "micro-beam" metal film is discussed based on the measurement results. We developed a gas supplying system using a handmade vacuum chamber. We also fabricated a platinum film MEMS sensor on a silicon substrate across a trench. We examined the effects of exposuring of time to the hydrogen gas, gas pressure and measurement temperature on the electrical-thermal properties of platinum film MEMS sensor. The electrical resistance of the sensor in hydrogen gas was 3 % smaller than the original value. Furthermore, the decrease of electrical resistance was irreversible.
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| Free Research Field |
熱工学
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